Abstract
This paper describes an automated evaluation of electrostatic field for micro motors whose sizes range 10 to 103um. Electric field modeling in micro motors has been generally restricted to in-plane two-dimensional finite element analysis (FEA). In this paper, the actual three-dimensional geometry of the micro motor is considered. An automatic FE mesh generation technique, which is based on the fuzzy knowledge processing and computational geometry techniques, is incorporated in the system, together with one of commercial FE analysis codes and one of commercial solid modelers. The system allows a geometry model of concern to be automatically converted to different FE models, depending on physical phenomena to be analyzed, electrostatic analysis and stress analysis and so on. The FE models are then exported to the FE analysis code, and then analyses are peformed. Then, analytical analysis and FE analysis about the torque generated by electrostatic micro motor are performed. The starting torque is proportional to $V^2$, the calculated starting torque from the two-dimensional analytical solutions are three times larger than those from the three-dimensional FE solutions.