• 제목/요약/키워드: clean room structure

검색결과 24건 처리시간 0.02초

TFT-LCD 생산공장 내 유틸리티 가동으로 인한 정밀장비 과도진동 현상 및 평가 (An Analysis and Assessment of Transient Vibration Phenomenon for Precision Equipment Due to Adjacent Utility Operation in TFT-LCD Fab)

  • 백재호;이홍기;손성완;전종균
    • 한국소음진동공학회논문집
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    • 제17권8호
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    • pp.726-735
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    • 2007
  • Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.

Clean Stocker내 새로운 방식의 기류제어에 관한 해석 (Analysis of New Air Control System in Clean Stocker)

  • 최기한;한창우;이상룡
    • 대한기계학회논문집A
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    • 제26권1호
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    • pp.121-130
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    • 2002
  • Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. Since an important function of a stocker is to keep the contained material clean. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker, The airflow across the product prevent contamination from settling on the product. Up to now, stocker typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, In order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. Open ratios of exits need to be optimized for the same quantities of airflow in each exit. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and Blue Ridge Numerics FEM software, CFDesign, was used fur simulating airflow in stocker. As a result, Open ratios of exits important to provide constant clean airflow can be obtained by the analysis of static pressure regain and was verified by simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

Carboxymethylcellulose 제조공정을 이용한 상온에서의 수용성 섬유에 관한 연구 (A Study on the Water-soluble Fiber at the Room Temperature using Carboxymethylcellulose(CMC) Synthesis)

  • 송호준;최영민;박진원
    • 청정기술
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    • 제11권2호
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    • pp.105-116
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    • 2005
  • 본 연구는 NaOH 용액에 의한 머서화(mercerization) 반응과 모노클로로아세트산에 의한 에테르화 반응에 의해 carboxymethylcellulose(CMC)를 제조하고 각 제조단계에서의 반응시간, 시약 농도, 온도 등을 변수로 설정하여 결과물에 대한 영향을 고찰하였다. 제조된 샘플을 용해도와 카르복실기의 치환도를 통해 분석하였으며 부직포로서의 응용을 위해 제조된 수용성 섬유의 인장강도를 알아보았다. 섬유의 표면 변화는 SEM(scanning electron microscope) 사진을 통해 알아보았다. 제조된 섬유는 30분 이내에 80% 이상 용해되었으며 반응시간이나 반응 온도보다 시약의 농도에 의한 영향이 더욱 컸다. 또한 용해도가 80% 이상이었던 시편은 0.6 ~ 0.7의 치환도를 보였으며 모노클로로아세트산의 농도의 영향이 가장 크며 용해도가 증가할수록 치환도가 증가하는 경향을 보였다.

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The Dispersion Stability of Multi-Walled Carbon Nanotubes in the Presence of Poly(styrene/$\alpha-methyl$ styrene/acrylic acid) Random Terpolymer

  • Chang, Woo-Hyuck;Cheong, In-Woo;Shim, Sang-Eun;Choe, Soon-Ja
    • Macromolecular Research
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    • 제14권5호
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    • pp.545-551
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    • 2006
  • Aqueous dispersions of pristine and functionalized (COOH- and $NH_2$-) multi-walled, carbon nanotubes (MWNTs) were prepared by using three types of surf act ants: sodium dodecyl sulfate (SDS, anionic), PEO-PPO-PEO (Pluronic P84, non-ionic), and poly(styrene/$\alpha-methyl$ styrene/acrylic acid) random terpolymer, i.e., alkali-soluble resin (ASR). The aggregate size, $\zeta-potential$, and storage stability of the MWNT aqueous dispersions were investigated by using dynamic light scattering and the turbidity method at room temperature. The exfoliation of the MWNT aggregates was determined by a UV-visible spectrophotometer and the morphology of the surfactant-coated MWNTs was observed by transmission electron microscopy (TEM). In all cases, ASR showed better dispersion stability with the smallest aggregate size, compared with the other surfactants, because of its unique molecular structure, i.e., randomly incorporated carboxylic acid groups and planar phenyl groups that can be irreversibly and effectively adsorbed on the MWNT surface. A predominantly-exfoliated morphology of MWNTs was observed in the presence of ASR from the strong intensity of the UV-vis spectrum at 263 nm.

