• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.240-243
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• 2002

Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with and without the Presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor Plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films was studied using a scanning electron microscopy Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtain films.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1993년도 추계 학술발표 강연 및 논문 개요집
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• pp.114-114
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• 1993

• 한국진공학회지
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• 제2권4호
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• pp.404-409
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• 1993

Adorption of nitric oxide on the Pt(III) surface sputtered by Ar-ion has been studied using thermal desorption spectroscopy and Auger electron spectroscopy. Ar-ion sputtering creates a precursor state of ($NO\beta$ stage) adsorbe dat defect sites. The precursor state is characterized by the terminal bent species . At low coverge mos 샐 adsorbed NO dissociates . And as increasing the coverage, the fraction of dissociation remains about 80%.

• 한국진공학회지
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• 제5권1호
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• pp.6-13
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• 1996

The kinetics of native oxide formation on the (Al, Ga)As and (Cd, Mn)Te have been studied by X-ray photoelectron spectroscopy(XPS) and Auger electron spectroscopy(AES). The regrowth of native oxide after 3keV Ar ion sputter etch and deionized water etch has been studied. The previous report exhibited that the native oxide on CdTe and GaAs can be removed completely by deionzied(DI) water only[1]. On the other hand, the airgrown native oxide on (Al, Ga)As become nonhomogeneous and the regrown native oxide on (Cd,Mn)Te can be partially removed.

• 한국표면공학회지
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• 제33권4호
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• pp.261-265
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• 2000

Geometrically and chemically well defined Pt/alumina model catalysts have been prepared. To this end, we fabricated electrochemically alumina supports in which pores of constant size, length and shape were regularly distributed over a wide area of the surface. Platinum particles were dispersed on the pore surfaces via organometallic chemical vapor deposition technique using (trimethyl) methylcyclopentadienylplatinum (IV) as a precursor. The chemical composition of the alumina plane surfaces was examined by Auger electron spectroscopy and the adsorption characteristics of the platinum particles were studied by thermal desorption spectroscopy. A variety of industrial catalytic problems are now open for further investigation utilizing the Pt/alumina model catalysts.

• 대한금속재료학회지
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• 제46권10호
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• pp.652-661
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• 2008

Reduction of NOx in emission gas, improvement of engine efficiency, and extension of warranty period has made demands for developing materials more corrosively resistant to the inner-muffler environments or predicting the lifetime of materials used in muffler more precisely. The corrosion inside muffler has been explained with condensate corrosion mainly though thermal oxidation experiences prior to condensate corrosion. Hence, the aim of this study is to describe how the thermal oxidation affects the corrosion of stainless steel exposed to the inner-muffler environments. Auger electron spectroscopy and electrochemical tests were employed to analyze oxide scale and to evaluate corrosion resistance, respectively. Thermal oxidation has different role of condensate corrosion depending on the temperature: inhibiting condensate corrosion below $380^{\circ}C$ and enhancing condensate corrosion above $380^{\circ}C$. The low temperature oxidation causes to form compact oxide layer functioning a barrier for penetrating condensate into a matrix. Although though thermal oxidation caused chromium-depleted layer between oxide layer and matrix, the enhancement of the condensate corrosion in high temperature oxidation resulted from corrosion-induced crevice formed by oxide scale rather than corrosion in chromium-depleted layer. It was proved by aids of anodic polarization tests and measurements of pitting corrosion potentials. By the study, the role of high temperature oxidation layer affecting the condensate corrosion of stainless steels used as muffler materials was well understood.

• 대한전자공학회논문지SD
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• 제41권1호
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• pp.15-20
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• 2004

산화막위에 증착된 금속박막과 산화막과의 계면효과를 조사하였다. 산화막으로는 현재 반도체소자제조공정에 많이 사용되고 있는 BPSG 산화막과 PETEOS 산화막을 사용하였다. 이 두 종류의 산화막위에 적층구조의 금속박막을 형성한 후, 금속박막의 열처리에 의한 계면의 영향을 SEM (scanning electron microscopy), TEM (transmission electron microscopy), AES (auger electron spectroscopy)를 사용하여 조사하였다. BPSG 산화막위에 증착된 금속박막을 $650^{\circ}C$ 이상에서 RTP anneal을 한 경우, BPSG 산화막과 금속박막의 계면결합상태가 좋지 않았고, BPSG 산화막과 금속박막의 계면에 phosphorus가 축적된 영역을 확인하였다. 반면에 PETEOS 산화막위에 증착된 금속박막의 경우, RTP anneal 온도에 관계없이 계면결합상태는 좋았다. 본 연구에서 BPSG 산화막위에 금속박막을 증착할 경우 RTP anneal 온도는 $650^{\circ}C$ 보다 작게 하여야 함을 알 수 있었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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• pp.171-171
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• 2011

Atmospheric pressure- plasma enhanced chemical vapor deposition(AP-PECVD)Processes are recognized as promising and cost effective methods for wide-area coating on sheets of steel, glass, polymeric web, etc. In this study, $SiO_xC_y$ thin films were deposited by using AP-PECVD with a dielectric barrier discharge(DBD). The characteristic of $SiO_xC_y$ thin films were investigated as afunction of the HMDSO/O2/He flow rate. And the moisture permeability of $SiO_xC_y$ thin films was studied. The $SiO_xC_y$ thin films were characterized by the Fourier-transformed Infrared(FT-IR) spectroscopy and also investigated by X-ray photo electron spectroscopy(XPS), Auger Electron Spectroscopy(AES). The moisture permeability of $SiO_xC_y$ thin films was investigated by $H_2O$ permeability tester Detailed experimental results will be demonstrated through th present work.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 추계학술대회 논문집
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• pp.371-372
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• 2009

We have prepared and characterized CIGS nanopowder for absorber layer of photovoltaic. CIGS nanopowder were obtained at $260^{\circ}C$ for 6 hours from the reaction of $CuCl_2$, $InCl_3$, $GaCl_3$ and Se powder in solvent. The CIGS nanopowder were identified to have a typical chalcopyrite tetragonal structure by using X-ray diffraction(XRD), Inductively Coupled Plasma Auger Electron Spectroscopy (AES), Scanning Electron Microscopy(SEM).

• 공업화학
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• 제9권5호
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• pp.667-673
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• 1998

염분이 함유된 콘크리트 모사 세공용액 중에서의 철근 부식반응을 Tafel 분극법과 교류 임피던스법에 의해 비교 고찰하였으며, 철근 표면의 거칠기와 산화피막층에 의한 부식거동을 연구하였다. 전기화학적 교류 임피던스법에 의한 철근부식의 진단은 매우 유용하며, 제안된 모델과 실험결과가 잘 일치하였다. 염분농도가 증가할수록 부식전위는 cathodic-방향으로 이동하여 부식확률이 증가하였으며, 부식전류도 동일한 양상을 보였다. 철근 표면의 산화피막은 주사전자현미경과 AES (Auger electron spectroscopy)로 분석하였다. Torch로 15초간 열처리하여 형성된 철근표면의 산화피막은 오히려 철근부식을 촉진하였으며, 철근 표면의 거칠기가 증가할수록 부식속도는 증가하였다. 또한, 초기 콘크리트 모사세공 용액의 온도 증가는 철근 부식속도의 증가를 가져왔다.