• Title/Summary/Keyword: anodic deposition

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Magnetic Properties of Ni Nanostructures Made by using Nanoporous Anodic Alumina (AAO를 이용한 Ni 나노구조체의 자기적 특징)

  • Lee, S.G.;Shin, S.W.;Lee, J.;Lee, J.H.;Kim, T.G.;Song, J.H.
    • Journal of the Korean Magnetics Society
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    • v.14 no.3
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    • pp.105-108
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    • 2004
  • Array of magnetic Ni nanostructures has been fabricated on Si substrate by using nanoporous alumina film as a mask during deposition. The nanostructures are truncated cone-shape and the lateral sizes are comparable to height. While the continuous film shows well-defined in-plane magnetization, the nanostructure shows perpendicular component of magnetization at remanence. The hysterectic behavior of nanostructures is dominated by the demagnetizing field instead of interaction among them.

Fabrication of Field-Emitter Arrays using the Mold Method for FED Applications

  • Cho, Kyung-Jea;Ryu, Jeong-Tak;Kim, Yeon-Bo;Lee, Sang-Yun
    • Transactions on Electrical and Electronic Materials
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    • v.3 no.1
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    • pp.4-8
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    • 2002
  • The typical mold method for FED (field emission display) fabrication is used to form a gate electrode, a gate oxide layer, and emitter tip after fabrication of a mold shape using wet-etching of Si substrate. However, in this study, new mold method using a side wall space structure was developed to make sharp emitter tips with the gate electrode. In new method, gate oxide layer and gate electrode layer were deposited on a Si wafer by LPCVD (low pressure chemical vapor deposition), and then BPSG (Boro phosphor silicate glass) thin film was deposited. After then, the BPSG thin film was flowed into the mold at high temperature in order to form a sharp mold structure. TiN was deposited as an emitter tip on it. The unfinished device was bonded to a glass substrate by anodic bonding techniques. The Si wafer was etched from backside by KOH-deionized water solution. Finally, the sharp field emitter array with gate electrode on the glass substrate was formed.

Fabrication of the alumina membrane with nano-sized pore array using the thin film aluminum (박막 알루미늄을 이용한 나노미터 크기의 미세기공 형성)

  • Lee, Byoung-Wook;Lee, Jae-Hong;Lee, Eui-Sik;Kim, Chang-Kyu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.120-122
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    • 2005
  • An alumina membrane with nano-sized pore array by anodic oxidation using thin film aluminum deposited on silicon wafer was fabricated. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. While the oxalic acid with 0.2M was used for low voltage anodization under 100V, the chromic acid with 0.1M was used for high voltage anodization over 100V. The nano-sized pores with diameter of 60~120nm was obtained by low voltage anodization of 40~90V and those of 200~300nm was obtained by high voltage anodization of 120~160V. Finally, the sample was immersed to the phosphoric acid with 0.1M concentration to etching the barrier layer. The sample will be applied to electronic sensors, field emission display, and template for nano-structure.

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Anodic Oxidation of Furfuryl Alcohol Using Metal Oxide Electrodes (금속산화물 전극을 사용한 Furfuryl Alcohol의 양극산화)

  • Yoo, Kwang-Sik;Lee, Yong-Taek
    • Applied Chemistry for Engineering
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    • v.3 no.3
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    • pp.482-490
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    • 1992
  • 2,5-dimethoxy-2,5-dihydrofurfuryl alcohol was electrosynthesized from furfuryl alcohol in methanol solution by using three kinds of metal oxide anode. The electrods were prepared by the following process : Thin layer of semiconducting material such as tin(IV)oxide and antimony(III)oxide was made on the titanium base metal in an electric furnace. The titanium metal block with the layer was coated with ${\alpha}-PbO_2$, ${\beta}-PbO_2$, and $MnO_2$ in each electrolytes by anodic deposition, respectively. The lead dioxide electrodes showed better anti-corrosive property than the manganase dioxide electrode. The yield of the product was 92% which is almost the same as the one with conventional platinum electrodes.

