• 제목/요약/키워드: compound semiconductor

검색결과 278건 처리시간 0.028초

NH3를 이용한 반응성 증착법에 의한 AlN 박막의 우선배향특성에 관한 연구 (A Study on the Preferred Orientation Characteristics of AlN Thin Films by Reactive Evaporation Method using NH3)

  • 오창섭;한창석
    • 대한금속재료학회지
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    • 제50권1호
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    • pp.78-85
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    • 2012
  • Aluminum nitride(AlN) is a compound (III-V group) of hexagonal system with a crystal structure. Its Wurzite phase is a very wide band gap semiconductor material. It has not only a high thermal conductivity, a high electrical resistance, a high electrical insulating constant, a high breakdown voltage and an excellent mechanical strength but also stable thermal and chemical characteristics. This study is on the preferred orientation characteristics of AlN thin films by reactive evaporation using $NH_3$. We have manufactured an AlN thin film and then have checked the crystal structure and the preferred orientation by using an X-ray diffractometer and have also observed the microstructure with TEM and AlN chemical structure with FT-IR. We can manufacture an excellent AlN thin film by reactive evaporation using $NH_3$ under 873 K of substrate temperature. The AlN thin film growth is dependent on Al supplying and $NH_3$ has been found to be effective as a source of $N_2$. However, the nuclear structure of AlN did not occur randomly around the substrate a particle of the a-axis orientation in fast growth speed becomes an earlier crystal structure and is shown to have an a-axis preferred orientation. Therefore, reactive evaporation using $NH_3$ is not affected by provided $H_2$ amount and this can be an easy a-axis orientation method.

Display 제조공정 배출가스 처리를 위한 휘발성 유기화합물 전처리 장치 개발 (Development of Volatile Organic Compound Pretreatment Device for Removing Exhaust Gas from Display Manufacturing Process)

  • 문기학;김재용
    • 공업화학
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    • 제30권5호
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    • pp.523-529
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    • 2019
  • 본 연구에서는 최근 반도체 및 display 산업이 발달함에 따라 문제가 되고 있는 휘발성 유기화합물의 전처리에 관해 조사하였다. 일반적인 VOCs 처리 설비인 직접연소장치에 사용되는 농축기는 display 제조 공정 내 배출가스에 의해 쉽게 오염되어 성능저하를 일으키며 결과적으로 VOCs의 처리 효율을 떨어뜨린다. 배출가스 성분 분석 결과 고비점, 고점도, 고분자량의 Alcohol류 및 Oil 성분이 다량 검출되었다. 이에 전처리 설비 내 열교환기를 이용하여 농축기 성능저하 물질을 응축시켜 처리하고자 하였고, 대부분의 물질을 90% 이상 처리하였다. 또한 열교환기에서 재 비산되는 고분자 Oil 등은 후처리 설비로 Grease Filter를 장착하여 대부분 처리할 수 있는 것으로 확인되었다.

집광 조건에서의 GaInP/AlGaInP 이종접합 구조 태양전지 특성 연구 (Study on the Characteristics of GaInP/AlGaInP Heterojunction Photovoltaic Cells under Concentrated Illumination)

  • 김정환
    • 공업화학
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    • 제30권4호
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    • pp.504-508
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    • 2019
  • GaInP/AlGaInP 이종접합 구조를 제안하고 집광 조건에서 가장 높은 효율을 달성한 III-V 화합물 반도체 다중접합 태양전지의 맨 위 subcell에 주로 사용되는 GaInP 동종접합 구조를 대체해 이종접합 구조가 응용될 가능성에 대하여 조사하였다. $2^{\circ}$ off 된 웨이퍼와 $10^{\circ}$ off 된 서로 다른 off-cut 방향을 갖는 두 종류의 GaAs 기판 위에 성장된 태양전지의 특성을 집광 조건에서 측정하고 비교하였다. $10^{\circ}$ off 된 태양전지에서 더 높은 단락전류와 변환효율을 얻었다. 1 sun 조건에서 $10^{\circ}$ off 된 기판 위에 제작된 $2{\times}2mm^2$ 면적의 태양전지에서 $9.21mA/cm^2$의 단락전류밀도와 1.38 V의 개방 전압이 측정되었다. $10^{\circ}$ off 기판 위에 제작된 $5{\times}5mm^2$ 태양전지에서 집광도 증가에 따라 곡선인자(fiill factor)가 감소하여 변환효율은 6.03% (1 sun)에서 5.28% (20 sun)로 측정되었다.

