Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지

Development of Force/Displacement Sensing System for Nanomachining

나노 가공을 위한 힘.변위 검출시스템 개발

  • 방진혁 (한양대학교 대학원 정밀기계공학과) ;
  • 권기환 (한양대학교 대학원 정밀기계공학과) ;
  • 박재준 (한양대학교 대학원 정밀기계공학과) ;
  • 조남규 (한양대학교 기계정보경영공학부)
  • Published : 2004.11.03
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Abstract

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

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