• 한국안전학회지
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• 제17권4호
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• pp.94-100
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• 2002

As the use of automatic handling equipment for sensitive semiconductor devices is rapidly increased, manufacturers of electronic components and equipments need to be more alert to the problem of electrostatic discharges(ESD). In order to analyze damage characteristics of semiconductor device damaged by ESD, this study adopts a new charged-device model(CDM), field-induced charged model(FCDM) simulator that is suitable for rapid, routine testing of semiconductor devices and provides a fast and inexpensive test that faithfully represents ESD hazards in plants. High voltage applied to the device under test is raised by the field of non-contacting electrodes in the FCDM simulator, which avoids premature device stressing and permits a faster test cycle. Discharge current and time are measured and calculated. The characteristics of electrostatic attenuation of domestic semiconductor devices are investigated to evaluate the ESD phenomena in the semiconductors. Also, the field charging mechanism, the device thresholds and failure modes are investigated and analyzed. The damaged devices obtained in the simulator are analyzed and evaluated by SEM. The results obtained in this paper can be used to prevent semiconductor devices form ESD hazards and be a foundation of research area and industry relevant to ESD phenomena.

• Journal of Electrical Engineering and Technology
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• 제9권1호
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• pp.239-246
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• 2014

Incineration is conceptually sound as a waste treatment technology. There is, however, concern over its emissions when it is improperly designed and operated. An electrostatic precipitator is one of the most commonly used devices to control particulate emissions from boilers, incinerators and some other industrial processes. In this work, a modular electrostatic precipitator with sizing of $1m{\times}1m{\times}1m$ was developed for removal of particulate matter from the exhaust gases of a small waste incinerator. Its design was based on a simple wire-and-plate concept. The corona discharge wires were connected to a positive high-voltage pulse generator, while the collection plates were grounded. The high-voltage pulse generator was used to produce the corona discharge field between the individual discharge wire and the collection plate. The particulate-laden exhaust gas flow was directed across the corona discharge field. The charged particles were deflected outward and collected on the plate. The collection efficiency was evaluated as a mass loading ratio between the difference at the inlet and the outlet to the particulate loading at the inlet of the precipitator. The collection efficiency of this modular electrostatic precipitator design was approximately 80 %.

• 대한기계학회논문집B
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• 제21권10호
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• pp.1284-1293
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• 1997

The electrostatic effect on particle deposition onto a heated, Horizontal free-standing wafer surface was investigated numerically. The deposition mechanisms considered were convection, Brownian and turbulent diffusion, sedimentation, thermophoresis and electrostatic force. The electric charge on particle needed to calculate the electrostatic migration velocity induced by the local electric field was assumed to be the Boltzmann equilibrium charge. The electrostatic forces acted upon the particle included the Coulombic, image, dielectrophoretic and dipole-dipole forces based on the assumption that the particle and wafer surface are conducting. The electric potential distribution needed to calculate the local electric field around the wafer was calculated from the Laplace equation. The averaged and local deposition velocities were obtained for a temperature difference of 0-10 K and an applied voltage of 0-1000 v.The numerical results were then compared with those of the present suggested approximate model and the available experimental data. The comparison showed relatively good agreement between them.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.618-623
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• 2001

The transport of charged particles in electrostatic precipitator is investigated by Eulerian numerical analysis. Collection efficiencies are calculated using various combinations of the assumptions about flow field, turbulent diffusivity and boundary condition at collecting electrode. The characteristics of calculated collection efficiencies are compared with the trends of published experimental results. It is found that the collection efficiency for the case using nonuniform turbulent flow field, nonuniform turbulent diffusivity and zero concentration boundary condition at collecting electrode is the most suitable for the prediction of collection efficiency of electrostatic precipitator.

• 한국시뮬레이션학회논문지
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• 제11권3호
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• pp.13-22
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• 2002

This paper describes an automated evaluation of electrostatic field for micro motors whose sizes range 10 to 103um. Electric field modeling in micro motors has been generally restricted to in-plane two-dimensional finite element analysis (FEA). In this paper, the actual three-dimensional geometry of the micro motor is considered. An automatic FE mesh generation technique, which is based on the fuzzy knowledge processing and computational geometry techniques, is incorporated in the system, together with one of commercial FE analysis codes and one of commercial solid modelers. The system allows a geometry model of concern to be automatically converted to different FE models, depending on physical phenomena to be analyzed, electrostatic analysis and stress analysis and so on. The FE models are then exported to the FE analysis code, and then analyses are peformed. Then, analytical analysis and FE analysis about the torque generated by electrostatic micro motor are performed. The starting torque is proportional to $V^2$, the calculated starting torque from the two-dimensional analytical solutions are three times larger than those from the three-dimensional FE solutions.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.52-61
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• 2023