다양한 질소분압에서 펄스레이저법으로 성장된 AlN박막의 특성 (Characterization of AlN Thin Films Grown by Pulsed Laser Deposition with Various Nitrogen Partial Pressure)

  • 정준기;하태권
    • 소성∙가공
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    • 제28권1호
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    • pp.43-48
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    • 2019
  • Aluminum nitride (AlN) is used by the semiconductor industry, and is a compound that is required when manufacturing high thermal conductivity. The AlN films with c-axis orientation and thermal conductivity characteristic were deposited by using the Pulsed Laser Deposition (PLD). The AlN thin films were characterized by changing the deposition conditions. In particular, we have researched the AlN thin film deposited under optimal conditions for growth atmosphere. The epitaxial AlN films were grown on sapphire ($c-Al_2O_3$) single crystals by PLD with AlN target. The AlN films were deposited at a fixed temperature of $650^{\circ}C$, while conditions of nitrogen ($N_2$) pressure were varied between 0.1 mTorr and 10 mTorr. The quality of the AlN films was found to depend strongly on the $N_2$ partial pressure that was exerted during deposition. The X-ray diffraction studies revealed that the integrated intensity of the AlN (002) peak increases as a function the corresponding Full width at half maximum (FWHM) values decreases with lowering of the nitrogen partial pressure. We found that highly c-axis orientated AlN films can be deposited at a substrate temperature of $650^{\circ}C$ and a base pressure of $2{\times}10^{-7}Torr$ in the $N_2$ partial pressure of 0.1 mTorr. Also, it is noted that as the $N_2$ partial pressure decreased, the thermal conductivity increased.

수경배양액 무기성분농도 측정장치 개발 (Equipment Development for Inorganic-Compound Concentration Measurement in a Hydroponic Culture Solution)

  • 허정욱;박경훈;홍승길;이재수;백정현;박종택;이승기
    • 한국환경농학회지
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    • 제39권4호
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    • pp.319-326
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    • 2020
  • BACKGROUND: Measurement equipment was developed for inorganic nutrient concentration inside the hydroponic culture medium with several macro- and micro compositions, and applied for measuring the compositions of conventional medium. METHODS AND RESULTS: Before the equipment development, sonicator and heater were utilized to control temperature around of the module mixing with color reagents and target samples among the inorganic compositions. The measurement module and multi-sampler were also manufactured based on the COMS (Complementary Metal-Oxide Semiconductor) and installed inside the measurement equipment. Concentration of standard solution, value measured by the equipment, standard deviation or measured average value were used for estimating the accuracy and average recall of the equipment. Yamazaki solutions with EC of 0.5, 1.5, and 2.5 dS/m were offered to confirm the equipment accuracy and standard error. CONCLUSION: It was suggested that the developed equipment could be automatically applied for measurement with accuracy of over 96% and standard errors of less than 5% on 12 macro- and micro compositions such as a NO3-N, PO43- or Fe.

