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A Study on Design and Manufacture of an Inchworm Linear Motor System  

Ye Sang Don (동의대학교 기계공학과 대학원)
Jeong Jae Hoon (동의대학교 기계공학과 대학원)
Min Byeong Hyeon (동의대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.12, 2004 , pp. 174-181 More about this Journal
Abstract
Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.
Keywords
Inchworm Linear Motor; Ultra Precision Position Apparatus; PZT Actuator; Taguchi Method; Finite Element Method; Pulse Generator;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
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