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Fault Detection for Ceramic Heater in CVD Equipment using Zero-Crossing Rate and Gaussian Mixture Model  

Ko, JinSeok (Department of Electrical, Electronics and Communication Engineering, Korea University of Technology and Education)
Mu, XiangBin (Department of Electrical, Electronics and Communication Engineering, Korea University of Technology and Education)
Rheem, JaeYeol (Department of Electrical, Electronics and Communication Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.12, no.2, 2013 , pp. 67-72 More about this Journal
Abstract
Temperature is a critical parameter in yield improvement for wafer manufacturing. In chemical vapor deposition (CVD) equipment, crack defect in ceramic heater leads to yield reduction, however, there is no suitable ceramic heater fault detection system for conventional CVD equipment. This paper proposes a short-time zero-crossing rate based fault detection method for the ceramic heater in CVD equipment. The proposed method measures the output signal ($V_{pp}$) of RF filter and extracts the zero-crossing rate (ZCR) as feature vector. The extracted feature vectors have a discriminant power and Gaussian mixture model (GMM) based fault detection method can detect fault in ceramic heater. Experimental results, carried out by measured signals provided by a CVD equipment manufacturer, indicate that the proposed method detects effectively faults in various process conditions.
Keywords
Fault detection; CVD equipment; Ceramic heater monitoring;
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  • Reference
1 J.-H. Pak and T. S. Sudarshan, Chemical Vapor Deposition. ASM International, 2001.
2 J. R. Deller, J. G. Proakis and J. H. Hansen, Discretetime processing of speech signals. Macmillan publishing company New York, 1993.
3 C. E. Rasmussen, "The infinite Gaussian mixture model", Advances in neural information processing systems, vol. 12, no. 5.2, p 2, 2000.
4 J. Ko, X. Mu and J. Rheem, "Fault diagnosis for ceramic heater in CVD equipment", International Technical Conference on Circuits/Systems, Computers and Communications, 2013, will be published
5 J. Ko, X. Mu and J. Rheem, "Multiple Gaussian mixture model based fault diagnosis for ceramic heater in CVD equipment", IEEK summer conference 2013, will be published
6 H. Kim, 1020040003333, "Equipment for monitoring heat current of semiconductor production device", Samsung Electronics Co. Ltd., 2004.01.13
7 J. Kim, 1020050092179, "Heater system for use in semiconductor fabricating apparatus", Samsung Electronics Co. Ltd., 2005.09.21