Korean Journal of Metals and Materials (대한금속재료학회지)

The Korean Institute of Metals and Materials (대한금속재료학회)
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Grain Size Determination of Copper Film by Electron Backscatter Diffraction

EBSD를 이용한 구리박막의 결정립 크기 결정

  • Kim, Su-Hyeon (Grain Structure Control Group, Korea Institute of Materials Science) ;
  • Kang, Joo-Hee (Grain Structure Control Group, Korea Institute of Materials Science) ;
  • Han, Seung Zeon (Grain Structure Control Group, Korea Institute of Materials Science)
  • 김수현 (한국기계연구원 부설 재료연구소 결정제어연구그룹) ;
  • 강주희 (한국기계연구원 부설 재료연구소 결정제어연구그룹) ;
  • 한승전 (한국기계연구원 부설 재료연구소 결정제어연구그룹)
  • Received : 2010.04.15
  • Published : 2010.09.22
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Abstract

The grain size of a cross-section of $8{\mu}m$-thick copper film was determined by electron backscatter diffraction analysis. Grain size distribution histogram showed the presence of a large fraction of small-sized grains, and the mean grain size was significantly affected by handling of them. A cut-off grain size, below which all grains are ignored as noise and eliminated for the calculation of the mean value, should be three or four times as large as the step size. Due to the presence of small grains, the linear intercept method derived larger mean grain size, which depends less sensitively on the cut-off grain size than the equivalent circle diameter method.

Keywords

Acknowledgement

Supported by : 재료연구소

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