Particle and aerosol research (한국입자에어로졸학회지)

Korean Association for Particle and Aerosol Research (한국입자에어로졸학회)
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A Study on Particle Diffusion to Develop Faraday Cup Array of Particle Beam Mass Spectrometer System

Faraday cup array 개발을 위한 Particle Beam Mass Spectrometer 시스템 내에서의 입자 확산 연구

  • Mun, Ji-Hun (Sungkyunkwan Universty Advanced Institute of Nano Technology, Sungkyunkwan University) ;
  • Shin, Yong-Hyun (Vacuum Center, Korea Research Institute of Standards and Science) ;
  • Kim, Tae-Sung (Sungkyunkwan Universty Advanced Institute of Nano Technology, Sungkyunkwan University) ;
  • Kang, Sang-Woo (Vacuum Center, Korea Research Institute of Standards and Science)
  • 문지훈 (성균관대학교 나노과학기술협동학부) ;
  • 신용현 (한국표준과학연구원 진공기술센터) ;
  • 김태성 (성균관대학교 나노과학기술협동학부) ;
  • 강상우 (한국표준과학연구원 진공기술센터)
  • Published : 2012.03.31
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Abstract

The Faraday cup electrode of different size has been developed and evaluated to investigate the diffusion effect of particles by Brownian motion in a particle beam mass spectrometer(PBMS). Particles which focused and accelerated by aerodynamic lens are charged to saturation in an electron beam, and then deflected electrostatically into a Faraday cup detector for measurement of the particle current. The concentration of particles is converted from currents detected by Faraday cup. Measurements of particle current as a function of deflection voltage are combined with measured relationships between particle velocity and diameter, charge and diameter, and mass and diameter, to determine the particle size distribution. The particle currents were measured using 5, 10, 20, 40 mm sized Faraday cup that can be move to one direction by motion shaft. The current difference for each sizes as a function of position was compared to figure out diffusion effect during transport. Polystyrene latex(PSL) 100, 200 nm sized standard particles were used for evaluation. The measurement using 5 mm sized Faraday cup has the highest resolution in a diffusion distance and the smaller particles had widely diffused.

Keywords

References

  1. A. A. Scheidemann, R. B. Darling, F. J. Schumacher, and A. Isakharov(2002). Faraday cup detector array with electronic multiplexing for multi-channel mass spectrometry, J. Vac. Sci. Technol. A, 20, 597-604. https://doi.org/10.1116/1.1458947
  2. A.K. Knight, R.P. Sperline, G.M. Hieftje, E. Young, C.J. Barinaga, D.W. Koppenaal, M.B. Denton(2002), The development of a micro-Faraday array for ion detection, International Journal of Mass Spectrometry, 215, 131-139. https://doi.org/10.1016/S1387-3806(02)00528-6
  3. Jeonggil Na, Taesung Kim, Jae-Boong Choi, Ju-Young Yun, Yong-Hyeon Shin, and Sang-Woo Kang(2009). Real-time diagnosis of nano-sized contaminant particles generated in TiN metal organic chemical vapor deposition, Applied Physics Express, 2, 035501. https://doi.org/10.1143/APEX.2.035501
  4. Jeonggil Na, Taesung Kim, Jae-Boong Choi, Young-Jin Kim, Yong-Hyeon Shin, Ju-Young Yun, and Sang-Woo Kang(2010a). Effects of process variables on TiN particles formation during metallorganic chemical vapor deposition, Electrochemical and Solid-State Letters, 13, H248-H252. https://doi.org/10.1149/1.3418338
  5. Jeong Gil Na, Jae Boong, Choi, Ji Hoon Moon, Sung Kyu Lim, Sang Hyun Park, Hun Jung Yi, Seung Ki Chae, Ju Young Yun, Sang Woo Kang, Tae Sung Kim(2010b). Real-time contaminant particle monitoring for chemical vapor deposition of borophosphosilicate and phosphosilicate glass film by using in-situ particle monitor and particle beam mass spectrometer, Particle and Aerosol Research, 6, 3, 139-145.
  6. Paul J. Ziemann, Peng Liu, David B. Kittelson, and Peter H. McMurry(1995a). Electron impact charging properties of size-selected, submicrometer organic particles, J. Phys. Chem., 99, 5126-5138. https://doi.org/10.1021/j100014a037
  7. Paul J. Ziemann, Peng Liu, Nagaraja P. Rao, David B. Kittelson and Peter H. Mcmurry(1995b). Particle beam mass spectrometry of submicron particles charged to saturation in an electron beam, J. Aerosol Sci., 26, 5, 745-756. https://doi.org/10.1016/0021-8502(95)00009-2
  8. Paul J. Ziemann, David B. Kittelson and Peter H. McMurry(1996). Effects of particle shape and chemical composition on the electron impact charging properties of submicron inorganic particles, J. Aerosol Sci., 27, 4, 587-606. https://doi.org/10.1016/0021-8502(96)00010-9
  9. Peng Liu, Paul J. Ziemann, David B. Kittelson, and Peter H. McMurry(1995a). Generating particle beams of controlled dimensions and divergence: I . theory of particle motion in aerodynamic lenses and nozzle expansions, Aerosol Science and Technology, 22, 293-313. https://doi.org/10.1080/02786829408959748
  10. Peng Liu, Paul J. Ziemann, David B. Kittelson, Peter H. Mcmurry(1995b). Generating particle beams of controlled dimensions and divergence: II . experimental evaluation of particle motion in aerodynamic lenses and nozzle expansions, Aerosol Science and Technology, 22, 313-324.
  11. Robert B. Darling, Adi A. Scheidemann, K. N. Bhat, T.-C. Chen(2002). Micromachined Faraday cup array using deep reactive ion etching, Sensors and Actuators A, 95, 84-93. https://doi.org/10.1016/S0924-4247(01)00718-X
  12. Sandeep Nijhawan and Peter H. McMurry(2000). Particle transport in a parallel-plate semi-conductor reactor: Chamber modification and design criterion for enhanced process cleanliness, J. Vac. Sci. Technol. A, 18, 2198-2206. https://doi.org/10.1116/1.1288193
  13. T. Kim, S-M. Suh, S. L. Girshick, M. R. Zachariah, and P. H. McMurry(2002a). Particle formation during low-pressure chemical vapor deposition from silane and oxygen: Measurement, model ing, and film properties, J. Vac. Sci. Technol. A, 20, 413-423. https://doi.org/10.1116/1.1448506
  14. Taesung Kim(2002b), A study of particle formation and transport during thermal chemical vapor deposition(CVD) of silicon dioxide films and high-density plasma CVD of poly silicon films, Ph. D. Thesis, University of Minnesota, 18-21.
  15. William C. Hinds(1999). Aerosol technology: properties, behavior, and measurement of aerborne particls, 2nd Ed., John Wiley & Sons, Inc., 156-157.