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Fuzzy Controller Design for a Nano Precision Stage Driven by a PZT  

Ha, Ho-Jin (LG전자 RMC사업부 생산기술그룹)
Jeong, Kyu-Won (충북대학교 기계공학부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.18, no.2, 2009 , pp. 228-233 More about this Journal
Abstract
An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.
Keywords
Ultra-precision stage; Flexure hinge; Piezoelectric actuator; Fuzzy rule; PID controller;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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