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http://dx.doi.org/10.3807/HKH.2008.19.5.365

Characteristic Studies for Scan-Field Size and Visibility of Current Image in a Low Voltage Micro-Column  

Noriyuki, Ichimura (Department of Physics and Advanced Materials Science, CNST, Sunmoon University)
Kim, Young-Chul (Department of Physics and Advanced Materials Science, CNST, Sunmoon University)
Kim, Ho-Seob (Department of Physics and Advanced Materials Science, CNST, Sunmoon University)
Jang, Won-Kweon (Department of Applied Physics, Hanseo University)
Publication Information
Korean Journal of Optics and Photonics / v.19, no.5, 2008 , pp. 365-369 More about this Journal
Abstract
The optimal condition for focusing an electron beam was investigated employing an electrostatic deflector in a low voltage micro-column. At fixed voltage of the electron emission tip, the focusing electron beam with source lens showed a larger scan field size and poorer visibility than those with an Einzel lens. Theoretical 3-D simulation indicated that a focusing electron beam with a source lens should have a larger spot size and deflection than those of a focusing Einzel lens.
Keywords
microcolumn; current image; visibility;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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