• 센서학회지
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• 제20권6호
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• pp.428-433
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• 2011

We report on the building of a micro sensor array based on typical semiconductor fabrication processes aimed at monitoring selectively a specific gas in ambient of other gases. Chemical sensors can be applied for an electronic nose and/or robots using this technique. Microsensor array was fabricated on the same chip using 0.6${\mu}m$ CMOS technology, and unique gas sensing patterns were obtained by principal component analysis from the array. $SnO_2$/Pt sensor for CO gas showed a high selectivity to buthane gas and humidity. $SnO_2$ sensor for hydrogen gas, however, showed a low selectivity to CO and buthane gas. We can obtain more distinguishable patterns that provide the small sensing deviation(the high seletivity) toward a given analyte in the response space than in the chemical space through the specific parameterization of raw data for chemical image formation.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1998년도 PROCEEDINGS OF THE 15TH KACG TECHNICAL MEETING-PACIFIC RIM 3 SATELLITE SYMPOSIUM SESSION 4, HOTEL HYUNDAI, KYONGJU, SEPTEMBER 20-23, 1998
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• pp.91-95
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• 1998

Selectivity of SiC deposition on a Si substrate partially covered with a masking material was investigated by introducing HCl gas into hexamethyldisilane/H2 gas system during the deposition. the schedule of the precursor and HCl gas flows was modified so that the selectivity of SiC deposition between a Si substrate and a mask material should be improved. It was confirmed that the selectivity of SiC deposition was improved by introducing HCl gas. Also, the pulse gas flow technique was effective to enhance the selectivity.

• Journal of information and communication convergence engineering
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• 제2권1호
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• pp.22-25
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• 2004

A highly sensitive ammonia gas sensor using thick-film technology has been fabricated and examined. The sensing material of the gas sensor is FeOx-$WO_{3}-SnO_{2}$ oxide semiconductor. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. A novel method for detecting ammonia gas quite selectively utilizing a sensor array consisting of an ammonia gas sensor and a compensation element has been proposed and developed. The compensation element is a Pt-doped $WO_{3}-SnO_{2}$gas sensor which shows opposite direction of resistance change in comparison with the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array having two sensing elements.

• 한국결정성장학회지
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• 제9권1호
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• pp.14-19
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• 1999

Hexamethyldisilane$(Si_{2}(CH_{3})_{6})$의 single precursor를 사용하여 화학기상증착법으로 $1100^{\circ}C$에서 Si 기판의에 $\beta$-SiC 막을 증착시켰다. 증착과정 중 hexamethyldisilane/$H_{2}$ gas system에 HCI gas를 도입하여 mask 재료에 의해 부분적으로 덮여져 있는 Si 기판에서 SiC 증착의 선택성을 조사하였다. Si 기판과 mask 재료에서 SiC 증착의 선택성을 증진시키기 위해 출발물질과 HCI gas의 공급 방법을 변화시켰다. 결국, HCI gas를 도입함으로서 SiC 증착의 선택성은 증진되었고 펄스 형태로의 gas 공급 방법은 선택성을 향상시키는데 효율적이었다.

• Korean Membrane Journal
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• 제5권1호
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• pp.43-53
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• 2003

The selectivity of a gas in the carbon molecular sieve membrane (CMSM) can be expressed as the ratio of the product of the diffusivity and the solubility of two different gases. The diffusivity is also expressed as the product of the entropy and the total energy (kinetic and potential energy) in the nano-sized pore of the membrane. The present study calculates the entropic-energy and selectivity of penetrant gases such as H$_2$, O$_2$, N$_2$, and CO$_2$ from the gas-in-a box theory to physically analyze the diffusivity of penetrant gas in slit-shaped pore of CMSM focusing on the restriction of gas motion based on the size difference between penetrant gas pairs. The contribution of each energy term is converted to entropic term separately. By the conjugated calculation for each entropic-energy, the entropic effects on diffusivity-selectivity for gas pairs such as H$_2$/N$_2$, CO$_2$/N$_2$, and O$_2$/N$_2$ were analyzed within active pore of CMSM. In the activated diffusion domain, the calculated value of entropic-selectivity lies between 9.25 and 111.6 for H$_2$/N$_2$, between 3.36 and 6.0 for CO$_2$/N$_2$, and between 1.25 and 16.94 for O$_2$/N$_2$, respectively. The size decrement of active pore in CMSM had the direct effect on the reduction of translational entropic-energy and the contribution of vibrational entropic-energy for N$_2$, O$_2$, and H$_2$ was almost negligible. However, the vibrational entropic term of CO$_2$ might extravagantly affect on the entropic-selectivity.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.404-405
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• 2008