초박형 반도체 패키지의 EMC encapsulation을 위한 경화 공정 개발 (Development of Curing Process for EMC Encapsulation of Ultra-thin Semiconductor Package)

  • 박성연;온승윤;김성수
    • Composites Research
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    • 제34권1호
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    • pp.47-50
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    • 2021
  • 본 논문은 차량에 사용되는 B필러의 강화재를 기존의 스틸 소재에서 CFRP(Carbon Fiber Reinforced Plastics)와 GFRP(Glass Fiber Reinforced Plastics)로 대체하여 경량화하는 것이 목표다. 이를 위해서는 무게는 감소시키면서 기존 B필러를 대체할 수 있는 구조안정성을 확보해야 한다. 기존 B필러는 스틸 아우터(outer)를 포함하여 다양한 형상의 스틸 강화재로 구성되며, 이와 같은 스틸 강화재 중 2가지의 스틸 강화재를 복합재로 대체하고자 한다. 이와 같은 스틸 강화재는 강화재 각각을 따로 제작하여 용접을 통해 결합되지만, 복합재 강화재는 패치(patch) 형태의 CFRP와 리브(rib) 구조의 GFRP를 활용하여 압축과 사출 공정을 통해 한번에 제작된다. CFRP는 B필러의 고강도부에 부착되어 측면 하중에 저항하도록 하였으며, GFRP 리브는 위상 최적화(Topology optimization) 기법을 통해 비틀림과 측면 하중을 저항하도록 설계하였다. 구조해석을 통해 기존 스틸 강화재와 비교 분석을 수행하였고, 경량화율을 산출하였다.

Mechanistic investigations on emission characteristics from g-C3N4, gC3N4@Pt and g-C3N4@Ag nanostructures using X-ray absorption spectroscopy

  • Sharma, Aditya;Varshney, Mayora;Chae, Keun Hwa;Won, Sung Ok
    • Current Applied Physics
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    • 제18권11호
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    • pp.1458-1464
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    • 2018
  • An improved method for the preparation of g-$C_3N_4$ is described. Currently, heating (> $400^{\circ}C$) of urea is the common method used for preparing the g-$C_3N_4$. We have found that sonication of melamine in $HNO_3$ solution, followed by washing with anhydrous ethanol, not only reduce the crystallite size of g-$C_3N_4$ but also facilitate intriguing electronic structure and photoluminescence (PL) properties. Moreover, loading of metal (Pt and Ag) nanoparticles, by applying the borohydride reduction method, has resulted in multicolor-emission from g-$C_3N_4$. With the help of PL spectra and local electronic structure study, at C K-edge, N K-edge, Pt L-edge and Ag K-edge by X-ray absorption spectroscopy (XAS), a precise mechanism of tunable luminescence is established. The PL mechanism ascribes the amendments in the transitions, via defect and/or metal states assimilation, between the ${\pi}^*$ states of tris-triazine ring of g-$C_3N_4$ and lone pair states of nitride. It is evidenced that interaction between the C/N 2p and metal 4d/5d orbitals of Ag/Pt has manifested a net detraction in the ${\delta}^*{\rightarrow}LP$ transitions and enhancement in the ${\pi}^*{\rightarrow}LP$ and ${\pi}^*{\rightarrow}{\pi}$ transitions, leading to broad PL spectra from g-$C_3N_4$ organic semiconductor compound.

GaN증폭기의 본드 와이어 용융단선 현상분석과 과도전류를 고려한 전류용량 선정에 대한 연구 (A Study on Bond Wire Fusing Analysis of GaN Amplifier and Selection of Current Capacity Considering Transient Current)

