Effect of Process Parameters on TSV Formation Using Deep Reactive Ion Etching |
Kim, Kwang-Seok
(School of Advanced Materials Science & Engineering, Sungkyunkwan University)
Lee, Young-Chul (School of Advanced Materials Science & Engineering, Sungkyunkwan University) Ahn, Jee-Hyuk (School of Advanced Materials Science & Engineering, Sungkyunkwan University) Song, Jun Yeob (Korea Institute of Machinery & Materials) Yoo, Choong D. (Department of Mechanical Engineering, KAIST) Jung, Seung-Boo (School of Advanced Materials Science & Engineering, Sungkyunkwan University) |
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