In this work, we investigated the effect of the functionalized SWNT-polymer composites for increasing sensitivity and imparting selectivity to nanotube sensors. To do this, CNT -based gas sensors were fabricated with two types of dispersed SWNT solution involving different polymer resin of TEOS (Tetraethyl orthosilicate) or MTMS (Methyl trimethoxysilane) which is blended to adhere to substrate well. As the surfaces of TEOS and MTMS surrounding SWNTs remain functionalized to -OH and $-CH_3$ groups respectively after hardening, gas adsorption will be affected differently according to the type of gases. In the experiment, we examined the response of electrical conductance for alcohol vapour gas. As the result, the conductance in the sensors using TEOS decreased considerably while that of MTMS was nearly invariable.

• 한국세라믹학회지
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• 제42권1호
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• pp.11-15
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• 2005

The configuration of the main components and the physical structure of the Taguchi sensor, the first ceramic gas sensor mass produced, has remained virtually unaltered since its appearance 40 years ago. This device owns an excellent combination of the quality factors but is non-selective. The research efforts carried out to enhance the selectivity in this resistive gas sensor are briefly reviewed. A novel design, Capillary-attached Gas Sensor (CGS), is introduced, which employs the same ceramic components used for the fabrication of a classical Taguchi sensor but in altered geometries. CGS presents remarkable advantages from the view point of selectivity over the original design. While the steady state response of a CGS has the same significance as that of the Taguchi sensor, its transient response presents valuable diagnostic information. Fabrication and test of a prototype CGS is reported.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.19-19
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• 2010

We suggest CNT-based gas sensors for breath alcohol measurement. The sensors were composed of single-walled carbon nanotubes (SWNTs) thin film on glass substrate with simple process, and the SWNTs thin film as sensing layer was formed by multiple spray-coating with SWNT composites which was well-dispersed, highly controlled and differently functionalized by various binders (TEOS, MTMS, and VTMS) added in ethanol solvent. In this work, three different SWNTs thin films were made to compare their electrical response properties for alcohol vapor. From fabricated sensors, conductance responses were measured and discussed. In the result, our alcohol gas sensors showed an effective selectivity even at room temperature.

• 조명전기설비학회논문지
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• 제20권10호
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• pp.114-119
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• 2006

본 논문에서는 세 가지 종류의 가스센서를 사용하여 수소가스에 대한 정량화 및 선택도를 향상시키기 위한 연구를 수행하였다. 여러 가지 수소가스 농도에 대한 각 가스센서들의 출력을 측정하였고 높은 출력과 분해능특성을 보이는 농도범위를 분석한 결과 세 가지 종류의 센서의 사용은 10,000[ppm]까지의 광대역의 수소가스농도를 신뢰성 있게 측정할 수 있는 가능성을 보여주었다. 또한 어떠한 농도의 메탄($CH_4$) 및 일산화탄소에 대한 출력과 수소에 대한 출력을 비교한 결과 세 가지 센서의 출력을 조합하면 수소가스의 선택성을 향상시킬 수 있는 것으로 나타났다.

• 한국막학회:학술대회논문집
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• 한국막학회 2004년도 춘계 총회 및 학술발표회
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• pp.147-152
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• 2004

Gas separation membrane technology is useful for a variety of applications [1, 2]. such as hydrogen recovery from reactor purge gas, nitrogen and oxygen enrichment, water vapor removal from air, stripping of carbon dioxide from natural gas. etc. Although membrane separations are attractive because of low energy costs and simple operation, low permeabilities and/or selectivity often limit membrane applications [3, 4].(omitted)