• Title/Summary/Keyword: directionality

Search Result 264, Processing Time 0.025 seconds

Effect of Process Parameters on TSV Formation Using Deep Reactive Ion Etching (DRIE 공정 변수에 따른 TSV 형성에 미치는 영향)

  • Kim, Kwang-Seok;Lee, Young-Chul;Ahn, Jee-Hyuk;Song, Jun Yeob;Yoo, Choong D.;Jung, Seung-Boo
    • Korean Journal of Metals and Materials
    • /
    • v.48 no.11
    • /
    • pp.1028-1034
    • /
    • 2010
  • In the development of 3D package, through silicon via (TSV) formation technology by using deep reactive ion etching (DRIE) is one of the key processes. We performed the Bosch process, which consists of sequentially alternating the etch and passivation steps using $SF_6$ with $O_2$ and $C_4F_8$ plasma, respectively. We investigated the effect of changing variables on vias: the gas flow time, the ratio of $O_2$ gas, source and bias power, and process time. Each parameter plays a critical role in obtaining a specified via profile. Analysis of via profiles shows that the gas flow time is the most critical process parameter. A high source power accelerated more etchant species fluorine ions toward the silicon wafer and improved their directionality. With $O_2$ gas addition, there is an optimized condition to form the desired vertical interconnection. Overall, the etching rate decreased when the process time was longer.

Prediction of the Macroscopic Plastic Strain Ratio in AA1100 Sheets Manufactured by Differential Speed Rolling (이속압연에 의해 제조된 AA1100 판재의 소성변형비 예측)

  • Choi, Jae-Kwon;Cho, Jae-Hyung;Kim, Hyoung-Wook;Kang, Seok-Bong;Choi, Shi-Hoon
    • Korean Journal of Metals and Materials
    • /
    • v.48 no.7
    • /
    • pp.605-614
    • /
    • 2010
  • Conventional rolling (symmetric) and differential speed rolling (DSR) were both applied to AA1050 sheets at various velocity ratios, from 1 to 2 between the top and bottom rolls. An electron backscatter diffraction (EBSD) technique was used to measure texture inhomogeneity through the thickness direction. After the annealing process, the annealing texture of the DSR processed sheets was different from that of conventionally rolled sheets. The velocity ratio between the top and bottom rolls affected the texture inhomogeneity and macroscopic plastic strain ratio of the AA1050 sheets. A prediction for the macroscopic plastic strain ratio of AA1050 sheets was carried out using a visco-plastic self-consistent (VPSC) polycrystal model. The strain ratio directionality that was predicted using the VPSC polycrystal model was in good agreement with experimental results.

Plasma-Enhanced Atomic-Layer-Deposited SiO2 and SiON Thin Films at Low Temperature (< 300℃) using ICP Type Remote Plasma for 3-Dimensional Electronic Devices (3차원 소자 제작을 위한 ICP Type Remote PEALD를 이용한 저온(< 300℃) SiO2 및 SiON 박막 공정)

  • Kim, Dae Hyun;Park, Tea Joo
    • Journal of the Semiconductor & Display Technology
    • /
    • v.18 no.2
    • /
    • pp.98-102
    • /
    • 2019
  • Direct plasma-enhanced atomic layer deposition (PEALD) are widely used for $SiO_2$ and SiON thin film process in current semiconductor industry. However, this exhibits poor step coverage for three-dimensional device structure due directionality of plasma species as well as plasma damage on the substrate. In this study, to overcome this issue, low temperature (< $300^{\circ}C$) $SiO_2$ and SiON thin film processes were studied using inductively coupled plasma (ICP) type remote PEALD with various reactant gases such as $O_2$, $H_2O$, $N_2$ and $NH_3$. It was confirmed that the interfacial properties such as fixed charge density and charge trapping behavior of thin films were considerably improved by hydrogen species in $H_2O$ and $NH_3$ plasma compared to the films grown with $O_2$ and $N_2$ plasma. Furthermore, the leakage current density of the thin films was suppressed for same reason.

