Journal of the Korean Physical Society

Korean Physical Society (한국물리학회)
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Double-Side Notched Long-Period Fiber Gratings fabricated by Using an Inductively Coupled Plasma for Force Sensing

  • Fang, Yu-Lin (Department of Mechanical Engineering, National Kaohsiung University of Science and Technology) ;
  • Huang, Tzu-Hsuan (Department of Mechanical Engineering, National Kaohsiung University of Science and Technology) ;
  • Chiang, Chia-Chin (Department of Mechanical Engineering, National Kaohsiung University of Science and Technology) ;
  • Wu, Chao-Wei (Department of Aeronautical and Mechanical Engineering, Republic of China Air Force Academy)
  • Received : 2018.02.27
  • Accepted : 2018.07.06
  • Published : 2018.11.15
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Abstract

This study used an inductively coupled plasma (ICP) dry etching process with a metal amplitude mask to fabricate a double-side notched long-period fiber grating (DNLPFG) for loading sensing. The DNLPFG exhibited increasing resonance attenuation loss for a particular wavelength when subjected to loading. When the DNLPFG was subjected to force loading, the transmission spectra were changed, showing a with wavelength shift and resonance attenuation loss. The experimental results showed that the resonant dip of the DNLPFG increased with increasing loading. The maximum resonant dip of the $40-{\mu}m$ DNLPFG sensor was -26.522 dB under 0.049-N loading, and the largest force sensitivity was -436.664 dB/N. The results demonstrate that the proposed DNLPFG has potential for force sensing applications.

Keywords

Acknowledgement

Supported by : Ministry of Science and Technology, Taiwan

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