Characterization of Pt Bottom Electrode Deposited on Sputtered-Ru/polysilicon by Metalorganic Chemical Vapor Deposition (유기금속 화학증착법에 의해 Sputtered-Ru/Polysilicon 위에 증착된 Pt 전극의 특성)
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- Korean Journal of Materials Research
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- v.9 no.4
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- pp.368-372
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- 1999