A Study on Particle Diffusion to Develop Faraday Cup Array of Particle Beam Mass Spectrometer System |
Mun, Ji-Hun
(Sungkyunkwan Universty Advanced Institute of Nano Technology, Sungkyunkwan University)
Shin, Yong-Hyun (Vacuum Center, Korea Research Institute of Standards and Science) Kim, Tae-Sung (Sungkyunkwan Universty Advanced Institute of Nano Technology, Sungkyunkwan University) Kang, Sang-Woo (Vacuum Center, Korea Research Institute of Standards and Science) |
1 | A. A. Scheidemann, R. B. Darling, F. J. Schumacher, and A. Isakharov(2002). Faraday cup detector array with electronic multiplexing for multi-channel mass spectrometry, J. Vac. Sci. Technol. A, 20, 597-604. DOI ScienceOn |
2 | A.K. Knight, R.P. Sperline, G.M. Hieftje, E. Young, C.J. Barinaga, D.W. Koppenaal, M.B. Denton(2002), The development of a micro-Faraday array for ion detection, International Journal of Mass Spectrometry, 215, 131-139. DOI |
3 | Jeonggil Na, Taesung Kim, Jae-Boong Choi, Ju-Young Yun, Yong-Hyeon Shin, and Sang-Woo Kang(2009). Real-time diagnosis of nano-sized contaminant particles generated in TiN metal organic chemical vapor deposition, Applied Physics Express, 2, 035501. DOI |
4 | Jeonggil Na, Taesung Kim, Jae-Boong Choi, Young-Jin Kim, Yong-Hyeon Shin, Ju-Young Yun, and Sang-Woo Kang(2010a). Effects of process variables on TiN particles formation during metallorganic chemical vapor deposition, Electrochemical and Solid-State Letters, 13, H248-H252. DOI ScienceOn |
5 | Jeong Gil Na, Jae Boong, Choi, Ji Hoon Moon, Sung Kyu Lim, Sang Hyun Park, Hun Jung Yi, Seung Ki Chae, Ju Young Yun, Sang Woo Kang, Tae Sung Kim(2010b). Real-time contaminant particle monitoring for chemical vapor deposition of borophosphosilicate and phosphosilicate glass film by using in-situ particle monitor and particle beam mass spectrometer, Particle and Aerosol Research, 6, 3, 139-145. |
6 | Paul J. Ziemann, Peng Liu, David B. Kittelson, and Peter H. McMurry(1995a). Electron impact charging properties of size-selected, submicrometer organic particles, J. Phys. Chem., 99, 5126-5138. DOI ScienceOn |
7 | Paul J. Ziemann, Peng Liu, Nagaraja P. Rao, David B. Kittelson and Peter H. Mcmurry(1995b). Particle beam mass spectrometry of submicron particles charged to saturation in an electron beam, J. Aerosol Sci., 26, 5, 745-756. DOI ScienceOn |
8 | Paul J. Ziemann, David B. Kittelson and Peter H. McMurry(1996). Effects of particle shape and chemical composition on the electron impact charging properties of submicron inorganic particles, J. Aerosol Sci., 27, 4, 587-606. DOI ScienceOn |
9 | Peng Liu, Paul J. Ziemann, David B. Kittelson, and Peter H. McMurry(1995a). Generating particle beams of controlled dimensions and divergence: I . theory of particle motion in aerodynamic lenses and nozzle expansions, Aerosol Science and Technology, 22, 293-313. DOI ScienceOn |
10 | Peng Liu, Paul J. Ziemann, David B. Kittelson, Peter H. Mcmurry(1995b). Generating particle beams of controlled dimensions and divergence: II . experimental evaluation of particle motion in aerodynamic lenses and nozzle expansions, Aerosol Science and Technology, 22, 313-324. |
11 | Robert B. Darling, Adi A. Scheidemann, K. N. Bhat, T.-C. Chen(2002). Micromachined Faraday cup array using deep reactive ion etching, Sensors and Actuators A, 95, 84-93. DOI |
12 | Sandeep Nijhawan and Peter H. McMurry(2000). Particle transport in a parallel-plate semi-conductor reactor: Chamber modification and design criterion for enhanced process cleanliness, J. Vac. Sci. Technol. A, 18, 2198-2206. DOI ScienceOn |
13 | William C. Hinds(1999). Aerosol technology: properties, behavior, and measurement of aerborne particls, 2nd Ed., John Wiley & Sons, Inc., 156-157. |
14 | T. Kim, S-M. Suh, S. L. Girshick, M. R. Zachariah, and P. H. McMurry(2002a). Particle formation during low-pressure chemical vapor deposition from silane and oxygen: Measurement, model ing, and film properties, J. Vac. Sci. Technol. A, 20, 413-423. DOI ScienceOn |
15 | Taesung Kim(2002b), A study of particle formation and transport during thermal chemical vapor deposition(CVD) of silicon dioxide films and high-density plasma CVD of poly silicon films, Ph. D. Thesis, University of Minnesota, 18-21. |