Development of High Precision Actuator for Micro Press System by Inchworm Motor
![]() |
Choi, Jong-Pil
(강원대학교 기계메카트로닉스공학과 대학원)
Nam, Kwang-Sun (강원대학교 기계메카트로닉스공학과 대학원) Lee, Hye-Jin (한국생산기술연구원 디지털 성형공정팀) Lee, Nak-Gue (한국생산기술연구원 디지털 성형공정팀) Kim, Byeong-Hee (강원대학교 기계메카트로닉스공학부) |
1 | Liu, Y. T., Fung, R. F.. and Huang, T. K., 2004, "Dynamic Responses of a Precision Positioning Table Impacted by a Soft-mounted Piezoelectric Actuator," Precision Engineering, Vol. 28, pp. 252-260. DOI ScienceOn |
2 | Park, J., Keller, S., Carman, G. P., and Hahn, H. T., 2001, "Development of a Compact Displacement Accumulation Actuator Device for both Large Force and Large Displacement," Sensors and Actuators, A 90, pp. 191-202. |
3 | Cady, W. G., 1964, Piezoelectricity, McGraw-Hill, New York |
4 | Adriaens, H. J. M. T. A., Koning, W. L., and Banning, R., 2000, "Modeling Piezoelectric Actuators," IEEE/ASME Transactions on Mechatronics, Vol. 5, pp. 331-341. DOI ScienceOn |
5 | Vorndran, S., 2001, MicroPosioning Nanopositioning NanoAutomation, Physik Instrumente (PI) GmbH, Germany. |
6 | Haertling, G., 1999, "Ferroelectric ceramics: History and technology," Journal of the American Ceramic Society, Vol. 82, pp. 797-818. DOI ScienceOn |
7 | Kussul, E., Baidyk, T., Ruiz-Huerta, L., Caballero-Ruiz, A., Velasco1, G., and Kasatkina, L., 2002, "Development of Micromachine Tool Prototypes for Microfactories," Journal of Micromechnics and Microengineering, Vol. 12, pp. 795-812. DOI ScienceOn |
8 | Jeong, S. J., Kim, G. H., Cha, K. R., Lee, K. H., and Song, S., 2006, "A Study on the Motion Mechanism of Multi-Axis Ultra Precision Stage for Optical Element Alignment," Transactions of KSMTE, Vol. 15, pp. 8-16. 과학기술학회마을 ScienceOn |
9 | Lim, J. H., Shon, J. H., Kim, J. J., Park, B. O.. and Cho, S. H., 1995, "Variations of Piezoelectric Properties and Compressive Strength of PZT Ceramics with Poling Directions," Journal of the Korean Ceramic Society, Vol. 32, pp. 1131-1138. |
![]() |