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A Study on Design and Analysis for Magnetic Lenses of a Scanning Electron Microscope using Finite Element Method  

Park, Keun (서울산업대학교 기계설계.자동화공학부)
Jung, Hyun-Woo (서울산업대학교 기계설계.자동화공학부 대학원)
Park, Man-Jin (서울대학교 기계항공공학부 대학원)
Kim, Dong-Hwan (서울산업대학교 나노생산기술연구소)
Jang, Dong-Young (서울산업대학교 나노생산기술연구소)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.9, 2007 , pp. 95-102 More about this Journal
Abstract
The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses playa role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and pole-piece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.
Keywords
Scanning Electron Microscope; Finite Element Analysis; Electro-magnetic Lens; Electron optical system;
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