• 제목/요약/키워드: deposition cross section

검색결과 70건 처리시간 0.031초

AISI M2 파우더를 이용한 레이저 메탈 디포지션의 트랙 특성 분석 (The Characteristics Analysis of Track of Laser Metal Deposition Using AISI M2 Powder)

  • 김원혁;송명환;박인덕;강대민
    • 한국자동차공학회논문집
    • /
    • 제24권4호
    • /
    • pp.463-470
    • /
    • 2016
  • In this paper, the characteristics analysis of LMD track, such as including track structure, track wear resistance and track thickness, were analyzed to enhance the deposition efficiency using a diode-pumped disk laser. SKD61 hot work steel plate and Fe based AISI M2 alloy were used as a the substrate and powder for the LMD process, respectively. The laser power, track pitch and powder feed rate among LMD parameters were adopted to estimate the deposition efficiency. As the laser power is increased, heat input and melting pool on the substrate is grown also increases, so resulting in the increased LMD track thickness was increased. Through EPMA mapping analysis of the cross-section in the LMD track, it was observed that all the elements are evenly distributed inside. Therefore, the entire hardness in the LMD track is expected to be almost uniform regardless of location. The characteristics of the LMD specimen were excellent compared to the STD11 specimen in terms of the wear track width and the wear rate as well as the coefficient of friction. Especially the wear rate of LMD specimen has been significantly reduced by 60 % or more. From Based on the experimental results, the prediction formula of LMD thickness was calculated by using laser power, track pitch and powder feed rate.

도시하천(都市河川)의 하상미지형(河床微地形) 변화(變化)에 관한 연구(硏究) - 춘천시(春川市) 태백천(太白川)을 대상으로 - (Study on Changing of the Channelbed Microtopography of Urban River - On Taebaek River of Chunchon city -)

  • 김경남;전근우
    • Journal of Forest and Environmental Science
    • /
    • 제13권1호
    • /
    • pp.81-89
    • /
    • 1997
  • 도시하천(都市河川)은 인간활동(人間活動)에 의해 주변 환경이 민감하게 변화하므로 지속적인 관찰이 필요하다. 이 연구에서는 인간활동이 도시하천(都市河川)에 미치는 영향을 파악하고자 춘천시(春川市) 태백천(太白川)을 대상으로 1993년 6월 부터 1996년 6월까지, 4개년간 5회에 걸쳐 구간별 하상(河床)의 횡단형상(橫斷形狀), 변동량(變動量) 및 편의도(偏倚度)를 분석하였다. 연구결과, 1. 횡단형상(橫斷形狀) 변화(變化)는 조사시기 별로는 1996년 6월이 가장 크게 나타났으며, 구간별로는 측선 19~20구간에서 최대(最大) 퇴적량(堆積量) $1.247m^3$, 측선 6~7구간에서 최대(最大) 세굴량(洗掘量) $340m^34가 각각 발생하였고, 2. 1993년 6월 하상면(河床面)을 기준으로 하면 1996년 6월에는 하상(河床)이 전체적으로 상승하여 약 $4.660m^3$이 퇴적(堆積)되었으며, 3. 유로편의도(流路偏倚度)는 시기별로는 1996년, 측선별로는 6, 7, 15, 16, 17, 18, 19, 20을 중심으로 발생하였다.

  • PDF

Plasma Chemistry Data Research for Plasma Applications

  • Yoon, Jung-Sik
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
    • /
    • pp.77-77
    • /
    • 2012
  • As interest has increased in the interaction between low-temperature plasmas and materials, the role of modeling and simulation of processing in plasma has become important in understanding the effects of charged particles and radicals in plasma applications. Thus in this presentation, we present the theoretical and experimental studies of electron impact cross section for plasma processing gas, such as plasma etching and deposition processes. Also, here the work conducted at the Data Center for Plasma Properties (DCPP) over last 7 years on the systematic synthesis and assessment of fundamental knowledge on low-energy electron interactions with plasma processing gases is briefly summarized and discussed.