  • 유우성;석연수;황규혁;김기준
    • 전기전자학회논문지
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    • 제26권4호
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    • pp.537-544
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    • 2022
  • 본 논문은 최근 전자전, 레이더, 기지국 및 위성통신분야에서 각광받고 있는 GaN HEMT(Gallium Nitride High Electron Mobility Transistor) die를 이용한 고출력증폭기의 제작에 사용되는 본드 와이어의 용융단선 현상과 원인을 분석하였다. 고출력증폭기의 주요 성능인 최대 출력전력을 얻기 위해서는 최적의 임피던스 정합이 필요하고 정격전류뿐만 아니라 과도전류에 대한 발열을 고려하여 본드 와이어 소재에 부합하는 직경과 가닥수가 정해져야 한다. 특히, GaN과 같이 에너지 밴드 갭이 넓은 화합물반도체는 설계효율이 낮거나 방열이 부족하면 열 저항 증가로 인해 본드 와이어의 용융단선을 촉발하는 현상을 확인하였다. 본 자료는 발열조건에 대한 모의시험을 수행하고, IR현미경 측정을 통한 검증으로 GaN소자를 이용한 응용분야에 참고자료로 활용이 기대된다.

Influence of Annealing Temperature on Crystal Orientation of Electrodeposited Sb2Se3 Thin-Film Photovoltaic Absorbers

  • Kim, Seonghyun;Lee, Seunghun;Park, Jaehan;Kim, Shinho;Kim, Yangdo
    • 한국재료학회지
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    • 제32권5호
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    • pp.243-248
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    • 2022
  • This study demonstrates a different approach method to fabricate antimony selenide (Sb2Se3) thin-films for the solar cell applications. As-deposited Sb2Se3 thin-films are fabricated via electrodeposition route and, subsequently, annealed in the temperature range of 230 ~ 310℃. Cyclic voltammetry is performed to investigate the electrochemical behavior of the Sb and Se ions. The deposition potential of the Sb2Se3 thin films is determined to be -0.6 V vs. Ag/AgCl (in 1 M KCl), where the stoichiometric composition of Sb2Se3 appeared. It is found that the crystal orientations of Sb2Se3 thin-films are largely dependent on the annealing temperature. At an annealing temperature of 250 ℃, the Sb2Se3 thin-film grew most along the c-axis [(211) and/or (221)] direction, which resulted in the smooth movement of carriers, thereby increasing the carrier collection probability. Therefore, the solar cell using Sb2Se3 thin-film annealed at 250 ℃ exhibited significant enhancement in JSC of 10.03 mA/cm2 and a highest conversion efficiency of 0.821 % because of the preferred orientation of the Sb2Se3 thin film.

Structure and Physical Properties of Fe/Si Multiayered Films with Very Thin Sublayers

  • Baek, J.Y;Y.V.Kudryavtsev;J.Y.Rhee;Kim, K.W.;Y.P.Le
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.173-173
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    • 2000
  • Multilayered films (MLF) consisting of transition metals and semiconductors have drawn a great deal of interest because of their unique properties and potential technological applications. Fe/Si MLF are a particular topic of research due to their interesting antiferromagnetic coupling behavior. although a number of experimental works have been done to understand the mechanism of the interlayer coupling in this system, the results are controversial and it is not yet well understood how the formation of an iron silicide in the spacer layers affects the coupling. The interpretation of the coupling data had been hampered by the lack of knowledge about the intermixed iron silicide layer which has been variously hypothesized to be a metallic compound in the B2 structure or a semiconductor in the more complex B20 structure. It is well known that both magneto-optical (MO0 and optical properties of a metal depend strongly on their electronic structure that is also correlated with the atomic and chemical ordering. In order to understand the structure and physical properties of the interfacial regions, Fe/Si multilayers with very thin sublayers were investigated by the MO and optical spectroscopies. The Fe/si MLF were prepared by rf-sputtering onto glass substrates at room temperature with a totall thickness of about 100nm. The thicknesses of Fe and Si sublayers were varied from 0.3 to 0.8 nm. In order to understand the fully intermixed state, the MLF were also annealed at various temperatures. The structure and magnetic properties of Fe/Si MLF were investigated by x-ray diffraction and vibrating sample magnertometer, respectively. The MO and optical properties were measured at toom temperature in the 1.0-4.7 eV energy range. The results were analyzed in connection with the MO and optical properties of bulk and thin-film silicides with various structures and stoichiometries.

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