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Measurement of Adhesion Strength and Nanoindentation of Metal Interconnections of Al/Ni and TiW/Ni Layers Formed on Glass Substrate (유리기판 위에 형성된 Al/Ni 및 TiW/Ni 다층 금속배선막의 계면 접합력 및 나노압입특성 평가)

  • Joe, Chul Min;Kim, Jae Ho;Hwang, So Ri;Yun, Yeo Hyeon;Oh, Yong Jun
    • Korean Journal of Metals and Materials
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    • v.48 no.12
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    • pp.1116-1122
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    • 2010
  • Metal interconnections of multilayer Al/Ni and TiW/seed-Ni/Ni were formed on glass, and the adhesion strength and nanoindentation response of the composite layers were evaluated. The Al/Ni multilayer was formed by an anodic bonding of glass to Al and subsequent electroless plating of Ni, while the TiW/Ni multilayer was fabricated by sputter deposition of TiW and seed-Ni onto glass and electroless plating of Ni. Because of the diffusion of aluminum into glass during the anodic bonding, anodically bonded glass/Al joint exhibited greater interfacial strength than the sputtered glass/TiW one. The Al/Ni on glass also showed excellent resistance against delamination by bending deformation compared to the TiW/seed-Ni/Ni on glass. From the nanoindentation experiment of each metal layer on glass, it was found that the aluminum layer had extremely low hardness and elastic modulus similar to the glass substrate and played a beneficial role in the delamination resistance by lessening stress intensification at the joint. The indentation data of the multilayers also supported superior joint reliability of the Al/Ni to glass compared to that of the TiW/seed-Ni/Ni to glass.

THE BONE FORMATION AROUND ANODIC OXIDIZED TITANIUM IMPLANTS IN THE TINBIAE OF OVARECTOMIZED RATS (양극산화 표면처리한 티타늄 임플랜트를 난소절제한 백서 경골에 매식 후 주위 골형성에 관한 연구)

  • Park, Sung-Hwan;Jung, Suk-Young;Lee, Jae-Yeol;Kim, Gyoo-Cheon;Shin, Sang-Hun
    • Journal of the Korean Association of Oral and Maxillofacial Surgeons
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    • v.34 no.3
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    • pp.306-318
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    • 2008
  • Anodic spark deposition method(ASD) surface treated titanium implant possesses a considerable osteoconductive potential that promoting a high level of implant osseointegration in normal bone. The purpose of this study was to observe the ASD implant's osseointegration in the osteoporosis-induced animal model. Twenty four rats, 10 weeks of age, were ovarectomized and 5 weeks later divided into two groups : ASD implant group and control implant group. Titanium screw implants (diameter; 2.0 mm, length, 3.5 mm; pitch-height, 0.4 mm) were designed for this study. Experimental implants were ASD treated and no treatment on control implants. ASD implants and control implants were placed in to left tibiae of rats. The rats were sacrificed at different time interval(1, 2, 4 and 8 weeks after implantation) for histopathologic observation and immunohisto-chemistrical observation, with collagen type Ⅰ, fibronectin, integrin ${\alpha}_2{\beta}_1$ and integrin ${\alpha}_5{\beta}_1$ antibodies. The results obtained from this study were as follow: 1. Histopathologic findings, overall tissue response and the pattern of bone formation in both groups were similar. In ASD group, more newly formed bone was seen at 1 week and 2weeks than control group. 2. The levels of type Ⅰ collagen and fibronectin expression were the most abundant at 2weeks and decreased gradually in both groups. Fibronectin and type Ⅰ collagen expression in ASD group were stronger than control group but no significance. 3. The levels of integrin ${\alpha}_2{\beta}_1$ and Integrin ${\alpha}_5{\beta}_1$ expression were most abundant at 2 weeks and decreased gradually in both groups. No significant difference was observed in both groups. From this results, anodic oxidized titanium implants were more advantages in early stage of bone formation than control group, but have no significance in tissue responses and late bone formations. It could be stated that although anodic oxidized titanium implant possesses considerable osteoconductive potential but in osteoporotic bone condition dental implant procedure should performed after improving or treating the osteoporotic bone condition.

A Study on the Preparation and Application of Au/TiO2 Nanofiber from AAO Template (AAO Template를 이용한 Au/TiO2 나노섬유 제조 및 응용에 관한 연구)

  • Eom, Seon-Mi;Park, Sang-Sun;Kim, Young-Deok;Kim, Yong-Rok;Shul, Yong-Gun
    • Journal of the Korean Electrochemical Society
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    • v.12 no.1
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    • pp.47-53
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    • 2009
  • In this study, highly ordered AAO (Anodic Aluminum Oxide) with nanopores was prepared by commercial grade Al substrate containing 3.5 wt.% impurities through two step anodizing method. Nanopores of prepared AAO arrays were used as templates for preparing nanofiber. $TiO_2$ was deposited by using DP (deposition-precipitation) method into AAO pores to grow nanofiber. Au particles were loaded on this $TiO_2$ nanofiber which was grown vertically. Prepared 2 wt.% $Au/TiO_2$ nanofiber was characterized by XRD, SEM and Raman. The crystal structure was analyzed by the XRD. SEM was used to observe pore size and pore wall thickness. Photocatalytic activity of co-oxidation was compared with $TiO_2$ and $Au/TiO_2$ nanofiber on AAO arrays.

