• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.156-156
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• 2005

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.155-155
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• 2005

• Journal of Powder Materials
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• v.16 no.1
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• pp.28-32
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• 2009

The activation temperatures and hydrogen sorption rates of $Ti_{80-X}Zr_{20}V_X$ alloys were evaluated at room temperature. The alloy powders were prepared by arc melting and then hydride-dehydride(HDH) process. The alloy powders were apt to activate by increase of vanadium in Ti-Zr-V alloys. The easy activation was explained in terms of surface oxygen content which decreased with increase of vanadium on Ti-Zr-V alloys.

• Journal of Powder Materials
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• v.12 no.6 s.53
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• pp.433-440
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• 2005

The hydrogen sorption speed of $Zr_{57}V_{36}Fe_7$ nanocrystalline and amorphous alloys was evaluated at room temperature. Nanocrystalline alloys of $Zr_{57}V_{36}Fe_7$ were prepared by planetary ball milling. The hydrogen sorption speed of nanocrystalline alloys was higher than that of the amorphous alloy. The enhanced sorption speed of nanocrystalline alloys was explained in terms of surface oxygen stability which has been known to retard the activation of amorphous alloys. The retardation can be reduced by formation of nanocrystals, which results in the observed increase in sorption properties.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.241-241
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• 2010

적외선 센서는 빛의 유무에 관계없이 물체 또는 인체에서 발산하는 적외선을 감지한다. 이러한 센서를 전자 및 디스플레이 시스템과 연동하면 열영상 시스템이 되는데, 이는 전방 감시, 플랜트 감시, 보안, 방범용으로 많이 사용되며, 특히 자동차 야간 운전자 보조용으로 사용되어 최첨단, 고부가가치를 지니고 있는 핵심부품이다. 비냉각형 적외선 센서인 마이크로볼로미터는 상온에서 작동하므로 극저온 Cooler가 불필요하며, 무게와 부피가 작아 각종 시스템에 부착가능하다. 특히 볼로미터형 적외선 센서는 용량이 적은 TE cooler로 상온으로 안정화를 시키며, 진공으로 유지되는 금속 또는 세라믹 패키지를 사용하게 된다. 본 연구에서는 마이크로 볼로미터용 진공패키지를 제작하여 패키지 조립 및 측정기술에 대해 조사하였다. 패키지는 금속재질인 kovar를 사용하여 제작되었고, 내부에 TE Cooler와 장수명 진공유지를 위한 getter, 그리고 온도센서 및 볼로미터 센서 칩을 장착하여 조립하였다. 패키지 Cap ass'y와 base envelop의 솔더링 공정은 약 $200^{\circ}C$에서 수행하였으며, evacuation system을 이용하여 5일 동안 패키지 bake-out 공정을 수행하였다. 이 후 getter를 활성화시키고, seal-off 공정으로 진공 기밀을 유지하였다. 진공 패키지의 기밀성은 $6{\times}10^{-9}\;std.cm^3/sec$로 기밀성을 유지하였다. 볼로미터 센서의 반응도는 $10^2\;V/W$ 이상을 나타내었으며, 탐지도는 $2{\times}10^8\;cm-Hz^{1/2}/W$를 나타내었다.

• Korean Journal of Materials Research
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• v.15 no.12
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• pp.802-808
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• 2005

The hydrogen sorption speeds of $Zr_{57}V_{36}Fe_7$ amorphous alloy and its crystallized alloys were evaluated at room temperature $Zr_{57}V_{36}Fe_7$ amorphous alloy was prepared by ball milling. The amorphous alloy was crystallized through two stages. Initially, $\alpha-Zr$ solid solution was appeared from the amorphous phase. Two cubic Laves compounds were precipitated afterwards from the remained amorphous and from excessively saturated solid solution at higher temperature. The hydrogen sorption speed of the partially crystallized alloy was higher than that of amorphous. The enhanced sorption speed of partially crystallized alloy was explained in terms of surface oxygen stability which has been known to retard the activation of amorphous alloys. The retardation could be reduce by crystallization process resulting in the observed increase in sorption property.

• Transactions of the Korean hydrogen and new energy society
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• v.27 no.2
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• pp.163-168
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• 2016

Korea has been developing nuclear fusion fuel storage and delivery system (SDS) technologies including a basic scientific study on hydrogen storage. To develop nuclear fusion technology, it is necessary to store and supply hydrogen isotopes needed for Tokamak operation. SDS is used for storing hydrogen isotopes as a metal hydride form. The rapid hydriding of tritium is very important not only for safety reasons but also for the economic design and operation of the SDS. In this study, we designed and fabricated a medium-scale getter bed of depleted uranium (DU). The hydriding of DU has been measured by varying the initial temperature ($100-300^{\circ}C$) of the DU getter bed to investigate the influence of the cooling temperature. Furthermore, we analyzed the effect of a helium blanket on the hydriding performance with 0 - 12% helium content in hydrogen.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.240-240
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• 2013

PLS-II 저장링 진공시스템의 주 배기 장치로 설치되어 운용되고 있는 조합펌프(NEG+이온펌프)의 성능을 측정하였다. 이 조합펌프는 60 l/s 또는 30 l/s의 이온펌프와 WP950 (ZrVFe) getter module (1~3개)로 구성되어 있다. 이 펌프의 배기속도를 활성화 방법에 따라 측정하여 성능을 검증하고 재활성화 빈도, 흡착률을 실험적으로 측정하였다. 배기속도는 수소, 일산화탄소, 수소+일산화탄소의 혼합기체를 사용하여 측정하여 보고하고자 한다.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.45.3-45
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• 1998

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.