  • PDF

Al 박막을 이용한 다결정 Si 박막의 제조에서 기판온도 영향 연구 (Effect of Substrate Temperature on Polycrystalline Silicon Film Deposited on Al Layer)

  • 안경민;강승모;안병태
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
    • /
    • pp.96.2-96.2
    • /
    • 2010
  • The surface morphology and structural properties of polycrystalline silicon (poly-Si) films made in-situ aluminum induced crystallization at various substrate temperature (300~600) was investigated. Silicon films were deposited by hot-wire chemical vapor deposition (HWCVD), as the catalytic or pyrolytic decomposition of precursor gases SiH4 occurs only on the surface of the heated wire. Aluminum films were deposited by DC magnetron sputtering at room temperature. continuous poly-Si films were achieved at low temperature. from cross-section TEM analyses, It was confirmed that poly-Si above $450^{\circ}C$ was successfully grown on and poly-Si films had (111) preferred orientation. As substrate temperature increases, Si(111)/Si(220) ratio was decreased. The electrical properties of poly-Si film were investigated by Hall effect measurement. Poly-Si film was p-type by Al and resistivity and hall effect mobility was affected by substrate temperature.

  • PDF

RF Magnetron Sputtering 법으로 제조된 AIN 박막에 관한 연구 (A study on the AIN thin films fabricated by RF magnetron sputtering)

  • 남창길;최승우;천희곤;조동율
    • 한국진공학회지
    • /
    • 제6권1호
    • /
    • pp.44-49
    • /
    • 1997
  • 반응성 RF 스퍼터링 장치에 반응성 질소와 작업가스 아르곤을 동시에 주입하면서 Al을 스퍼터링하여 AIN박막을 형성하였다. polycarbonate기판이나 이 디스크 표면 위의 micron크기의 pregroove형태의 손상이 일어나지 않을 정도의 저온의 저온을 유지키 위하여 플라즈마(plasma) 자체 온도($100^{\circ}C$이하)로 가열하면서 silicon과 glass기판 위에 AIN박막을 증착시켰다. 여러 증착변수 변화에 따른 박막의 결정성, 단면형상 및 굴절율 변화 등을 분석 하였다.

  • PDF

Y-Jet 노즐에서의 혼합관 길이변화에 따른 분무특성 연구 (Change of Spray Characteristics with Mixing Port Length of Y-Jet Atomizers)

  • 송시홍;이상용
    • 대한기계학회논문집
    • /
    • 제18권11호
    • /
    • pp.3021-3031
    • /
    • 1994
  • Experiments have been performed to find out the effect of the mixing port length of Y-jet atomizers on the spray performance, using air and water as the test fluids. Water and air flow rates and drop sizes were measured at each injection pressure condition for different mixing port length. The air flow rate was almost unaffected by the change of the mixing port length. However, the water flow rate was relatively susceptible to the change of the mixing port length. The mixing point pressure was very much influenced by the mixing port length. Variations of spatial distribution of Sauter Mean Diameter (SMD, $D_{32}$) and the cross-section-averaged SMD ($D_{32,m}$) with different mixing port length and air/water mass flow rate ratio were examined. Generally, when the mixing port length was reduced, the mean drop size decreased and became spatially even.

EBSD를 이용한 구리박막의 결정립 크기 결정 (Grain Size Determination of Copper Film by Electron Backscatter Diffraction)

  • 김수현;강주희;한승전
    • 대한금속재료학회지
    • /
    • 제48권9호
    • /
    • pp.847-855
    • /
    • 2010
  • The grain size of a cross-section of $8{\mu}m$-thick copper film was determined by electron backscatter diffraction analysis. Grain size distribution histogram showed the presence of a large fraction of small-sized grains, and the mean grain size was significantly affected by handling of them. A cut-off grain size, below which all grains are ignored as noise and eliminated for the calculation of the mean value, should be three or four times as large as the step size. Due to the presence of small grains, the linear intercept method derived larger mean grain size, which depends less sensitively on the cut-off grain size than the equivalent circle diameter method.

