References
- Lin, Y.-Y., Chen, D.-Y., and Ma, C., "Simulations of a Stress and Contact Model in a Chemical Mechanical Polishing Process," Thin Solid Films, Vol. 517, No. 21, pp. 6027-6033, 2009. https://doi.org/10.1016/j.tsf.2009.05.021
- Saka, N., Eusner, T., and Chun, J. H., "Nano-Scale Scratching in Chemical-Mechanical Polishing," CIRP Annals - Manufacturing Technology, Vol. 57, No. 1, pp. 341-344, 2008. https://doi.org/10.1016/j.cirp.2008.03.098
- Bielawski, M. and Beres, W., "Fe Modelling of Surface Stresses in Erosion-Resistant Coatings under Single Particle Impact," Wear, Vol. 262, No. 1-2, pp. 167-175, 2007. https://doi.org/10.1016/j.wear.2006.04.009
- Wensink, H. and Elwenspoek, M. C., "A Closer Look at the Ductile-Brittle Transition in Solid Particle Erosion," Wear, Vol. 253, No. 9-10, pp. 1035-1043, 2002. https://doi.org/10.1016/S0043-1648(02)00223-5
- Sheldon, G. and Finnie, I., "On the Ductile Behavior of Nominally Brittle Materials During Erosive Cutting," J. Eng. Ind., Vol. 88, No. 4, pp. 387-392, 1966. https://doi.org/10.1115/1.3672666
- Sheldon, G. and Finnie, I., "The Mechanism of Material Removal in the Erosive Cutting of Brittle Materials," J. Eng. Ind., Vol. 88, No. 4, pp. 393-400, 1966. https://doi.org/10.1115/1.3672667
- Junkar, M., Jurisevic, B., and Fajdiga, M. et al., "Finite Element Analysis of Single-Particle Impact in Abrasive Water Jet Machining," International Journal of Impact Engineering, Vol. 32, No. 7, pp. 1095-1112, 2006. https://doi.org/10.1016/j.ijimpeng.2004.09.006
- Ahmadi-Brooghani, S., Hassanzadeh, H., and Kahhal, P., "Modeling of Single-Particle Impact in Abrasive Water Jet Machining," International Journal of Mechanical Systems Science and Engineering, Vol. 1, No. 4, pp. 231-236, 2008.
- 김동균, 성인하, "입자연마가공에서의 입자 형상의 영향에 대한 고찰," 한국윤활학회지, 제26권, 제4호, pp. 219-223, 2010.
- Sung, I.-H., "On the Relationship between Material Removal and Interfacial Properties at Particulate Abrasive Machining Process," Journal of the KSTLE, Vol. 25, No. 6, pp. 404-408, 2009.
- Oliver, M. R., "Chemical Mechanical Polishing," Semiconductor International, Vol. 26, No. 6, p. 130, 2003.
- Bathe, K., Zhang, H., and Ji, S., "Finite Element Analysis of Fluid Flows Fully Coupled with Structural Interactions," Computers and Structures, Vol. 72, No. 1, pp. 1-16, 1999. https://doi.org/10.1016/S0045-7949(99)00042-5
- De, S., Hong, J., and Bathe, K., "On the Method of Finite Spheres in Applications: Towards the Use with Adina and in a Surgical Simulator," Computational Mechanics, Vol. 31, No. 1, pp. 27-37, 2003. https://doi.org/10.1007/s00466-002-0390-3
- Li, Y., Microelectronic Applications of Chemical Mechanical Planarization, Wiley-Interscience, 2007.
-
Feng, J., Wang, D., and Liu, H. et al., "Finite Element Simulation of Thermal Stress During Diffusion Bonding of
$Al_2O_3$ Ceramic to Aluminium," Science and Technology of Welding and Joining, Vol. 8, No. 2, pp. 138-142, 2003. https://doi.org/10.1179/136217103225008838
Cited by
- A Study on the Polishing Characteristics Using Floating Nozzle in Linear Roll CMP vol.32, pp.7, 2015, https://doi.org/10.7736/KSPE.2015.32.7.627
- Statistical Analysis on Process Variables in Linear Roll-CMP vol.30, pp.3, 2014, https://doi.org/10.9725/kstle.2014.30.3.139
- 기계화학적 연마공정중 패드내 미세공극에서의 연마입자의 거동 vol.28, pp.1, 2011, https://doi.org/10.9725/kstle.2012.28.1.007