1 |
Sung, I.-H., "On the Relationship between Material Removal and Interfacial Properties at Particulate Abrasive Machining Process," Journal of the KSTLE, Vol. 25, No. 6, pp. 404-408, 2009.
|
2 |
Oliver, M. R., "Chemical Mechanical Polishing," Semiconductor International, Vol. 26, No. 6, p. 130, 2003.
|
3 |
Bathe, K., Zhang, H., and Ji, S., "Finite Element Analysis of Fluid Flows Fully Coupled with Structural Interactions," Computers and Structures, Vol. 72, No. 1, pp. 1-16, 1999.
DOI
|
4 |
De, S., Hong, J., and Bathe, K., "On the Method of Finite Spheres in Applications: Towards the Use with Adina and in a Surgical Simulator," Computational Mechanics, Vol. 31, No. 1, pp. 27-37, 2003.
DOI
|
5 |
Bielawski, M. and Beres, W., "Fe Modelling of Surface Stresses in Erosion-Resistant Coatings under Single Particle Impact," Wear, Vol. 262, No. 1-2, pp. 167-175, 2007.
DOI
|
6 |
Wensink, H. and Elwenspoek, M. C., "A Closer Look at the Ductile-Brittle Transition in Solid Particle Erosion," Wear, Vol. 253, No. 9-10, pp. 1035-1043, 2002.
DOI
ScienceOn
|
7 |
Sheldon, G. and Finnie, I., "On the Ductile Behavior of Nominally Brittle Materials During Erosive Cutting," J. Eng. Ind., Vol. 88, No. 4, pp. 387-392, 1966.
DOI
|
8 |
Sheldon, G. and Finnie, I., "The Mechanism of Material Removal in the Erosive Cutting of Brittle Materials," J. Eng. Ind., Vol. 88, No. 4, pp. 393-400, 1966.
DOI
|
9 |
Junkar, M., Jurisevic, B., and Fajdiga, M. et al., "Finite Element Analysis of Single-Particle Impact in Abrasive Water Jet Machining," International Journal of Impact Engineering, Vol. 32, No. 7, pp. 1095-1112, 2006.
DOI
ScienceOn
|
10 |
Ahmadi-Brooghani, S., Hassanzadeh, H., and Kahhal, P., "Modeling of Single-Particle Impact in Abrasive Water Jet Machining," International Journal of Mechanical Systems Science and Engineering, Vol. 1, No. 4, pp. 231-236, 2008.
|
11 |
김동균, 성인하, "입자연마가공에서의 입자 형상의 영향에 대한 고찰," 한국윤활학회지, 제26권, 제4호, pp. 219-223, 2010.
|
12 |
Lin, Y.-Y., Chen, D.-Y., and Ma, C., "Simulations of a Stress and Contact Model in a Chemical Mechanical Polishing Process," Thin Solid Films, Vol. 517, No. 21, pp. 6027-6033, 2009.
DOI
ScienceOn
|
13 |
Saka, N., Eusner, T., and Chun, J. H., "Nano-Scale Scratching in Chemical-Mechanical Polishing," CIRP Annals - Manufacturing Technology, Vol. 57, No. 1, pp. 341-344, 2008.
DOI
ScienceOn
|
14 |
Li, Y., Microelectronic Applications of Chemical Mechanical Planarization, Wiley-Interscience, 2007.
|
15 |
Feng, J., Wang, D., and Liu, H. et al., "Finite Element Simulation of Thermal Stress During Diffusion Bonding of Ceramic to Aluminium," Science and Technology of Welding and Joining, Vol. 8, No. 2, pp. 138-142, 2003.
DOI
ScienceOn
|