• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.291-295
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• 1996

This paper discusses several design factors of a capacitance displacement sensor with a numerical method and several experiments and describes guide lines of the design of this type sensor. We introduce the charge density method for the analysis of this type sensor, which has feasible accuracy and efficiency. The analysis of this type sensor with the charge density method agrees with displacement sensitivity experiments of a circular plate capacitance sensor with the sensor amp based In the charge transfer principle.

• Journal of information and communication convergence engineering
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• v.9 no.1
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• pp.78-82
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• 2011

This paper proposes a new circuit for capacitive sensing based on Dickson's charge pump. The proposed touch sensing circuit includes three stages of NMOS diodes and capacitors for charge transfer. The proposed circuit which has a simplified capacitive touch sensor model has been analyzed and simulated by Spectre using Magna EDMOS technology. Looking from the simulation results, the proposed circuit can effectively be used as a capacitive touch sensing circuit. Moreover, a simple structure can provide maximum flexibility for making a digitally-controlled touch sensor driver with lowpower operations.

• Transactions on Electrical and Electronic Materials
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• v.6 no.3
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• pp.87-90
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• 2005

$SiO_2$ via-hole etching with a high aspect ratio is a key process in fabricating ULSI devices; however, accumulated charge during plasma etching can cause etching stop, micro-loading effects, and charge build-up damage. To alleviate this concern, charge-up damage sensor was fabricated for the ultimate goal of real-time monitoring of accumulated charge. As an effort to reach the ultimate goal, fabricated sensor was used for electrical potential measurements of via holes between two poly-Si electrodes and roughly characterized under various plasma conditions using statistical design of experiment (DOE). The successful identification of potential difference under various plasma conditions not only supports the evidence of potential charge-up damage, but also leads the direction of future study.

• Journal of information and communication convergence engineering
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• v.3 no.4
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• pp.187-190
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• 2005

High aspect ratio via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via-hole, this sophisticated and important process still hold several problems, such as etching stop and loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.2
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• pp.303-306
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• 2005

High aspect ration via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via hole, this sophisticated and important process still hold several problems, such as etching stop, loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.5
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• pp.50-57
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• 2008

In this paper, a high-efficiency charge pump for use in CMOS image sensor(CIS) is proposed. The proposed charge pump pursues high pumping efficiency by minimizing the switching and reversion losses by taking advantage of operation characteristics of CIS. That is, the proposed charge pump minimizes the switching loss by dynamically controlling the size of clock driver, pumping capacitor, and charge transfer switch based on the operation phase of CIS pixel sensor. The charge pump also minimizes the reversion loss by guaranteeing a sufficient non-overlapping period of local clocks using a tri-state local clock driver adapting the schmitt trigger. Comparison results using a 0.13-um CMOS process technology indicate that the proposed charge pump achieves up to 49.1% reduction on power consumption under no loading current condition as compared to conventional charge pump. They also indicate that the charge pump provides 19.0% reduction on power consumption under the maximum loading current condition.

• Journal of Sensor Science and Technology
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• v.12 no.1
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• pp.51-56
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• 2003

We describe a charge pump circuit using VCO (voltage controlled oscillator) for storing information into local memories in neural networks. The VCO is used for adjusting the output voltage of the charge pump to the reference voltage and for reducing the fluctuation generated by the clocking scheme. The charge pump circuit is simulated by using Hynix 0.35um CMOS process parameters. The proposed charge pump operates properly regardless to the temperature and the supply voltage variation.

• Journal of Sensor Science and Technology
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• v.17 no.2
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• pp.114-119
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• 2008

Wide dynamic range active pixel sensor(APS) using a charge pump circuit has been designed by using 2-poly 4-metal $0.35{\mu}M$ standard CMOS technology. The structure of the proposed APS is similar to the structure of the conventional 3-Tr APS. The proposed unit pixel consists of one photodiode and three MOSFETs. Using a charge pump circuit, the dynamic range of the proposed APS is increased, compared to the conventional 3-Tr APS.

• Journal of Sensor Science and Technology
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• v.23 no.1
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• pp.24-28
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• 2014

A lock-in amplifier was proposed for capacitive sensor applications. This amplifier was based on a general-purpose microcontroller and had only a charge amplifier as analog circuits. All the other functions of lock-in amplifier except for the charge amplifier were implemented with firmware and the internal resources of the microcontroller. A rectangular signal, generated by the microcontroller, was used in a sensor-driving signal instead of a conventional sinusoidal signal. This makes it possible that the phase comparison circuit in the lockin amplifier is made with analog-to-digital converter, a timer and an interrupt controller. Using the oversampling method and the rectangular driving signal, we can make it easy to implement the peak detection function with software and sample the peak-to-peak signal at charge amplifier output. A charge amplifier was proposed to cancel out the base capacitance existing in capacitive sensors structurally. The experimental results show that the lock-in amplifier operating in the supply voltage of 3.0 V cancels out the base capacitance and has good linearity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.749-750
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• 2010