• Tribology and Lubricants
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• 제27권1호
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• pp.7-12
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• 2011

Interest in advanced machining process such as AJM(abrasive jet machining) and CMP(chemical-mechanical polishing) using micro/nano-sized abrasives has been on the increasing demand due to wide use of super alloys, composites, semiconductor and ceramics, which are difficult to or cannot be processed by traditional machining methods. In this paper, the effects of pressure, wafer moving velocity and fluid viscosity were investigated by 2-dimensional finite element analysis method considering slurry fluid flow. From the investigation, it could be found that the simulation results quite corresponded well to the Preston's equation that describes pressure/velocity dependency on material removal. The result also revealed that the stress and corresponding material removal induced by the collision of particle may decrease under relatively high wafer moving speed due to the slurry flow resistance. In addition, the increase in slurry fluid viscosity causes the reduction of material removal rate. It should be noted that the viscosity effect can vary with the shape of abrasive particle.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2007년도 정기 학술대회 논문집
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• pp.375-380
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• 2007

The goal of this paper is to develop a rational static method which consider efficiently the dynamic effect of the gravity load following sudden removal of element. For this goal this paper introduce the equivalent load for element stiffness which is a preceding research result and will develop equivalent static analysis which will be able to predict the maximum behavior considering dynamic effect. Some examples are provided to verify it. Equivalent static analysis is compared with the analysis method which is recommended by the GSA2003 guidelines and the time-history analysis which is the most accurate for dynamic behavior.

• 한국정밀공학회지
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• 제31권12호
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• pp.1107-1113
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• 2014

In this article, the megasonic cleaning system for cleaning micro/nano particles from flat panel display (FPD) surfaces was developed. A piezoelectric actuator and a waveguide were designed by finite element method (FEM) analysis. The calculated peak frequency value of the quartz waveguide was 1002 kHz, which agreed well with the measured value of 1003 kHz. The average acoustic pressure of the megasonic cleaning system was 43.1 kPa, which is three times greater than that of the conventional type of 13.9 kPa. Particle removal efficiency (PRE) tests were performed, and the cleaning efficiency of the developed system was proven to be 99%. The power consumption of the developed system was 64% lower than that of the commercial system. These results show that the developed megasonic cleaning system can be an effective solution in particle removing from FPD substrate with higher energy efficiency and lower chemical and ultra pure water (UPW) consumption.

• 한국초전도ㆍ저온공학회논문지
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• 제21권2호
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• pp.26-30
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• 2019

Coal is the most abundant fossil fuel on Earth and is used in a wide range of applications. The direct combustion of high-sulfur coal produces a large amount of sulfur dioxide, which is a toxic and corrosive gas. A new superconducting high gradient magnetic separation (HGMS) technology was studied to remove sulfur from high sulfur coal. The magnetic separation concentrate was obtained under the optimum parameters, such as a particle size of -200 mesh, a magnetic field strength of 2.0 T, a slurry concentration of 15 g/L, and a slurry flow rate of 600 ml/min. The removal rate of sulfur is up to 59.9%. The method uses a magnetic field to remove sulfur-containing magnetic material from a pulverized coal solution. It is simple process with, high efficiency, and is a new way.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집A
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• pp.432-437
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• 2000

The purpose of this paper is to determine a two dimensional axisymmetric model through a comparative study between a three dimensional and an axisymmetric finite element analysis of the reactor coolant piping nozzle subject to internal pressure. The finite element analysis results show that the stress adopting the axisymmetric model with the radius of equivalent spherical vessel are well agree with that adopting the three dimensional model. The the radii of equivalent spherical vessel are 3.5 times and 7.3 times of the radius of the reactor coolant piping for the safety injection nozzle and for the residual heat removal nozzle, respectively.

• Korean Journal of Mathematics
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• 제18권4호
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• pp.425-440
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• 2010

Using Green's theorem, elliptic boundary value problems can be converted to boundary integral equations. A numerical methods for boundary integral equations are boundary elementary method(BEM). BEM has advantages over finite element method(FEM) whenever the fundamental solutions are known. Helmholtz type equations arise naturally in many physical applications. In a boundary integral formulation for the exterior Neumann there occurs a hypersingular operator which exhibits a strong singularity like $\frac{1}{|x-y|^3}$ and hence is not an integrable function. In this paper we are going to remove this hypersingularity by reducing the regularity of test functions.

• Steel and Composite Structures
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• 제39권1호
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• pp.109-123
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• 2021

This research endeavor intends to use the implicit finite element method to investigate the structural response of steel shear walls with partial plate-column connection. To this end, comprehensive verification studies are initially performed by comparing the numerical predictions with several reported experimental results in order to demonstrate the reliability and accuracy of the implicit analysis method. Comparison is made between the hysteresis curves, failure modes, and base shear capacities predicted numerically using ABAQUS software and obtained/observed experimentally. Following the validation of the finite element analysis approach, the effects of partial plate-column connection on the strength and stiffness performances of steel shear wall systems with different web-plate slenderness and aspect ratios under monotonic loading are investigated through a parametric study. While removal of the connection between the web-plate and columns can be beneficial by decreasing the overall system demand on the vertical boundary members, based on the results and findings of this study such detachment can lower the stiffness and strength capacities of steel shear walls by about 25%, on average.

• 한국환경과학회지
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• 제7권6호
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• pp.773-782
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• 1998

The adsorption experiment of phenol(Ph) from aqueous solution on granular activated carbon was studied in order to design the fixed-bed adsorption column. The experimental data were analyzed by unsteady-state, one-dimensional heterogeneous model. Finite element method(FEM) was applied to analyze the sensitivity of parameter and to predict the fixed-bed adsorption column performance on operation variable changes. The prediction model showed similar effect to mass transfer and intraparticle diffusion coefficient changes suggesting that both parameter present mass transfer rate limits for GAC-phenol system. The Freundlich constants had a greater effect than kinetic parameters for the performance of fixed-bed adsorption column. FEM solution facilitated prediction of concentration history in solution and within adsorbent particle.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1810-1814
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• 2008

A small L-type megasonic module for nano-pattern cleaning was designed and manufactured. The impedance graph of the quartz waveguide with a piezoelectric actuator was predicted using finite element method (FEM). The peak value of the piezoelectric actuator alone was 3.373 MHz, which was the same as the experimentally measured value of 3.373 MHz (0.0% error). In addition, the maximum impedance value of the quartz waveguide with the actuator was 3.373 MHz, which agreed well with the measured value of 3.362 MHz (0.3% error). The acoustic pressures of a conventional megasonic system (3 MHz) and the developed system under similar conditions were measured and compared. The results showed that the maximum values and standard deviations of the developed system decreased by 29% and 18%, respectively, compared with the conventional type. This suggests that the small L-type would have higher particle removal efficiency with lower possibilities of pattern damages.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.709-712
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• 2002

For the electro-discharge machining of an electro-conductive anisotropic composite, an unsteady state formulation was established and solved by Galerkin's finite element method. The distribution of temperature on work piece, the shape of the crater and the material removal rate were obtained in terms of the process parameters. As the spark was initiated the workpiece immediately started to melt and the heat affected zone was formed. The moving boundary of the crater was also identified with time. When the radial and axial conductivities were increased separately the temperature distribution and the shape of the crater were shifted in the same direction respectively and the material removal rate was found to be higher in the case of increasing radial conductivity rather than the axial conductivity.