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http://dx.doi.org/10.5369/JSST.2011.20.6.428

A Study on the Selectivity of Gas Sensors by Sensing Pattern Recognition  

Lee, Sung-Pil (Department of Electronic Engineering, Kyungnam University)
Publication Information
Journal of Sensor Science and Technology / v.20, no.6, 2011 , pp. 428-433 More about this Journal
Abstract
We report on the building of a micro sensor array based on typical semiconductor fabrication processes aimed at monitoring selectively a specific gas in ambient of other gases. Chemical sensors can be applied for an electronic nose and/or robots using this technique. Microsensor array was fabricated on the same chip using 0.6${\mu}m$ CMOS technology, and unique gas sensing patterns were obtained by principal component analysis from the array. $SnO_2$/Pt sensor for CO gas showed a high selectivity to buthane gas and humidity. $SnO_2$ sensor for hydrogen gas, however, showed a low selectivity to CO and buthane gas. We can obtain more distinguishable patterns that provide the small sensing deviation(the high seletivity) toward a given analyte in the response space than in the chemical space through the specific parameterization of raw data for chemical image formation.
Keywords
Gas Sensor; Selectivity; Pattern Recognition; CMOS; Sensor Array;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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