어린이집 실내공기 중 주요 오염물질의 특성 및 환기에 관한 연구 (A Study on Characteristics of Main Indoor Air Pollutants and Ventilation in Nursery Facilities)

  • 김상철;강병창;이상욱;김기두;서원호;김종헌
    • 한국대기환경학회지
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    • 제30권3호
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    • pp.245-250
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    • 2014
  • As the number of nursery facilities and infants who stay there is continuously increasing, IAQ (Indoor Air Quality) of nursery facilities should be managed strictly and thoroughly because infants are more susceptible to infections due to their low resistivity. In this study the characteristics of IAQ and ventilation associated factors were investigaed for suggesting a desirable condition for IAQ management. Environmental factors were not much related to IAQ characteristics rather than internal factors such as structures of the room. And the positive effect of ventilation on IAQ was obvious and seemed to hinge on factors related to window area especially window/wall ratio. Results of this study indicate that the structure with broader window area of a room and frequnet ventilation can be an effective way for keeping IAQ of nursery facilities clean and safe.

어린이도서관 좌식 열람실의 공간 구성 특성 (A Study on the Characteristics of Floor-sitting Reading Room in Children's Libraries)

  • 문은미
    • 한국실내디자인학회논문집
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    • 제24권1호
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    • pp.189-196
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    • 2015
  • As the number of children's libraries has increased in Korea, it has been discussed to improve the quality of design in the libraries. In a reading room of children's library, spatial consideration should be focused on the children under 10 years old since they are in important points to learn Hangul and to develop reading habits. This study is aimed to examine the characteristics of a floor-sitting reading room, where children can feel like a home, stay in clean and safe and play while reading. The seven case studies of floor-sitting reading rooms are analyzed from the viewpoint of each factor of physical environment, including structure, furniture, and decoration. The following is the summary of findings of this study. First, floor-sitting reading rooms tend to compose main reading areas around bookshelves. Reading areas create the characters by changing floor levels and arranging furniture associated with windows, columns, and wall-type bookshelves. In the reading areas, movable low-level tables are frequently placed for flexible space uses, and seats for reading tend to put together with fixed bookshelves. Second, the central areas of the reading rooms are often shaped in the forms of pods, storytelling areas, sculptures, and unique furniture. Especially storytelling areas and pods play the cores of the reading rooms with the varying steps of floors and pictorial graphics on walls. Third, decoration elements in the reading rooms are designed with graphics, visual displays, and sculptural decorations. In my case studies, spatial elements such as reading nooks, attics, tunnels, and shelters are not often found in the floor-sitting reading rooms even though children like to have them. Since it is the advantage of floor-sitting reading rooms where children can take off shoes and act freely, we should look for the design of such spatial elements in the floor-sitting reading rooms.

설계의 공리를 적용한 Stocker Robot의 Fork Base설계 (Designing of Stocker Robot's Fork Base using Axiomatic Design Method)

  • 백태진;백철준;윤종보;문인호
    • 반도체디스플레이기술학회지
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    • 제10권1호
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    • pp.75-81
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    • 2011
  • Today, FPD manufactures are eager to develop larger and larger glass to become the prime market leader. To follow this need, larger AMHS(Automated Material Handling System) development is essential. The radical increase of glass/cassette weight puts a lot of pressure on stocker robot's dual arms, which can cause a damage of expensive glasses and contaminate a clean room facility. In this paper the axiomatic design method is used to institute a design guideline to evenly distribute a pressure throughout the stocker robot structure.

