• 한국광학회지
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• 제19권5호
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• pp.365-369
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• 2008

정전기장 편향기를 사용하는 저전압 초소형 전자칼럼에서 전자빔 집속 적정조건에 대해 조사하였다. 일정한 전자 방출 팁 전압조건에서 소스렌즈를 이용하여 전자빔을 집속할 경우 아인젤 렌즈를 이용할 경우보다 주사면적은 컸으나 전류영상의 선명도는 낮게 측정되었다. 3차원 전산시늉 결과 소스렌즈를 사용하여 전자빔을 집속할 경우 전자빔의 초점크기와 편향이 아인젤 렌즈를 이용하여 집속할 경우보다 큰 것으로 조사되었다.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제51권10호
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• pp.545-553
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• 2002

This paper is about the analysis of 3-dimensional magnetic field distribution in CPM(Convergence Purity Magnet) considering magnetization vector and the optimum design of CPM. The magnetization vector of CPM is obtained using 2-dimensional magnetization FEA(Finite Element Analysis) coupled with Priesach model. Using this magnetization vector of CPM, we analysed the 2-dimensional and 3-dimensional magnetostatic field of CPM and know that these analysis results are not equal. From experimental result, we know that the 3-dimensional analysis is accurate because the magnetic field distribution in CPM cannot be considered correctly by 2-dimensional analysis because of the shape of CPM. Finally, the optimum designing of CPM which control accurately the electron beam deflection in CRT(Cathode Ray Tube) was possible using 3-dimensional magnetic field analysis result.

• Nuclear Engineering and Technology
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• 제53권9호
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• pp.3026-3034
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• 2021

Multi-target X-ray tube is a new type X-ray source, and can be applied in many fields such as sensitive X-ray fluorescence analysis and medical imaging. In this work, we report an electric field modulation multi-target X-ray tube, which contains four targets (Cr, Ni, Au, Mo) coated on a Beryllium (Be) window. A four-valve electric field deflector was developed to deflect the electron beam to bombard the corresponding targets. Particle dynamics analysis software was employed to simulate the particle tracking of electron beam. The results show that the 30 keV electron beam could get a 6.7 mm displacement on the target plane by 10⁵ V/m electric field. The focus areas are about 2 mm × 5 mm and 4 mm × 2.5 mm after deflection in two directions. Thermal behavior calculated by ANSYS shows that the designed target assembly could withstand a 10 W continuous power. The optimum target thicknesses and emission spectra were obtained by Geant4 when the thickness of Be window was 300 mm and the electron beam incident angle was 0.141 rad. The results indicate that this multi-target X-ray tube could provide different X-ray sources effectively.

• 한국정밀공학회지
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• 제15권5호
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• pp.19-27
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• 1998

Color Display Tube (CDT) used in computer monitors, consists of many components. Deflection Yoke(DY) among them supplies the vertical and horizontal magnetic fields so that the spatial trajectories of electron beams are deflected according to the synchronization signals. If the magnetic fields are not correctly formed, there will be color blurring or blooming by a mis-convergence of each beam and the color image on screen may not be clear. Therefore, in the manufacture of DY. its quality is strictly examined to get the desired convergence and the occurred mis-convergence can be cured by sticking ferrite sheets on the inner part of DY. However, because it needs expert's knowledge and experience to find the proper position of the sheet, this article introduces an intelligent controller that the knowledge-base represented by a neuro-fuzzy model is used to find the optimal position of the ferrite sheet for the convergence.

• 한국CDE학회논문집
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• 제3권1호
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• pp.22-30
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• 1998

The deflection yoke (DY) controls the direction of the electron beam that falls on the screen of the television monitor. Its quality depends on the shape and density of coils wound around the DY coil separator. Winding frames are used to make these coils, and therefore, their shapes are essential in making quality coils. A reverse engineering(RE) is applied to create the 3D model of the winding frame. It considerably shortens the design verification time and shows the level of accuracy that is feasible in the production mode. The paper explains each step of the reverse engineering process in detail.

• 한국정밀공학회지
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• 제24권9호
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• pp.95-102
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• 2007

The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses playa role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and pole-piece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.351-354
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• 2002

The F!T tube is a new type of CRT without a shadow mask. Correct color reproduction is performed by an electronic system that measures the landing positions of the electron beams and corrects through a dedicated deflection system. This paper describes in detail the position sensor and some of the electronics needed to build a functional control system. The principle has been shown in single- and triple-beam 17" and 32" tubes, of which results are included.

