대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2004년도 추계학술대회
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- Pages.777-781
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- 2004
나노 가공을 위한 힘.변위 검출시스템 개발
Development of Force/Displacement Sensing System for Nanomachining
- 발행 : 2004.11.03
초록
This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations
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