Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications |
Kim, Deok-Ho
(Microsystem Research Center, Korea Institute of Science and Technology)
Kim, Byungkyu (Microsystem Research Center, Korea Institute of Science and Technology) Park, Jong-Oh (Microsystem Research Center, Korea Institute of Science and Technology) |
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Tele Nanorobotics using Atomic force Microscope as a Robot and Sensor
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