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Development of 3-axis Fine Positioning Stage: Part 1. Analysis and Design  

강중옥 (금오공과대학교 대학원 기전공학과)
서문훈 (금오공과대학교 대학원 기전공학과)
한창수 (한국기계연구원)
홍성욱 (금오공대 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.3, 2004 , pp. 147-154 More about this Journal
Abstract
This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.
Keywords
Fine positioning stage; Flexure hinge; Experiment design; Finite element method; Natural frequency; Frequency response; Piezoelectric actuator; Orthogonal array; Notch; Stiffness coefficient;
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Times Cited By KSCI : 5  (Citation Analysis)
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