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http://dx.doi.org/10.3795/KSME-B.2012.36.9.961

Sensing System for Measuring Deflection of Microcantilever  

Kim, Hyun-Chul (SP Semiconductor)
Lee, Sang-Heon (Dept. of Mechanical Design Engineering, Andong Nat'l Univ.)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.36, no.9, 2012 , pp. 961-964 More about this Journal
Abstract
This paper presents a sensing system to measure the deflection of a microcantilever in an atomic force microscope. In general, the optical lever method and interferometry are used for the sensing system; however, their size and cost leaves considerable room for improvement. Therefore, we used an optical pickup head whose operating principle is based on the astigmatism of the commercial optical disk drives. The developed sensing system was applied to a laboratory atomic force microscope, and satisfactory results were obtained.
Keywords
Microcantilever; Atomic Force Microscopy; Astigmatism;
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