Room-temperature Preparation of Al2O3 Thick Films by Aerosol Deposition Method for Integrated RE Modules

  • Tsurumi, Takaaki;Nam, Song-Min;Mori, Naoko;Kakemoto, Hirofumi;Wada, Satoshi;Akedo, Jun
    • 한국세라믹학회지
    • /
    • 제40권8호
    • /
    • pp.715-719
    • /
    • 2003
  • The Aerosol Deposition (AD) process will be proposed as a new fabrication technology for the integrated RF modules. $\alpha$-A1$_2$O$_3$ thick films were successfully grown on glass and Al substrates at room temperature by the AD process. Relative dielectric permittivity and loss tangent of the $Al_2$O$_3$ thick films on Al showed 9.5 and 0.005, respectively. To form microstrip lines on aerosol-deposited A1903 thick films, copper electroplating and lithography processes were employed, and the square-type cross section with sharp edges could be obtained. Low-pass LC filters with 10 GHz cutoff frequency were simulated by an electromagnetic analysis, exhibiting the validity of the AD process as a fabrication technology f3r integrated RF modules.

DMT 공정을 이용한 S45C 구조용강 위 Inconel 718 초합금 단일 비드 적층시 열전달 특성 분석에 관한 연구 (A Study on the Heat Transfer Characteristics of Single Bead Deposition of Inconel 718 Superalloy on S45C Structural Steel Using a DMT Process)

  • 이광규;안동규;김우성;이호진
    • 한국기계가공학회지
    • /
    • 제19권8호
    • /
    • pp.56-63
    • /
    • 2020
  • The heat transfer phenomenon in the vicinity of the irradiated region of a focused laser beam of a DMT process greatly affects both the deposition characteristics of powders on a substrate and the properties of the deposited region. The goal of this paper is to investigate the heat transfer characteristics of a single bead deposition of Inconel 718 powders on S45C structural steel using a laser-aided direct metal tooling (DMT) process. The finite element analysis (FEA) model with a Gaussian volumetric heat flux is developed to simulate a three-dimensional transient heat transfer phenomenon. The cross-section of the bead for the FEA is estimated with an equivalent area method using experimental results. Through the comparison of the results of the experiments and those of the analysis, the effective beam radius of the bottom region of the volumetric heat flux and the efficiency of the heat flux model for different powers and travel speeds of the laser are predicted. From the results of the FEA, the influence of the power and the travel speed of the laser on the creation of a steady-state heat transfer region and the formation of the heat-affected zone (HAZ) in the substrate are investigated.

PECVD법에 의해 증착된 SiO2 후막의 광학적 성질 및 구조적 분석 (Optical Properties and Structural Analysis of SiO2 Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition)

  • 조성민;김용탁;서용곤;윤형도;임영민;윤대호
    • 한국세라믹학회지
    • /
    • 제39권5호
    • /
    • pp.479-483
    • /
    • 2002
  • 저온($320^{\circ}$C)에서 $SiH_4$$N_2O$ 가스의 혼합을 통해 플라즈마화학기상증착(PECVD)법을 이용하여 실리카 광도파로의 클래딩막으로 사용되는 $SiO_2$ 후막을 제조하였으며, 공정변수로는 $N_2O/SiH_4$ 유량비와 RF power에 변화를 주었다. 증착된 시편은 $N_2$ 분위기의 열처리로에서 $1050{\circ}$에서 2시간동안 열처리하였다. $N_2O/SiH_4$ 유량비가 증가함에 따라 증착속도는 $9.4~2.9{\mu}m /h$까지 감소하였으며, RF power가 증가함에 따라 증착속도는 $4.7~6.9{\mu}m /h$까지 증가하였다. 두께 및 굴절률은 Prism Coupler를 이용하여 분석하였다. 화학적 성질 및 구조적 성질은 X-ray Photoelectron Spectroscopy(XPS)와 Fourier Transform-Infrared Spectroscopy(FT-IR)를 이용하여 분석하였으며, Scanning Electron Microscopy(SEM)를 이용하여 시편의 단면을 관찰하였다.