• Title/Summary/Keyword: crystallization

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Nano-thick Nickel Silicide and Polycrystalline Silicon on Polyimide Substrate with Extremely Low Temperature Catalytic CVD (폴리이미드 기판에 극저온 Catalytic-CVD로 제조된 니켈실리사이드와 실리콘 나노박막)

  • Song, Ohsung;Choi, Yongyoon;Han, Jungjo;Kim, Gunil
    • Korean Journal of Metals and Materials
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    • v.49 no.4
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    • pp.321-328
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    • 2011
  • The 30 nm-thick Ni layers was deposited on a flexible polyimide substrate with an e-beam evaporation. Subsequently, we deposited a Si layer using a catalytic CVD (Cat-CVD) in a hydride amorphous silicon (${\alpha}$-Si:H) process of $T_{s}=180^{\circ}C$ with varying thicknesses of 55, 75, 145, and 220 nm. The sheet resistance, phase, degree of the crystallization, microstructure, composition, and surface roughness were measured by a four-point probe, HRXRD, micro-Raman spectroscopy, FE-SEM, TEM, AES, and SPM. We confirmed that our newly proposed Cat-CVD process simultaneously formed both NiSi and crystallized Si without additional annealing. The NiSi showed low sheet resistance of < $13{\Omega}$□, while carbon (C) diffused from the substrate led the resistance fluctuation with silicon deposition thickness. HRXRD and micro-Raman analysis also supported the existence of NiSi and crystallized (>66%) Si layers. TEM analysis showed uniform NiSi and silicon layers, and the thickness of the NiSi increased as Si deposition time increased. Based on the AES depth profiling, we confirmed that the carbon from the polyimide substrate diffused into the NiSi and Si layers during the Cat-CVD, which caused a pile-up of C at the interface. This carbon diffusion might lessen NiSi formation and increase the resistance of the NiSi.

Fabrication and Characterization of Cu-based Amorphous Coatings by Cold Spray Process (저온 분사를 이용한 Cu계 비정질 코팅층의 제조 및 특성 연구)

  • Jung, Dong-jin;Park, Dong-Yong;Lee, Jin Kyu;Kim, Hyung Jun;Lee, Kee-Ahn
    • Korean Journal of Metals and Materials
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    • v.46 no.5
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    • pp.321-327
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    • 2008
  • Cu based amorphous ($Cu_{54}Zr_{22}Ti_{18}Ni_6$) coating was produced by cold spraying as a new fabrication process. The microstructure and macroscopic properties of amorphous coating layer was investigated and compared with those of cold sprayed pure Cu coating. Amorphous powders were prepared by gas atomization and Al 6061 was used as the substrate plate. X-ray diffraction results showed that Cu based amorphous powder could be successfully deposited by cold spraying without any crystallization. The Cu based amorphous coating layer ($300{\sim}400{\mu}m$ thickness) contained 4.87% porosity. The hardness of Cu based amorphous coating represented $412.8H_v$, which was correspond to 68% of the hardness of injection casted bulk amorphous material. The wear resistance of Cu based amorphous coating was found to be three times higher than that of pure Cu coating. The 3-point bending test results showed that the adhesion strength of Cu based amorphous coating layer was higher than that pure Cu coating. It was also observed that hard Cu base amorphous particle could easily deform soft substrate by particle collisions and thus generated strong adhesion between coating and substrate. However, the amorphous coating layer unexpectedly represented lower corrosion resistance than pure Cu coating, which might be resulted from the higher content of porosity in the cold sprayed amorphous coating.

Study on Thermal Properties and Plasma Resistance of MgO-Al2O3-SiO2 Glass (MgO-Al2O3-SiO2계 유리의 열물성과 내플라즈마성 연구)

  • Yoon, Ji Sob;Choi, Jae Ho;Jung, YoonSung;Min, Kyung Won;Im, Won Bin;Kim, Hyeong-Jun
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.2
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    • pp.61-66
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    • 2021
  • In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al2O3-SiO2(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF4/O2/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al2O3 and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO2.

