Effect of Annealing on Ga2O3/Al2O3/SiC Devices Fabricated by RF Sputtering
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Lee, Hee-Jae
(Department of Electronic Materials Engineering, Kwangwoon University)
Kim, Min-Yeong (Department of Electronic Materials Engineering, Kwangwoon University) Moon, Soo-Young (Department of Electronic Materials Engineering, Kwangwoon University) Byun, Dong-Wook (Department of Electronic Materials Engineering, Kwangwoon University) Jung, Seung-Woo (Department of Electronic Materials Engineering, Kwangwoon University) Koo, Sang-Mo (Department of Electronic Materials Engineering, Kwangwoon University) |
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