• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2009년도 춘계학술발표논문집
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• pp.450-453
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• 2009

Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites. Compare economic estimation of SiC ceramic heater with sheathe heater are as followings. (1) Temperature rising time of sheath heater is 1.1 times faster than SiC ceramic heater. (2) Heating insulation of SiC ceramic heater is 2.7 times larger than sheath heater. If SiC ceramic heater is one body type of a product application, contact resistance will decrease. I think that temperature initial rising time is faster than now. The more SiC ceramic heater is used for a long time, the more economic benefit is larger in the view point of heat insulation.

• 한국전기전자재료학회논문지
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• 제30권12호
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• pp.776-781
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• 2017

In this study, we investigated the effect of electrode pattern design on the thermal shock resistance and temperature uniformity of a ceramic heater. A cordierite substrate with a low thermal expansion coefficient was fabricated by tape casting, and a tungsten electrode was printed and used as a heating element. The temperature distribution of the ceramic heater was calculated by a finite-element method (FEM) by considering various electrode patterns, and the tensile stress distribution due to the thermal stress was calculated. In the electrode pattern with a single-line width, the central part of the ceramic heater was heated to the maximum temperature, and the position of the ceramic heater having a double-line width was changed to the maximum temperature, depending on the position of the minimum line width pattern. The highest tensile stress was found along the edges of the ceramic heater. The temperature gradient at the edge determined the tensile stress intensity. The smallest tensile stress was observed for electrode pattern D, which was expected to be advantageous in resisting thermal shock failures in ceramic heaters.

• 한국산학기술학회논문지
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• 제13권3호
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• pp.1275-1278
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• 2012

도전성 복합체의 최적 설계 요소와 세라믹 제조기법을 찾고 발열체 제작을 위한 기초기반 기술을 확보하였다. 제품 응용시 세라믹 발열체를 하나의 몸체로 제작하여 접촉 저항을 최대한 줄이면 시스 발열체보다 1.1배 느린 초기 상승 온도 속도를 높일 수 있고, 보온력에서는 SiC계 세라믹 발열체가 시스 발열체보다 약 2.7배 높기 때문에 제품의 사용 기간이 길어질수록 에너지 절감 효과를 얻을 수 있어, 경제성 면에서 대단히 유리하게 평가 된다.

• 한국산학기술학회논문지
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• 제10권7호
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• pp.1631-1634
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• 2009

SiC에 기초한 도전성 복합체의 최적 설계 요소와 세라믹 제조기법을 찾고 발열체 제작을 위한 기초기반 기술을 확보하였다. 제품 응용시 세라믹 발열체를 하나의 몸체로 제작하여 접촉 저항을 최대한 줄이면 sheath 발열체보다 1.1배 느린 초기 상승 온도 속도를 높일 수 있고, 보온력에서는 SiC계 세라믹 발열체가 sheath 발열체보다 약 2.7배 높기 때문에 제품의 사용 기간이 길어질수록 에너지 절감 효과를 얻을 수 있어, 경제성 면에서 대단히 유리하게 평가 된다.

• 한국세라믹학회지
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• 제47권4호
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• pp.319-324
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• 2010

Screen printable $MoSi_2$ paste and its ceramic sheet heater were investigated. $MoSi_2$ powder without $Mo_5Si_3$ second phase, which causes so-called pest phenomena, was synthesized by SHS technique. Over glaze was also developed for preventing pest phenomenon. The maximum temperature of $MoSi_2$ ceramic heater was over $500^{\circ}C$. After several heat up and cooling cycle, the $MoSi_2$ heater reveals pest phenomenon. Conductive $MoSi_2$ paste could be used in electronic ceramics, i.e., MLCC, LTCC, HTCC, and etc.

• 반도체디스플레이기술학회지
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• 제12권2호
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• pp.67-72
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• 2013

Temperature is a critical parameter in yield improvement for wafer manufacturing. In chemical vapor deposition (CVD) equipment, crack defect in ceramic heater leads to yield reduction, however, there is no suitable ceramic heater fault detection system for conventional CVD equipment. This paper proposes a short-time zero-crossing rate based fault detection method for the ceramic heater in CVD equipment. The proposed method measures the output signal ($V_{pp}$) of RF filter and extracts the zero-crossing rate (ZCR) as feature vector. The extracted feature vectors have a discriminant power and Gaussian mixture model (GMM) based fault detection method can detect fault in ceramic heater. Experimental results, carried out by measured signals provided by a CVD equipment manufacturer, indicate that the proposed method detects effectively faults in various process conditions.