Formation of Mesoporous Membrane by Reverse Thermally induced Phase Separation (RTIPS) Process Using Flash Freezing (Mesoporous 막 제조를 위한 급냉법에 의한 역 열유도상전이공정)

  • Yeom, Choongkyun;Kim, Jiwon;Park, Heeyoung;Park, Seong Eun;Lee, Kee Yoon;Lee, Kew-Ho
    • Membrane Journal
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    • v.31 no.1
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    • pp.67-79
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    • 2021
  • Mesoporous polystyrene (PS) and polyethersulfone (PES) membranes have been fabricated by reverse-thermally induced phase separation (RTIPS) process, using flash freezing. The mesoporous pores can be created by the nano-scaled phase separation induced by the formation and growth of solvent crystals in the dope solution in RTIPS process. RTIPS process has been characterized through analysis on the enthalpy change in the solvent of the dope solution, the morphology of the membrane fabricated with different polymer content, and the pore size distribution and its standard deviation of pore size of the membrane with polymer content via DSC, SEM, and BET, respectively. It is found that the kinetic aspect of the dope solution, i.e., the crystallization of solvent is a crucial factor to determine the structure of membrane fabricated in RTIPS rather than the thermodynamic aspect of the dope solution.

Effects of Organic Peroxide Compatibilizer on the Physical Properties of the Biodegradable Plastic Film (과산화물 상용화제 첨가가 생분해 바이오 플라스틱 필름의 물성에 미치는 영향)

  • Han, Jung-Gu;Park, Seung Joon;Chung, Sung Taek;Li, Fanzhu;Kim, Pan-Chae;Kuk, YoungRye;Park, Hyung Woo
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.27 no.3
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    • pp.159-167
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    • 2021
  • The need for biodegradable plastic continues to increase, improvement of physical properties is necessary for actual use in the market. In this study, composite film was produced by adding peroxide additives to bioplastic according to concentration to investigate changes in the melt index, elongation, morphology, and TGA of the composite film. The addition of peroxide compatibilizer showed superior elongation of film and TGA compared to those of control. The added amount of compatibilizer affected the extrusion process, and it was revealed that adding an appropriate amount of peroxidizer is important. Analysis of the composite film's morphology revealed a heterogeneous dispersion sequence due to different rates of crystallization depending on the resin, and surface physical properties were best in the group added with 4% peroxide. The results above showed that the test group added with 4% peroxide compatibilizer was superior in the production of composite biodegradable film.

Effect of Annealing on Ga2O3/Al2O3/SiC Devices Fabricated by RF Sputtering (어닐링이 RF 스퍼터링으로 제작된 Ga2O3/Al2O3/SiC 소자에 미치는 영향 연구)

  • Lee, Hee-Jae;Kim, Min-Yeong;Moon, Soo-Young;Byun, Dong-Wook;Jung, Seung-Woo;Koo, Sang-Mo
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.2
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    • pp.85-89
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    • 2022
  • We reported on annealing effect on Ga2O3/Al2O3/SiC devices grown by radio frequency sputtering method. Post-deposition annealing at 900 ℃ was performed, which results in crystallization in the Ga2O3 films. The major peaks (-401) and (403) of Ga2O3 which was thermally treated at 900 ℃ appears in the x-ray diffraction (XRD) results. Auger electron spectroscopy (AES) shows that Ga and Al atoms seems to be diffused into the opposite direction Al2O3 and Ga2O3 after annealing. Transfer and output characteristics of back-gate transistor were analyzed where SiC substrate is used as gate material. On-state current and on/off ratio increased almost 109 and 106 times higher in the 900 ℃ annealed sample.

Improved Hydrolysis Resistance of Biodegradable Mulching Films (생분해성 멀칭필름의 내가수분해성 향상)

  • Sim, Jae-Ho
    • The Journal of the Convergence on Culture Technology
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    • v.8 no.2
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    • pp.349-354
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    • 2022
  • This research was conducted in order to improve the hydrolysis resistance and mechanical properties of a resin compound and biodegradable mulching film, produced through the use of PBAT(Poly Butylene Adipate-co-Terephthalate) and PLA(Poly Lactic Acid). Various ratios of chain extenders and mechanical properties according to the annealing temperature conditions were investigated. The annealing process showed that compound resin can improve the crystallization capacity. In addition, incorporation of the chain extender was shown to improve and increase the tensile strength and hydrolysis resistance of the film. In the case of 0.6phr chain extender, the tensile strength was 383.0Kgf/cm2, which was improved by 155% compared to the control films. When the blow up ratio(BUR) was 2.5, the optimal tensile strength of the film increased greatly, expanding up to 379.0/195.2kgf/cm2 in the both machine direction (MD) and transverse direction (TD).