• 한국입자에어로졸학회지
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• 제8권1호
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• pp.29-35
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• 2012

The Faraday cup electrode of different size has been developed and evaluated to investigate the diffusion effect of particles by Brownian motion in a particle beam mass spectrometer(PBMS). Particles which focused and accelerated by aerodynamic lens are charged to saturation in an electron beam, and then deflected electrostatically into a Faraday cup detector for measurement of the particle current. The concentration of particles is converted from currents detected by Faraday cup. Measurements of particle current as a function of deflection voltage are combined with measured relationships between particle velocity and diameter, charge and diameter, and mass and diameter, to determine the particle size distribution. The particle currents were measured using 5, 10, 20, 40 mm sized Faraday cup that can be move to one direction by motion shaft. The current difference for each sizes as a function of position was compared to figure out diffusion effect during transport. Polystyrene latex(PSL) 100, 200 nm sized standard particles were used for evaluation. The measurement using 5 mm sized Faraday cup has the highest resolution in a diffusion distance and the smaller particles had widely diffused.

• 한국레이저가공학회지
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• 제5권2호
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• pp.31-38
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• 2002

This paper describes the process of nanoparticle synthesis by laser ablation of consolidated microparticles. We have generated nanoparticles by high-power pulsed laser ablation of Al, Cu and Ag microparticles using a Q-switched Nd:YAG laser (wavelength 355 nm, FWHM 5 ㎱, fluence 0.8∼2.0 J/㎠). Microparticles of mean diameter 18∼80 ㎛ are ablated in the ambient air The generated nanoparticles are collected on a glass substrate and the size distribution and morphology are examined using a scanning electron microscope and a transmission electron microscope. The effect of laser fluence and collector position on the distribution of particle size is investigated. The dynamics of ablation plume and shock wave is analyzed by monitoring the photoacoustic probe-beam deflection signal. Nanosecond time-resolved images of the ablation process are also obtained by laser flash shadowgraphy. Based on the experimental results, discussions are made on the dynamics of ablation plume.

• 한국산학기술학회논문지
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• 제19권11호
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• pp.1-7
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• 2018

마이크로칼럼에서는 전자빔을 스캔하기 위해 초소형화된 정전디플렉터를 사용하는 경우가 많다. 주로 두 개의 8중극 디플렉터(double octupole deflector)를 사용하는 경우가 많은데, 이는 스캔 영역을 넓게 하면서도 전자빔이 대물렌즈를 통과할 때에 광축 근처에 위치하도록 함으로써 수차를 작게 유지할 수 있는 장점이 있기 때문이다. 마이크로칼럼은 최종적으로는 멀티 칼럼 형태로 사용하여 전자빔 장비의 throughput을 높이고자 하는 목적으로 연구가 되고 있는데, 칼럼의 수가 많아지게 되면 각 부품에 연결되는 배선의 수도 함께 증가하게 된다. 이에 따라 정전렌즈, 디플렉터 등의 마이크로칼럼 부품 배선을 진공 챔버 밖에 있는 제어장비와 연결하는 과정에서 실질적인 문제에 봉착하게 된다. 이러한 문제를 완화하기 위하여 렌즈 수를 최소화할 수 있도록 대물렌즈를 제거한 마이크로칼럼 구조를 선택하여, 변형된 4중극 및 8중극 디플렉터의 동작을 전산모사 방법으로 연구하였다. 기본적으로 MEMS 공정을 적용하기 용이한 실리콘 디플렉터 구조에서 각 전극의 크기를 동일하게 하지 않고, 서로 다른 크기의 전극을 교대로 배치하도록 디자인하였다. 8중극과 4중극 디플렉터 각각에서 디플렉터 전압을 인가하는 구동전극의 크기에 변화를 주었을 때 스캔 영역과 디플렉터 중심점에서의 전기장의 변화를 조사하여 비교하였다. 스캔 영역은 디플렉터전압에 따라 선형적으로 비례하였다. 스캔영역과 중심점에서의 전기장 세기 모두 8중극 디플렉터에 비해 4중극 디플렉터에서 더 크게 나타났으며, 전극의 크기에 따라 약 1.3 ~ 2.0 배 큰 것으로 조사되었다.