We designed a novel ultra-miniaturized microcolumn structure having an stigmator to significantly improve throughput per unit time, which is the biggest disadvantage of microcolumns. We adopted the structure of the stigmator in the form of an electrostatic octupole electrode, and used an electrostatic quadrupole deflector with a relatively simple structure considering the increase in wiring due to the introduction of the stigmator. We have dramatically reduced the effect of astigmatism that occurs when the electron beam probe is scanned to the periphery of the target by introducing the stigmator between the control electrode and the deflector. As our numerical analysis simulation results, the field of view obtained as a result of this study is about 46.3% improved compared to our previous study, and the electron beam probe size of less than 10 nm was achieved in the entire field of view.

• Korea-Australia Rheology Journal
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• 제15권2호
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• pp.83-90
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• 2003

In cases of the microfluidic channel, the electrokinetic influence on the transport behavior can be found. The externally applied body force originated from the electrostatic interaction between the nonlinear Poisson-Boltzmann field and the flow-induced electrical field is applied in the equation of motion. The electrostatic potential profile is computed a priori by applying the finite difference scheme, and an analytical solution to the Navier-Stokes equation of motion for slit-like microchannel is obtained via the Green's function. An explicit analytical expression for the induced electrokinetic potential is derived as functions of relevant physicochemical parameters. The effects of the electric double layer, the zeta potential of the solid surface, and the charge condition of the channel wall on the velocity profile as well as the electroviscous behavior are examined. With increases in either electric double layer or zeta potential, the average fluid velocity in the channel of same charge is entirely reduced, whereas the electroviscous effect becomes stronger. We observed an opposite behavior in the channel of opposite charge, where the attractive electrostatic interactions are presented.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1990년도 추계학술대회 논문집 학회본부
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• pp.129-131
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• 1990

When insulating oil is flowed through a pipe, the electrostatic charge in the oil will be increased. Using inflammability oil, an electrostatic phenomena which may cause significantly problems as explosion must be circumvented by some methods. In this paper we made a new electrode which was applied AC field to the flowing oil for reducing electrostatic charge. Before we developed the new method of an electrostatic elimination, the electrification experiment was performed by using the same electrode which was supplied DC voltage to realize electrified conditions. As a result of this study, the effect of the electrostatic elimination could be observed.

• Agricultural and Biosystems Engineering
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• 제3권1호
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• pp.29-34
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• 2002

Two charging methods of electrostatic nozzle, i.e. induction and ionized field corona charging, were designed and evaluated for orchard sprayer application. An artificial (metallic) target was constructed and used in this experiment. The charge-to-mass ratio for the induction electrode was measured by using the Faraday cage. Two conventional pressure-swirl nozzles have been employed with different orifice diameters under the same experimental operating conditions. A commercial pressure-swirl nozzle with orifice diameter of 1.0 was used for the conventional spray. The diameter of the electrostatic was 0.59 mm. The experiment was carried out for individual nozzle sprays at $0^{\circ}$, $20^{\circ}$ and $50^{\circ}$ oriented angles and three nozzles, sprayed simultaneously at a distance of 1.0 and 2.0 m from the nozzle tip to the target. The nozzles were mounted on a carriage with constant speed of 1.26 km/h with a blower attached. The weighing method was employed to evaluate for the spray deposition, ground loss and estimated drift. The results show more promising for the induction charging method, especially at $20^{\circ}$oriented angle at a distance of 1.0 m from the target for a single nozzle and when all three nozzles were operated simultaneously for spray deposition. The results of the induction charging method show promising with the developed electrostatic technique.

• 대한기계학회논문집B
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• 제23권3호
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• pp.299-310
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• 1999

Effect of electrostatic and inertial forces on the pre-charged particle deposition was theoretically and experimentally studied by introducing the inertia impactor subjected to an electric field. To derive the analytic solution, we assumed that a flow was an ideal stagnation flow, a particle had saturation charges, and the electric field within the test section was uniform. On the other hand, $Al_2O_3$ particle groups were used as the test particles, which mean sizes were $1{\mu}m$, $3{\mu}m$, and $5{\mu}m$. To measure the deposition efficiency, the light scattering method was used. The results showed that the deposition efficiency was minimized at a certain nozzle velocity as increasing the nozzle velocity, only if the electric force was applied. As the electric field strength increased, $Stk_{50}{^{1/2}}$ was decreased, and its decreasing rate was reduced with increasing the flow velocity. Moreover the existence of electric field was against the cut-off performance of the inertia impactor.