Immobilization of sodium-salt wastes containing simulated 137Cs by volcanic ash-based ceramics with different Si/Al molar ratios

  • Sun, Xiao-Wen;Liu, Li-Ke;Chen, Song
    • Nuclear Engineering and Technology
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    • v.53 no.12
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    • pp.3952-3965
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    • 2021
  • In this study, volcanic ash was used as raw material to prepare waste forms with different silicon/aluminum (Si/Al) molar ratios to immobilize sodium-salt waste (SSW) containing simulated 137Cs. Effects of Si/Al molar ratios (3:1 and 2:1) and sodium salts on sintering behavior of waste forms and immobilization mechanism of Cs+ were investigated. Results indicated that the main mineral phase of sintered waste-form matrixes was albite, and the formation of major phases was found to depend on Si/Al molar ratios. Si/Al molar ratio of 2 was favorable for the formation of pollucite, and the formation and crystallization of mineral phases were also decided based on physicochemical characteristics of sodium salts. Furthermore, product consistency test results indicated that the immobilization of Cs+ was related to Si/Al molar ratio, types of sodium salts, and glassy phase. Waste forms with Si/Al molar ratio of 2 exhibited better ability to immobilize Cs+, whereas the influence of sodium salts and glassy phases on the immobilization of SSW showed more complicated relationship. In waste forms with Si/Al molar ratio of 2, Cs+ leaching concentrations of samples containing Na2B4O7·10H2O and NaOH were low. Na2B4O7·10H2O easily transformed into liquid phase during sintering to consequently achieve low temperature liquid-phase sintering, which is beneficial to avoid the volatilization of Cs+ at high temperature. Results clearly reveal that waste forms with Si/Al molar ratio of 2 and containing Na2B4O7·10H2O show excellent immobilization of Cs+.

Conceptual Design of Vanillin Production Process Using Solvent Extraction (용매 추출을 사용한 바닐린 생산공정의 개념 설계)

  • Kim, Eunkyu;Vu, Thang Toan;Song, Daesung
    • Korean Chemical Engineering Research
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    • v.60 no.4
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    • pp.499-505
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    • 2022
  • This study presents a conceptual design of vanillin production from Kraft lignin. Most of the existing Kraft lignin is used as low-quality boiler fuel or discarded as wastewater, and only 2% or less of lignin has been refined into high-quality products. We propose the process developed in this study to utilize discarded Kraft lignin. The existing vanillin production concept process consisted of alkali oxidation using NaOH, filtration, chromatography, and crystallization. Chromatography, which is difficult to commercialize, was changed to a solvent extraction process. The recovery rate of vanillin of the proposed solvent extraction process is 92.9%, and the purity is 99.5%, which is similar to the existing chromatography process. The reason why the solvent extraction process showing similar results to chromatography can replace the existing chromatography process was analyzed.

Physical Properties of Flame Retardant Particulate Reinforced Thermoplastic Polymer Composites for Cold-Resistant Cable (내한성 케이블 적용을 위한 난연 입자 강화 열가소성 고분자복합재료의 기계적 특성평가)

  • Lee, Jinwoo;Shim, Seung Bo;Park, Jae Hyung;Lee, Ji Eun
    • Composites Research
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    • v.35 no.5
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    • pp.309-316
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    • 2022
  • The demand for cold-resistant cable material is increasing due to the rapid increase in the development of devices that operate in a low temperature environment. Cold tolerance of a thermoplastic polymer largely depends on the type and content of about 20 or more additives used to make the polymer. The phenomenon of polymer hardening at low temperature can be classified into hardening by simple temperature effect, embrittlement at the glass transition temperature, and hardening by crystallization of polymers that tend to crystallize. In this study, a thermoplastic polymer having a low glass transition temperature, a flame retardant, and an additive were mixed to evaluate the mechanical properties of a thermoplastic polymer composite material for electric wires. It has been confirmed that mechanical properties and processability are determined depending on the additives and compatibilizers added, and this study is considered to be useful as basic data for optimization to meet the performance requirements of wires developed for low-temperature use.