Organic Solvent Absorption Characteristics of Split-type Microfiber Fabrics

  • Lee Kwang Ju;Kim Seong Hun;Oh Kyung Wha
    • Fibers and Polymers
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    • 제5권4호
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    • pp.280-288
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    • 2004
  • Split-type nylon/polyester microfiber and polyester microfiber fabrics possess drapeability, softness, bulkiness, and smoothness, so that they can be applied in various industrial fields. In particular, these fabrics are able to absorb various organic solvents, and can be used as clean room materials. To investigate the chemical affinity between solvents and the compositional materials of these fabrics, the contact angle of thermally pressed film fabrics was measured with different solvents. The thermally pressed nylon/polyester fabric films showed a chemical attraction to formamide. The sorption properties of the microfiber fabrics were investigated using a real time testing device, and these tests showed that the sorption behavior was more influenced by the structure of the fibrous assembly than by any chemical attraction. The effect of the fabric density, specific weight, and sample structure on the sorption capacity and rate was examined for various organic solvents. The sorption capacity was influenced by the density and the specific weight of the fibrous assembly, and knitted fabric showed a higher sorption capacity than woven fabric. However, the sorption rate was less affected in lower viscosity solvents. On applying Poiseuille's Law, the lower viscosity solvents showed higher initial sorption rates, and more easily penetrated into the fibrous assembly.

공기 청정지역(Class 100 이하)에 적합한 정전기 제거장치의 개발 및 특성에 관한 연구(I) - LCD 제조 공정을 중심으로 - (A Study for Development and Characteristics of Electrostatic Eliminator Suitable for the Super Clean Room Less than Class 100(I))

  • 정용철;박훈규;이동훈
    • 한국안전학회지
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    • 제21권4호
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    • pp.60-65
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    • 2006
  • It is a well known fact that LCD is a central part of the IT industry which is important in the present and the future. But the biggest problem of LCD manufacturing is maintaining a cleaning room environment and administration. Therefore the purpose of this study is to first, prevent the yield depreciation and damage of products, and second, protect the worker ftom accidental electrostatic discharge during LCD manufacture. The soft x-ray ionizer is a type of electrostatic reducer device. It protects against electrostatic discharge in the cleaning room environment and is a necessary environmental factor during LCD production. The positive aspects of the soft x-ray are its shorter time and wider angle of exposure. But the negative aspect of the soft x-ray is its need for several shielding of protection from the harmful x-ray exposure. On this study, the development of the Air Nozzle-type ionizer to amend and refine some problems. For example, examined the electrostatic reduce device of a soft x-ray type and discovered the ion did not go inside well. also workers to be free from danger. An Air Nozzle-type ionizer is comprised of soft x-ray radiation and ionized air production. Air is injected through the nozzle after being ionized from radiation. It supplies air keeping the same pressure into the end foundation of ion production. The soft x-ray is the structure which radiates ionized air through the nozzle (21 holes) having micro holes of the ionizable radiation after ionizing the inside air by the ion production. A worker does not need a cover to protect against x-rays and the Air Nozzle-type ionizer is easy to set up and is more effective at eliminating electrostatic.

RHEED회절점의 강도변화에 따른 In/Si(111)에 대한 연구 (The study of In/Si(111) surface by variation of RHEED spot intensity)

  • 곽호원;이의완;박동수;이운환
    • 한국진공학회지
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    • 제6권2호
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    • pp.172-176
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    • 1997
  • Si(111)7×7표면에 In을 증착시킬 때 기판온도와 증착량에 따른 표면구조의 변화를 RHEED(Reflection High Energy Electron Diffraction) 상(pattern)과 RHEED상의 회절반점 (spot)강도 변화를 관찰하여 조사하였다. Si(111) 기판온도를 400℃로 유지하면서 In을 증착 시킬 때 증착량이 약 0.1, 0.3, 0.5ML에서 각각 {{{{ SQRT { 3} }}× {{{{ SQRT { 3} }}, {{{{ SQRT { 31} }}× {{{{ SQRT { 31} }}, 4×1구조가 관찰 시작하였다. 기판온도 300°에서는 증착량이 약 0.2ML에서부터 4×1구조가 나타나고 0.8ML이상에서부터는 4×1+{{{{ SQRT { 3} }}× {{{{ SQRT { 3} 가 관찰되기 시작하였다. Si(111)-{{{{ SQRT { 3} }}× {{{{ SQRT { 3} 기판온도를 실온으로 유지하면서 In를 착시킬 때 증착량이 0.25, 0.7ML에서 각각 2×2, {{{{ SQRT { 7} }}× {{{{ SQRT { 3} 기 시작하였다. RHEED 반점의 강도변화를 이용하여 Si(111)-{{{{ SQRT { 7} }}× {{{{ SQRT { 3} n원자의 이탈 과정을 조사한 결과 이탈 에너지는 2.84eV로 조사되었다.

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