Development of a Small-type Megasonic Module for Nano-scale Pattern Cleaning

나노패턴 세정을 위한 소형 메가소닉 모듈 개발

A small L-type megasonic module for nano-pattern cleaning was designed and manufactured. The impedance graph of the quartz waveguide with a piezoelectric actuator was predicted using finite element method (FEM). The peak value of the piezoelectric actuator alone was 3.373 MHz, which was the same as the experimentally measured value of 3.373 MHz (0.0% error). In addition, the maximum impedance value of the quartz waveguide with the actuator was 3.373 MHz, which agreed well with the measured value of 3.362 MHz (0.3% error). The acoustic pressures of a conventional megasonic system (3 MHz) and the developed system under similar conditions were measured and compared. The results showed that the maximum values and standard deviations of the developed system decreased by 29% and 18%, respectively, compared with the conventional type. This suggests that the small L-type would have higher particle removal efficiency with lower possibilities of pattern damages.