• Transactions on Control, Automation and Systems Engineering
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• v.3 no.1
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• pp.66-70
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• 2001

This paper describes the design of a two-axis force sensor for robots finger. In detects the x-direction force Fx and y-direction force Fy simultaneously. In order to safely grasp an unknown object using the robots fingers, they should detect the force or gripping direction and the force of gravity direction, and perform the force control using the forces detected. Therefore, the robots hand should be made by the robots finger with tow-axis force sensor that can detect the x-direction force and y-direction force si-multaneously. Thus, in this paper, the two-axis force sensor for robots finger is designed using several parallel-plate beams. The equations to calculate the strain of the beams according to the force in order to design the sensing element of the force sensor are derived and these equations are used to design the aize of two-axis force sensor sensing element. The reliability of the derive equa-tions is verified buy performing a finite element analysis of the sensing element. The strain obtained through this process is compared to that obtained through the theory analysis and a characteristics test of the fabricated sensor. It reveals that the rated strains calculated from the derive equations make a good agreement with the results from the Finite Element Method analysis and from the character-istic test.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1814-1819
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• 2005

This paper describes the development of a Stewart platform-based robot force sensor with distinctive structure of ball joints. The number of ball joints is only a half of the similar style sensors, so it is possible to reduce size and weight of the sensor. The structure of ball joint is described and discussed. Furthermore, we use strain gauges, but not liner voltage differential transformers, as sensing elements, in order to reduce size and weight of the sensor. It is also proposed that beams are replaced with pipes as sensing elements of the sensor. The ball joints and sensing elements with pipes can effectively reduce the error of the sensor. A geometric analysis model is also proposed. The external force and its moment can be measured with this model. Moreover, the performance of this sensor was tested. The test results conducted to evaluate the sensing capability of the sensor is reported and discussed.

• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.12
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• pp.2079-2084
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• 2003

In biological cell manipulation, manual thrust or penetration of an injection pipette into an embryo cell is currently performed by a skilled operator, relying on visual feedback information only. Accurately measuring cellular forces is a requirement for minimally invasive cell injections. Moreover, the cellular force sensing is essential in investigating the biophysical properties for cell injury and membrane modeling studies. This paper presents cellular force measurements for the force feedback-based biomanipulation. Cellular force measurement system using piezoelectric polymer sensor is implemented to measure the penetration force of a zebrafish egg cell. First, measurement system setup and calibration are described. Second, the force feedback-based biomanipulation is experimentally carried out. Experimental results show that it successfully supplies real-time cellular force feedback to the operator at tens of uN and thus plays a main role in improving the reliability of biological cell injection tasks.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.690-693
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• 2002

This paper is concerned on method of simultaneous force(stress) and temperature sensing with PVDF film. PVDF film has piezoelectric and pyroelectric properties. Therefore, it senses changes of stress and temperature. But it's output is affected with two properties. Using different medium in a sensing element, this problem is solved. Two structures induce different equations that its solutions are changes of stress and temperature. This method and result is applicable in skin sensor that has complexity of material and structure.

• Journal of the Korean Physical Society
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• v.73 no.9
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• pp.1399-1404
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• 2018

This study used an inductively coupled plasma (ICP) dry etching process with a metal amplitude mask to fabricate a double-side notched long-period fiber grating (DNLPFG) for loading sensing. The DNLPFG exhibited increasing resonance attenuation loss for a particular wavelength when subjected to loading. When the DNLPFG was subjected to force loading, the transmission spectra were changed, showing a with wavelength shift and resonance attenuation loss. The experimental results showed that the resonant dip of the DNLPFG increased with increasing loading. The maximum resonant dip of the $40-{\mu}m$ DNLPFG sensor was -26.522 dB under 0.049-N loading, and the largest force sensitivity was -436.664 dB/N. The results demonstrate that the proposed DNLPFG has potential for force sensing applications.

• 제어로봇시스템학회:학술대회논문집
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• 1989.10a
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• pp.606-608
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• 1989

Force/torque sensors are now providing widespread practical solutions to manufacturing problems, particularly in the area of automated assembly. The current state of the industry is discussed, including the evolution of transducer and controller design, and the trend of robot manufacturers to integrate force/torque sensors into their robot systems thereby greatly improving cycle time and simplifying the application development task for the end-user. Current and future application areas are discussed as well as the benefits of force/torque sensing.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.835-839
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• 2004

For factory automation using force/torque control, we need a networked-force management system as well as good force sensing and force generation. In this paper, we present a web-based force management system including 6-axis force/torque sensing system. Performance of the force-torque sensor is affected significantly by analog noise that is included in a sensor signal, and the noise should be reduced appropriately to obtain an adequate performance of the sensor. Moreover, the sensor itself should be convenient to install to a real application system. It should be compact in size and also easy to wire in real situation. In this viewpoint, we developed usb-based compact sensor system which is well communicated using web between two computers that exist far away. Software is programmed using LabVIEW and CCS-C. PIC microcontrollers are used for implementing a compact hardware. The proposed system is verified through experimental works.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.9
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• pp.961-964
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• 2012

This paper presents a sensing system to measure the deflection of a microcantilever in an atomic force microscope. In general, the optical lever method and interferometry are used for the sensing system; however, their size and cost leaves considerable room for improvement. Therefore, we used an optical pickup head whose operating principle is based on the astigmatism of the commercial optical disk drives. The developed sensing system was applied to a laboratory atomic force microscope, and satisfactory results were obtained.