Fabrication of Environmental-friendly Materials Using Atomic Layer Deposition (원자층 증착을 이용한 친환경 소재의 제조)

  • Kim, Young Dok
    • Applied Chemistry for Engineering
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    • v.23 no.1
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    • pp.1-7
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    • 2012
  • In this article, I will introduce recent developments of environmental-friendly materials fabricated using atomic layer deposition (ALD). Advantages of ALD include fine control of the thin film thickness and formation of a homogeneous thin fim on complex-structured three-dimensional substrates. Such advantages of ALD can be exploited for fabricating environmental-friendly materials. Porous membranes such as anodic aluminum oxide (AAO) can be used as a substrate for $TiO_2$ coating with a thickness of about 10 nm, and the $TiO_2$-coated AAO can be used as filter of volatile organic compound such as toluene. The unique structural property of AAO in combination with a high adsorption capacity of amorphous $TiO_2$ can be exploited in this case. $TiO_2$ can be also deposited on nanodiamonds and Ni powder, which can be used as photocatalyst for degradation of toluene, and $CO_2$ reforming of methane catalyst, respectively. One can produce structures, in which the substrates are only partially covered by $TiO_2$ domains, and these structures turns out to be catalytically more active than bare substrates, or complete core-shell structures. We show that the ALD can be widely used not only in the semiconductor industry, but also environmental science.

The electrochromic properties of tungsten oxide thin films coated by a sol-gel spin coating under different reactive temperature (솔-젤 스핀 코팅에 의해 증착된 텅스텐 산화물 박막의 반응 온도에 따른 전기변색특성 연구)

  • 심희상;나윤채;조인화;성영은
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.128-128
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    • 2003
  • Electrochromism (EC) is defined as a phenomenon in which a change in color takes place in the presence of an applied voltage. Because of their low power consumption, high coloration efficiency, EC devices have a variety of potential applications in smart windows, mirror, and optical switching devices. An EC devices generally consist of a transparent conducting layer, electrochromic cathodic and anodic coloring materials and an ion conducting electrolyte. EC has been widely studied in transition metal oxides(e.g., WO$_3$, NiO, V$_2$O$\sub$5/) Among these materials, WO$_3$ is a most interesting material for cathodic coloration materials due to its lush coloration efficiency (CE), large dynamic range, cyclic reversibility, and low cost material. WO$_3$ films have been prepared by a variety of methods including vacuum evaporation, chemical vapor deposition, electrodeposition process, sol-gel synthesis, sputtering, and laser ablation. Sol-gel process is widely used for oxide film at low temperature in atmosphere and requires lower capital investment to deposit large area coating compared to vacuum deposition process.

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Formation Mechanism and Corrosion-Resistance of Magnesium Film by Physical Vapour Deposition Process (물리증착법에 의해 제작한 마그네슘 박막의 형성기구와 내식특성)

  • 이명훈
    • Journal of Advanced Marine Engineering and Technology
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    • v.18 no.2
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    • pp.54-63
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    • 1994
  • Mg thin films were prepared on SPCC(cold-rolled steel) substrates by vasuum evapoaration and ion-plating. The influence of argon gas pressure and substrates bias voltage on the crystal orientation and morphology of the film was determined by using X-ray diffraction and scanning electron micrography (SEM), respectively. And the effect of crystal orientation and morphology of the Mg thin films on corrosion behavior was estimated by measuring the anodic polarization curves in deaerated 3% NaCl solution. The crystal orientation of the Mg films deposited at high argon gas pressure exhibited a (002) preferred orientation, regardless of the substrate bias voltage. Film morphology changed from a columnar to a granular structure with the increase of argon gas pressure. The morphology of the films depended not only on argon gas pressure but also bias voltage ; i.e., the effect of increasing bias voltage was similar to that of decreasing argon gas pressure. The influences of argon gas pressure and bias voltage were explained by applying the adsorption inhibitor theory and the sputter theory. And also, this showed that the corrosion resistance of the Mg thin films can be changed by controlling the crystal orientaton and morphology.

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