Influences of Interpersonal Relations Competency of University Students of Dental Technology on Their Smartphone Addiction (치기공학과 대학생의 대인관계유능성이 스마트폰 중독에 미치는 영향)

  • Lee, KHye-Eun;Moon, Hag ryong
    • Journal of Technologic Dentistry
    • /
    • v.41 no.2
    • /
    • pp.123-135
    • /
    • 2019
  • Purpose: This study aims to prevent Smartphone addiction and provide a basic material for intervention strategy by inquiring into the correlation between interpersonal relations competency and Smartphone addiction. Methods: This study carried out a questionnaire survey oriented to 323 people who agreed to participate in this research. For the final analysis, this study selected 298 sheets of questionnaires excluding 25 sheets with insufficient response qualities. Results: According to the results of regression analysis, significant correlation between interpersonal relations competency and Smartphone addiction level was not observed. However, according to the results of correlation analysis, the subordinate factor of Smartphone addiction "directionality of virtual world" showed a significant negative correlation with "opinion expression regarding rights or refusal" of interpersonal relations competency (p<0.05), while "withdrawal," the subordinate factor of interpersonal relations competency and Smartphone addiction displayed a negative correlation with Smartphone addiction (p<0.05). Conclusion : However, the mean of the 3DP group was within the clinical tolerance suggested by the previous researchers. Based on this, dental prosthesis fabricated by 3D printing technology is considered to be clinically acceptable.

Stereotactic Radiosurgery

  • Chung, Hyun-Tai;Lee, Dong-Joon
    • Progress in Medical Physics
    • /
    • v.31 no.3
    • /
    • pp.63-70
    • /
    • 2020
  • Stereotactic radiosurgery is one of the most sophisticated forms of modern advanced radiation therapy. Unlike conventional fractionated radiotherapy, stereotactic radiosurgery uses a high dose of radiation with steep gradient precisely delivered to target lesions. Lars Leksell presented the principle of radiosurgery in 1951. Gamma Knife® (GK) is the first radiosurgery device used in clinics, and the first patient was treated in the winter of 1967. The first GK unit had 179 cobalt 60 sources distributed on a hemispherical surface. A patient could move only in a single direction. Treatment planning was performed manually and took more than a day. The latest model, Gamma Knife® IconTM, shares the same principle but has many new dazzling characteristics. In this article, first, a brief history of radiosurgery was described. Then, the physical properties of modern radiosurgery machines and physicists' endeavors to assure the quality of radiosurgery were described. Intrinsic characteristics of modern radiosurgery devices such as small fields, steep dose distribution producing sharp penumbra, and multi-directionality of the beam were reviewed together with the techniques to assess the accuracy of these devices. The reference conditions and principles of GK dosimetry given in the most recent international standard protocol, International Atomic Energy Agency TRS 483, were shortly reviewed, and several points needing careful revisions were highlighted. Understanding the principles and physics of radiosurgery will be helpful for modern medical physicists.

Fault Detection of Aircraft Turbofan Engine System Using a Fault Detection Filter (고장 검출 필터를 사용한 항공기 터보팬 엔진 시스템의 고장 검출)

  • Bae, Junhyung
    • Journal of IKEEE
    • /
    • v.25 no.2
    • /
    • pp.330-336
    • /
    • 2021
  • A typical way to reduce the number of hardware redundancy configurations is to implement them as analytical techniques for detecting, identifying and accepting failures with micro-controller. In this paper, one of the analytical techniques, the fault detection filter, is applied to aircraft turbofan engine system. The fault detection filter is a special type of observer that has the advantage of being able to determine the location of failures by maintaining a constant direction in the output space in the event of a particular failure. We present a single input/output dynamic system modeling of air turbine system in turbofan engine, a fault detection filter design, and simulation results applying it. Simulation results show that fault detection can be effectively applied as a sensitivity effect to the directionality of the detection filter.