• 한국신뢰성학회지:신뢰성응용연구
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• 제17권4호
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• pp.355-361
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• 2017

Purpose: The purpose of this research is to establish the life test method for ceramic heater and identify the failure mechanisms. Methods: We do accelerated life test in the condition of thermal shock and failure analysis for failed samples. Conclusion: The main failure mechanisms of ceramic heater are identified as overstress failure mechanisms as results of failure analysis and the shape parameters of weibull distribution by accelerated life test are identified as 0.8, 1.2 and 0.4 each at $400^{\circ}C$, $600^{\circ}C$ and $900^{\circ}C$. At $900^{\circ}C$, the shape parameter 0.4 means that It is exactly initial failure caused that the stress exceeds the strength of ceramic heater highly and the shape parameters 0.8, 1.2 at $400^{\circ}C$, $600^{\circ}C$ means that the shape parameters are around 1.0 so that the main failure mechanism is overstress failure which is same result as failure analysis. It means that the appropriate life test method for ceramic heater is reliability qualification test method rather than accelerated life test.

• 한국세라믹학회지
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• 제50권1호
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• pp.57-62
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• 2013

We investigated the thermal and electrical properties of the $B_2O_3-ZnO-Bi_2O_3$ glass system as a sealing material in sheath heater modules. A composition with over 90 wt% $Bi_2O_3$ in the $B_2O_3-ZnO-Bi_2O_3$ system was glassified by controlling the cooling rate. The glass transition temperature and thermal expansion coefficient in bismate glass could be controlled by the minor ingredients of ZnO, $SiO_2$, $BaO_2$, and $K_2O$. The $B_2O_3-ZnO-Bi_2O_3$ glass system bonded well to metal, and bismate glass insulating properties were comparable to those of bismate glass $B_2O_3-ZnO-PbO$ glass system in a sheath heater module.

• 한국전자통신학회논문지
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• 제6권5호
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• pp.717-722
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• 2011

본 논문은 원통형 세라믹관에서 온수를 순간적으로 가열하여 설정된 온도 및 수량으로 제어하고자 전자 제어기를 개발하였다. 순간온수기의 구조는 유입되는 온수가 원통형 세라믹 히터를 통하여 열량을 공급하여 온도를 제어하고자 설계하였고, 또한 수량센서와 임펠러를 이용한 수량을 제어하는 전자 제어기를 설계하였다. 순간온수의 제어방법은 유입되는 유량에 열량을 공급하는 원통형 세라믹 히터의 수학적인 모델링을 수립하여 제어기 적용하였고, 이에 대한 실험결과는 설정온도에 따라 제어가 잘 적용되어, 효율적이고 실용성 결과를 보였다. 따라서 원통형 세라믹 순간온수기는 향후 실용제품에 적용할 수 있는 제품구조와 제어 방법을 제시하였다.

• 대한의용생체공학회:의공학회지
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• 제43권4호
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• pp.219-229
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• 2022

In this study, we propose a miniaturized micro-ceramic heater device. After screen-printing a silver paste between pre-sintered two aluminum oxide plates to integrate a heating circuit, the device was fabricated through a low-temperature sintering process. In order to configure the optimal heating circuit integration condition, the output current evaluation and heating test were performed according to the number of screen prints of the silver paste at various voltages. A silver paste-based heating circuit printed with a line width of 200 ㎛ and a thickness of 60 ㎛ was successfully integrated on a pre-sintered alumina substrate through a low-temperature sintering process. In the case of the 5 times printed device, the thermal response showed a response rate of 18.19 ℃/sec. To demonstrate feasibility of the proposed device in the medical field, such as bio-tissue suturing and hemostasis, a voltage was applied to pig tissue in the device to test tissue change due to heat generated from the device. These results show the possibility that the proposed small ceramic heater could be used in the medical field based on its excellent temperature response.