Characteristics Analysis and Manufacture of Ta2O5 Thin Films Prepared by Dual Ion-beam Sputtering Deposition with Change of Ar/O2Gas Flow Rate of Assist Ion Beam
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윤석규
(성균관대학교 신소재공학과)
김회경 (전자부품연구원 광부품연구센터) 김근영 (성균관대학교 신소재공학과) 김명진 (전자부품연구원 광부품연구센터) 이형만 (전자부품연구원 광부품연구센터) 이상현 (인하대학교 물리학과) 황보창권 (인하대학교 물리학과) 윤대호 (성균관대학교 신소재공학과) |
1 |
Annealing Effect on the Structure and Laser-induced Damage Thresh-old of <TEX>$Ta_2O_5$</TEX>/SiO₂ Dielectric Mirrors
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DOI ScienceOn |
2 |
Reduction of Surface Roughness by <TEX>$Ta_2O_5$</TEX> Film Formation with O₂ Cluster Ion Assisted Deposition
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DOI ScienceOn |
3 |
Infurence of Apparatus Geometry and Deposition Conditions on the Structure and Topography of Thick Sputtered Coating
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DOI |
4 |
Electron Microscopic Investigations of Cross Section of Optical Thin Films
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DOI ScienceOn |
5 |
Optical Properties of TiO₂Thin Films Prepared by Ion-beam Assisted Deposition
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6 |
Surface Optical Coating by Ion Assisted Deposition Techniques : Study of Uniformity
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DOI |
7 |
Determination of Optical Constants and Thickness of Weakly Absorbing Thin Films Using An Envelop Method
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과학기술학회마을 |
8 |
Morphology and Structure of TiO₂Thin Layers Versus Thickness and Substrate Temperature
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DOI ScienceOn |
9 |
Technology and Applications Broad-beam Ion Sources Used in Sputtering
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DOI |
10 |
Study on the Amorphous <TEX>$Na_2O_5$</TEX> Thin Film Capacitors Deposited by DC Magnetron Reactive Sputtering for Multichip Module Applications
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DOI ScienceOn |
11 |
Optical and Mechanical Properties of <TEX>$Na_2O_5$</TEX> Optical Thin Films by Ion Assisted Deposition
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과학기술학회마을 |
12 |
Ion Assist Deposition of Optical Thin Films : Low Energy vs High Energy Bombardent
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DOI ScienceOn |
13 |
Optical and Structural Properties of Dense SiO₂, <TEX>$Na_2O_5$</TEX>, and <TEX>$Nb_2O_5$</TEX> Thin-films Deposited by Indirectly Reactive Sputtering Technique
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DOI ScienceOn |
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