Modeling of ambient noise in ocean environment using coupled mode (연성모드법을 이용한 해양 배경소음 모델링)

  • Park, Jungyong;Kwon, Hyuckjong
    • The Journal of the Acoustical Society of Korea
    • /
    • v.41 no.4
    • /
    • pp.397-409
    • /
    • 2022
  • A model is developed for the calculation of sea surface generated ambient noise in the range dependent ocean environment. The sources are located in the horizontal plane all around and their depths are at the near-surface. The receiver array is located in the range dependent ocean waveguide. One-way coupled mode method is used to model the acoustic propagation between the sources and receiver in the range dependent waveguide, and the cross spectral density matrix of noise is derived. In simulation, noise intensity, beamforming result and coherence function are calculated from the cross spectral density matrix. These results are compared with those in the range independent environment. The modeling result shows the effect of the vertical directionality and asymmetry characteristics of the horizontal plane.

Hydrophobicity Evaluation of Oblique Micro-asperities Structures (경사 돌기 표면의 젖음 특성 평가)

  • Sung Ik Beak;Tae Wan Kim
    • Tribology and Lubricants
    • /
    • v.39 no.2
    • /
    • pp.56-60
    • /
    • 2023
  • In this study, we evaluate the anisotropic flow of droplets according to the directionality of asperities. We manufacture a mold with an inclined hole by adjusting the jig angle using a high-power diode laser. Using the manufactured mold, we prepare specimens for wettability studies by the micro molding technique. We fabricate twelve kinds of surfaces with micro-asperities inclined at 0°, 15°, 30°, and 45° for asperity pitches of 100 ㎛, 200 ㎛, and 300 ㎛. We evaluate the static and dynamic behaviors of the droplets as a function of the asperities pitch and inclination angles. The anisotropic effect increases as the pitch increases between asperities, and the anisotropic flow characteristics increase as the inclination angle of the asperities increases. On the surface with hole pitches of 100 ㎛ and 200 ㎛, the contact angle of the droplet shows high hydrophobicity at approximately 160°, but on the surface with the 300-㎛ hole pitch, the contact angle is approximately 110°, indicating that the hydrophobic effect rapidly reduces. Additionally, when the inclination angle of the asperities is approximately 30°, the left and right contact angle deviations of the droplet are the lowest, showing that the roll-off angle is relatively low.

A Study on Korean Fashion Designers' Stage Costumes (국내 패션 디자이너의 공연의상 디자인 연구)

  • Jinyoung Ryu;Jiyeon Kim
    • Journal of the Korea Fashion and Costume Design Association
    • /
    • v.25 no.1
    • /
    • pp.115-132
    • /
    • 2023
  • The globalization of Korean culture has spurred a steady increase in the participation of domestic fashion designers in global performance art. This study analyzes the formal elements of stage costume designs by fashion designers, and further evaluates the impact of these designers' aesthetic philosophies on overall performance. This analysis seeks to provide a foundation for the development of new directionality in performance art, with an enhanced competitiveness derived from diversity and creativity. The scope of this research spans 15 performances and eight fashion designers' works in the post-2010s era. These performances are characterized by their break from traditional artistic norms, illustrating the modernization of the performing arts and reflecting the designers' aesthetic philosophies. This modernization incorporates inspirations drawn from a diverse selection of movements, such as fusion, culture clash, kitsch, and minimal avant-garde. As a result, in combination with a pure reflection of the designers' aesthetics, these designs heighten overall performance, suggest a new direction for traditional performance art, tap into a popular sensibility to expand communication to a wider audience, and push the boundaries of tradition through artistic innovation.

Detection of a Crack on a Plate by IDT Type Lamb Wave Sensors (IDT형 Lamb 파 센서에 의한 판상의 균열 검출)

  • Kim, Jun-Ho;Roh, Yong-Rae
    • The Journal of the Acoustical Society of Korea
    • /
    • v.29 no.8
    • /
    • pp.483-490
    • /
    • 2010
  • In this paper, an Inter-Digital Transducer (IDT) type Lamb wave sensor is proposed to estimate the geometry and number of cracks on a plate structure, and its validity is checked through experiments. This IDT type sensor is more readily controllable than conventional patch type piezoelectric sensors to modify its operation frequency and directionality by altering its finger patterns. In this work, omni-directional annular IDT and highly directional rectangular IDT sensors are designed and fabricated. The IDT sensors are used to diagnose the length, number and orientation of cracks on an aluminum plate by measuring the amplitude and time of flight of Lamb waves. The results are analyzed to discuss the efficacy of the IDT sensors.