• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• 한국공작기계학회논문집
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• 제18권2호
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• pp.137-143
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• 2009

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consists of a extend actuator that provides displacement of tool guide and two clamping actuators which provide the holding force. In order to avoid the PZT fracture, design of pre-load housing was conducted by flexure hinge structure, because PZT actuator has low tensile and shear. To design the pre-load housing and optimize the clamping mechanism, the static and dynamic analysis were conducted by finite element method. From these results, a prototype of the inchworm motor was fabricated and dynamic characteristic with respect to the various frequency was tested. The maximum velocity of the inchworm motor was $41.1{\mu}m/s$ at 16Hz.

• 한국공작기계학회논문집
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• 제18권2호
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 하계학술대회 논문집 B
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• pp.1054-1056
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• 1993

The displacement amplifying units(DAUs) of the flexure hinge mechanism are used to amplify the displacements from the Piezo actuators using the principle of a lever. We fabricate for two step DAUs with the SUS304(stainless steel) and experiment them. The fabricated four DAUs have all the hinges aligned to a straight line, and differ in the first step ideal gain($4{\times}10,\;6{\times}10,\;8{\times}10,\;10{\times}10$). We measure the input and the output displacements to get the real amplifying gain. The resonant frequencies of these DAUs are also measured. The experimental results are compared with those of the theoretical formula and with those of the numerical analyses.

• 한국정밀공학회지
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• 제21권3호
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• 한국정밀공학회지
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• 제21권3호
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• pp.147-154
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• 2004

This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

• 한국구조물진단유지관리공학회 논문집
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• 제16권5호
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• pp.88-97
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• 2012

본 연구에서는 비내진 교각의 내진성능과 휨-전단 거동을 파악하고자 형상비 4.5인 정사각형의 중실 및 중공단면 철근콘크리트 교각실험체를 제작하여 일정한 축력하에서 변위비 등급을 증가시켜 가면서 횡하중을 가력하는 실험을 수행하였다. 본 연구는 철근콘크리트 교각의 한정연성 내진설계를 위한 실험적 기초자료의 제공과 함께 성능단계별 교각성능 및 손상평가를 위한 정량적 수치와 경향을 제공하기 위한 것이며, 파괴거동, 극한변위, 극한드리프트비율, 변위연성도, 응답수정계수, 등가점성감쇠비, 잔류변형지수, 유효강성, 철근 변형률 등의 주요 내진성능 인자들에 대한 분석결과와 비선형 해석 결과를 나타내었다.

• Structural Engineering and Mechanics
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• 제73권5호
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• pp.529-542
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• 2020

As limited well-documented experimental data are available for assessing the attributes of different deformation components of flanged walls, few appropriate models have been established for predicting the inelastic responses of flanged walls, especially those of asymmetrical flanged walls. This study presents the experimental results for three large-scale T-shaped reinforced concrete walls and examines the variations in the flexural, shear, and sliding components of deformation with the total deformation over the entire loading process. Based on the observed deformation behavior, a simple model based on moment-curvature analysis is established to estimate flexural deformations, in which the changes in plastic hinge length are considered and the deformations due to strain penetration are modeled individually. Based on the similar gross shapes of the curvature and shear strain distributions over the wall height, a proportional relationship is established between shear displacement and flexural rotation. By integrating the deformations due to flexure, shear, and strain penetration, a new load-deformation analytical model is proposed for flexure-dominant flanged walls. The proposed model provides engineers with a simple, accurate modeling tool appropriate for routine design work that can be applied to flexural walls with arbitrary sections and is capable of determining displacements at any position over the wall height. By further simplifying the analytical model, a simple procedure for estimating the ultimate displacement capacity of flanged walls is proposed, which will be valuable for performance-based seismic designs and seismic capacity evaluations.

• 한국정밀공학회지
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• 제21권12호
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.