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http://dx.doi.org/10.7736/KSPE.2014.31.12.1107

Quartz Megasonic System for Cleaning Flat Panel Display  

Kim, Hyunse (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials)
Lee, Yanglae (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials)
Lim, Euisu (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.12, 2014 , pp. 1107-1113 More about this Journal
Abstract
In this article, the megasonic cleaning system for cleaning micro/nano particles from flat panel display (FPD) surfaces was developed. A piezoelectric actuator and a waveguide were designed by finite element method (FEM) analysis. The calculated peak frequency value of the quartz waveguide was 1002 kHz, which agreed well with the measured value of 1003 kHz. The average acoustic pressure of the megasonic cleaning system was 43.1 kPa, which is three times greater than that of the conventional type of 13.9 kPa. Particle removal efficiency (PRE) tests were performed, and the cleaning efficiency of the developed system was proven to be 99%. The power consumption of the developed system was 64% lower than that of the commercial system. These results show that the developed megasonic cleaning system can be an effective solution in particle removing from FPD substrate with higher energy efficiency and lower chemical and ultra pure water (UPW) consumption.
Keywords
Megasonic; Finite Element Method (FEM); Flat Panel Display (FPD); Cleaning; Particle Removal Efficiency (PRE);
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Times Cited By KSCI : 2  (Citation Analysis)
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