Nano-thick Nickel Silicide and Polycrystalline Silicon on Polyimide Substrate with Extremely Low Temperature Catalytic CVD |
Song, Ohsung
(Department of Materials Science and Engineering, University of Seoul)
Choi, Yongyoon (Department of Materials Science and Engineering, University of Seoul) Han, Jungjo (Department of Materials Science and Engineering, University of Seoul) Kim, Gunil (Department of Materials Science and Engineering, University of Seoul) |
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