Fabrication of Field-Emitter Arrays using the Mold Method for FED Applications |
Cho, Kyung-Jea
(Department of Physics, Kyungpook National University)
Ryu, Jeong-Tak (Department of Computer and Communication Engineering, Taegu University) Kim, Yeon-Bo (Department of Computer and Communication Engineering, Taegu University) Lee, Sang-Yun (Department of Physics, Kyungpook National University) |
1 | B. K. Ju, J. S. Park, J. H. Yoon, K. W. Kim, M. S. Kang, K. K. Park, J. Jang, K. H. Tchah, and M. H. Oh, 'Metal(Ti,Nb) coating and silicidization of Si-tip for field emitter applications', J. of KIEEME(in Korean), Vol.12, No.4, p.291, 1991 |
2 | C. A. Spindt, I. Brodie, L. Humphrey, and E. R. Westenberg, 'Physical properties of thin-film field emission cathodes with molybdenum cones', J Appl. Phys. Vol. 47, p. 5248, 1976 DOI ScienceOn |
3 | B. K. Ju and D. J. Lee, 'Technical improvement of FED tubeless packing', J. of KIEEME (in Korean), Vol. 12, No. 12, p. 1097, 1999 |
4 | H. Gamo, T. Kai, S. Kanemaru, and J. Itom, 'Emission characteristics of amorphous silicon field emitter arrays sealed in a vacuum package', Jpn. J. Appl. Phys., Vol. 38, p. 1, 1991 |
5 | H. W. Hwang and Y. S. Kim, 'Field emission properties of the silicon field emission arrays coated with diamond-like carbon film prepared by filtered cathodic vacuum arc technique', J. of KIEEME (in Korean), Vol. 13, No. 4, p. 326, 2000 |
6 | S. H. Yang and M. Yokoyama, 'Enhanced field emission in modified volcano-sharped field emitter', Materials Chemistry and Physics. Vol. 51 p.6, 1997 DOI ScienceOn |
7 | I. Brodie and P. R. Schwoebel, 'Vacuum micro electronic devices', Proceedings of the IEEE, Vol. 82, No. 7, p. 1005, 1994 |
8 | M. Nakamoto, T. Ono, and Y. Nakamura, 'Fa-brication of field emitter arrays by transfer mold technique', IVMC`93 digest paper, p. 3936, 1993 |
9 | G. Hashiguch, H. Mimura, and H. Fujita, 'Fa-brication and emission characteristics of poly-crystalline silicon field emitters', Jpn. J. Appl. Phys., Vol. 34, p. 883, 1995 DOI ScienceOn |
10 | M. Nakamoto, T. Hasegawa, T. Ono, and T. Snkai, 'Low operation volyage field emitter arrays using low work function materials fabricated by transfer mold technique', IEDM'96, 1996 |
11 | M. Nakamoto, K. Ichimura, T. Ono, and Y. Nakamura, Tech.'Transfer Mold Field Emitter Arrays by Intrinsic sharpening', IVMC'95 digest paper, p. 186, 1995 |
12 | M. Nakamoto, T. Hasegawa, T. Ono, T. Sakai, and N. Sakuma, 'Fabrication of field emitter arrays by transfer mold technique', IEDM'96, p. 29, 1996 |
13 | M. W. Geis, J. C. Twichell, and T. M. Lyszczarz, 'Diamond emitters fabrication and theory', J. Vac. Sci. Technol. B, Vol. 14, No. 3, p. 2060, 1996 DOI ScienceOn |
14 | P. Vaudaine and R. Meyer, 'Microtips fluorescent display', IEDM'91, p.197, 1991 |
15 | E.-S. Baik, D. -R. Jeon, and Y. -J. Baik, 'Fabrication and emisssion properties of diode-and triode-type diamond field emitter array based on the transfer mold technique', Diamond and Related Material, Vol. 8, p. 89, 1999 DOI ScienceOn |
16 | D. -J. Lee, B. -K. Ju, W. -B. Choi, J. -W. Jeong, Y. -H Lee, J. Jang, K. -Bae Lee, and M. -H. Oh, 'Novel bonding technology for hermetically sealed silicon micropackage', Jpn. J. Appl. Phys., Vol. 38, p. 1, 1991 |