• 한국재료학회지
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• 제13권4호
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• pp.266-270
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• 2003

We studied BCl$_3$ dry etching of GaAs in a planar inductively coupled plasma system. The investigated process parameters were planar ICP source power, chamber pressure, RIE chuck power and gas flow rate. The ICP source power was varied from 0 to 500 W. Chamber pressure, RIE chuck power and gas flow rate were controlled from 5 to 15 mTorr, 0 to 150 W and 10 to 40 sccm, respectively. We found that a process condition at 20 sccm $BCl_3$ 300 W ICP, 100 W RIE and 7.5 mTorr chamber pressure gave an excellent etch result. The etched GaAs feature depicted extremely smooth surface (RMS roughness < 1 nm), vertical sidewall, relatively fast etch rate (> $3000\AA$/min) and good selectivity to a photoresist (> 3 : 1). XPS study indicated a very clean surface of the material after dry etching of GaAs. We also noticed that our planar ICP source was successfully ignited both with and without RIE chuck power, which was generally not the case with a typical cylindrical ICP source, where assistance of RIE chuck power was required for turning on a plasma and maintaining it. It demonstrated that the planar ICP source could be a very versatile tool for advanced dry etching of damage-sensitive compound semiconductors.

• 한국지반공학회논문집
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• 제22권11호
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• pp.75-87
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• 2006

본 논문에서는 과압밀된 점토에서 피에조콘 관입으로 인한 과잉간극수압의 공간적인 분포를 알아내기 위한 대형 토조시험을 실시하고 분석결과를 제시하였다. 시험결과에 의하면 콘 주변의 전단영역에서 과잉간극수압은 콘 표면으로부터 전단영역의 경계까지 직선적으로 증가하며, 소성영역에서는 대수적으로 감소하여 소성영역 경계에서 영으로 접근하였다. 또한 전단영역의 크기는 콘 반경의 2.2-1.5배 정도이며 과압밀비 증가 시 전단영역의 크기는 감소하는 반면 소성영역의 크기는 과압밀비에 상관없이 콘 반경의 약 11배로 일정하였다. 본 연구에서는 변형률 속도와 응력이 방성 효과를 고려하여 MCC(Modified Cam Clay) 모델과 공동확장이론으로부터 피에조콘 위치에서의 과잉간극수압을 예측하였으며, 전단영역에서 ${\Delta}u_{shear}$의 선형증가와 전단 및 소성영역에서 ${\Delta}u_{oct}$의 대수적 감소를 가정하여 과잉간극수압의 공간적 분포를 예측하기 위한 방법을 제시하였다. 이러한 방법으로 예측된 간극수압의 분포는 대형 토조시험에서의 콘 관입시험 결과와 비교를 통해 검증되었다.

• 설비공학논문집
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• 제1권4호
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• pp.265-275
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• 1989

An experimental study of decaying swirl air flow has been obtained by tangential inlet in a straight tube with Reynolds number range 20,000~40,000. The friction factor, swirl angle, velocity profiles and turbulent intensity are measured by using micro-manometer and hot-wire anemometer. It is found that the swirl flow behaviors depend on the swirl intensity along the test tube.

• 오토저널
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• 제11권6호
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• pp.80-88
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• 1989

본 연구에서는 양산중인 배기량 2.4Liter, 간접분사방식의 소형 디젤엔진에서 연소방식을 직접 분사방식으로 연소계를 재설계하여, 간접분사방식과 직접분사방식에 따른 엔진성능상의 차이점을 비교 평가하고, 아울러 직접분사방식에서 연소실 형상과 연소 관련 주요 인자들의 변경시 엔 진성은에 미치는 영향에 대해 고찰하였다. 직접분사방식 엔진은 간접분사방식 엔진에 대해 동 일출력, 동일 Smoke 수준인 경우 10-15%의 연료소비 저감의 효과가 있고, 이에 따라 연소관련 부품의 열부하면에서도 유리하였으나, 소음 및 NOx 배출은 증가하는 것으로 나타났다. 직접분사 연소방식에서는 Deep Bowl 연소실 형태의 Cylindrical Type 과 Re-entrant Type 에서 연비와 Smoke 등을 고려한 최적 분사시기가 Re-entrant Type 에서 4.deg. CA정도 늦었으며, 각기 최적 분사시기에서 스옴, NOx를 비교한 결과 Re-entrant Type이 더 우수하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.908-911
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• 2002

