• 한국정밀공학회지
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• 제21권6호
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• pp.139-144
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• 2004

In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${\mu}{\textrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${\mu}{\textrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.

• 한국정밀공학회지
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• 제21권3호
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• 한국정밀공학회지
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• 제22권9호
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• 한국정밀공학회지
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• 제15권5호
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• pp.93-99
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• 1998

Although laser interferometer measurement system has advantages of measurement range and accuracy, it has some disadvantages when measurement of multi degrees of freedom of motion are required. Because the traditional error measurement methods for geometric errors (two straightness and three angular errors) of a slide of machine tools measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric errors of a moving rigid body in real time processes, an on-line error measurement system for simultaneous detection of the five error components of a moving object is required. Using laser alignment technique and some optoelectronic components, an on-line measurement system with 5 degrees of freedom was developed for the geometric error detection in this study Performance verification of the system has been performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a slide of machine tools.

• 제어로봇시스템학회논문지
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• 제12권6호
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• pp.608-613
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• 2006

Any input acceleration that bends RLG dithering axis causes flexure error, which is a source of the noncommutative error that can not be compensated by simply using integrated gyro sensor output. This paper introduces noncommutative error equations that define attitude errors caused by flexure errors. In this paper, flexure error is classified as sensor level error if the sensing axis coincides with the dithering axis and as system level error if the two axes do not coincide. The relationship between gyro output and the rotation vector is introduced and is used to define the coordinate transformation matrix and angular motion. Equations are derived for both sensor level and system level flexure error analysis. These equations show that RLG based INS attitude error caused by flexure is directly proportional to time, amount of input acceleration and the dynamic frequency of the vehicle.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.343-346
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• 2003

In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error. It also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 10 nm resolution step command. The velocity variation of feeding system is less than 5%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.

• 한국항공우주학회지
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• 제36권10호
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• pp.1003-1010
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• 2008

본 논문은 RLG의 신호처리 기법인 Trapping 기법 적용시 각속도와 가속도의 측정시점 불일치에 의해 발생되는 오차를 보상하는 기법에 관한 연구이다. RLG의 대표적인 신호처리 기법인 Stripping 신호처리 기법과 Trapping 신호처리 기법에 대하여 각 기법의 오차요인을 분석하고 이에 대한 모델링을 수행하였다. 그리고 Trapping 기법 적용시 각속도와 가속도 측정시점 불일치에 의해 발생되는 오차에 대한 모델링을 통하여 항법오차에 미치는 영향을 분석하였으며 이를 감소시키기 위한 새로운 신호처리 기법을 제안하고 시뮬레이션 및 시험을 통하여 이에 대한 성능분석 결과를 제시하였다. 성능 분석결과 본 논문에서 제시한 신호처리 기법이 기존의 방법에 비하여 항법오차를 크게 감소시키는 것을 확인할 수 있었다.

• 한국정밀공학회지
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• 제16권6호
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• pp.148-159
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• 1999

A numerical method is presented for the dynamic analysis of spur gears rotating with very high angular speeds. For an efficient computation each gear is assumed to consist of a rotating rigid disk and an elastic tooth having mass, and finite element formulations are used for the equations of motion of the tooth. The geometric constraint is imposed between the rigid disk and the elastic tooth to fix them, and contact condition is imposed between the meshing teeth of the gears. At each iteration of each time step the Lagrange multiplier and contact force are revised by using the constraint error vector, and then the whole equations of motion are time integrated with the given Lagrange multiplier and contact force. For the accurate solution the velocity and acceleration constraints as well as the displacement constraint are satisfied by the monotone reductions of the constraint error vectors. Computing procedures associated with the iterative schemes are explained and numerical simulations are conducted with the spur gears.

• 한국음향학회지
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• 제16권5호
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• pp.26-35
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• 1997

본 논문에서는 무중력하에서 자유운동하는 물체의 화상정보로부터 그 운동을 추정할 때의 특징점의 대응점을 선택과 샘플링 주기를 설정하는 방법을 제안하였다. 관성 좌표계를 우주 로봇에 내장된 카메라 좌표계로 치환하여 화상에서 구해진 정보로부터 대응점 문제를 해석하고, 대상 물체의 운동을 결정하는 각속도 vector $\omega$를 구하는 것이 가능하다는 것을 시뮬레이션에 의하여 조사하였다. 또한, 특징점의 운동거리에 대한 상대오차가 양자화에 의해서 증가하기 때문에 샘플링 주기 ${\Delta}t$가 짧으면 각속도의 상대오차는 증가한다. 역으로 샘플링 주기 ${\Delta}t$가 너무 길어져도 각속도가 근사화될 때 샘를링 주기가 길기 때문에 오차가 증가한다. 한편, 정밀도는 해상도가 증가함에 따라 증가한다는 것을 확인하였다.