Recently deep interests and attraction have been paid on the generation of ozone, which is widely used to remove bed smell and to clear water. In this paper the silent discharge and ozone generation characteristics of various typed discharge chambers were investigated experimentally. Dielectric of $Al_2O_3$ was embedded in the cylindrical type of discharge chamber to improve the ozone generation rate and to stabilize the silent discharge mode of operation. Discharge current and ozone concentration depend strongly on the applied voltage and frequency.

• Tribology and Lubricants
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• 제19권5호
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• pp.292-297
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• 2003

The fundamental fluid mechanics associated with the rotation of a smooth plane disk enclosed within a cylindrical chamber have been studied experimentally. In order to acquire systematic information pertinent to this problem torque and friction loss data were obtained over a wide range of disk Reynolds numbers for axial clearance-disk radius ratio H/R from 0.025 to 0.2 and radial tip gap-disk radius ratio s/R from 0.021 to 0.105. Loss analysis of hard disk drive (HDD) is presented to describe the contribution of windage loss of a rotating disk. The minimum loss form factor of HDD can be obtained from this analysis at each operation conditions.

• 대한기계학회논문집
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• 제19권8호
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• pp.1989-1998
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• 1995

Characteristics of the flame propagation for normal and abnormal combustion in hydrogen premixture in a cylindrical constant-volume combustion chamber are studied numerically. A detailed hydrogen oxidation kinetic mechanism, mixture transport properties and a model describing spark ignition process are used. The calculated pressure-time history of the stable deflagration wave propagation agrees well with the experiment. The ignition of the premixture in the unburned gas, initiated by the hot spot, causes a transition from deflagration to detonation under some initial temperature and pressure. Under the initial conditions with high temperature and pressure, excessive ignition energy initiates a strong blast wave and a detonation wave that follows. The chemical reaction in the detonation wave is much more vigorous than that in the deflagration wave and the peak pressure in the detonation wave is much higher than the equilibrium value.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2005년도 춘계학술대회 논문집
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• pp.332-337
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• 2005

In this study the sound field on the surface of the top edge of noise barriers is actively minimized to enhance the shielding effect without increasing the hight of the barrier. First the results of a numerical study are shown; the sound field reduction in the far field due to a cylindrical active headpiece attached to a semi-infinite screen and the related control parameters are investigated. The results of a model experiment in an anechoic chamber and optimal control parameters for noise control on the railway side are shown and discussed.

• The Plant Pathology Journal
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• 제21권1호
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• pp.27-32
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• 2005

Leaf anthracnose was observed on leaves of Japanese spindle tree in Seoul, Korea from autumn 2003 to spring 2004. The causal fungus was purely isolated from he leaf spot lesions and cultured on PDA. The colony on PDA was cream to orange but blackish in the center n old cultures. Conidia were formed in blackish orange asses and were cylindrical in shape, measured 13-17${\times}$5-7 ${\mu}$m in size. Blackish brown setae were often observed on PDA and ranged up to 100 ${\mu}$m in length. Based on morphological and ITS region sequence analyses, the fungal strain was identified as Colletotrichum boninense. Koch’s postulates were fulfilled by inoculating tree leaves with 1 ${\times}$ $106^6$ conidia per ml in a moist chamber. This is the first study on the pathogenicity, growth and phylogenetic characteristics of C. boninense causing leaf anthracnose on Japanese spindle tree in Korea.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제34회 추계학술대회 개최
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• pp.159-165
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• 2001

The fundamental fluid mechanics associated with the rotation of a smooth plane disk enclosed within a cylindrical chamber have been studied experimentally. In order to acquire systematic information pertinent to this problem torque and friction loss data were obtained over a wide range of disk Reynolds numbers for axial clearance-disk radius ratio H/R from 0.025 to 0.2 and radial tip gap-disk radius ratio s/R from 0.021 to 0.105. Loss analysis of hard disk drive(HDD) is presented to describe the contribution of windage loss of a rotating disk. The minimum loss from factor of HDD can be obtained from this analysis at each operation conditions.