• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.139-144
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• 2004

In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${\mu}{\textrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${\mu}{\textrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.5
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• pp.93-99
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• 1998

Although laser interferometer measurement system has advantages of measurement range and accuracy, it has some disadvantages when measurement of multi degrees of freedom of motion are required. Because the traditional error measurement methods for geometric errors (two straightness and three angular errors) of a slide of machine tools measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric errors of a moving rigid body in real time processes, an on-line error measurement system for simultaneous detection of the five error components of a moving object is required. Using laser alignment technique and some optoelectronic components, an on-line measurement system with 5 degrees of freedom was developed for the geometric error detection in this study Performance verification of the system has been performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a slide of machine tools.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.6
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• pp.608-613
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• 2006

Any input acceleration that bends RLG dithering axis causes flexure error, which is a source of the noncommutative error that can not be compensated by simply using integrated gyro sensor output. This paper introduces noncommutative error equations that define attitude errors caused by flexure errors. In this paper, flexure error is classified as sensor level error if the sensing axis coincides with the dithering axis and as system level error if the two axes do not coincide. The relationship between gyro output and the rotation vector is introduced and is used to define the coordinate transformation matrix and angular motion. Equations are derived for both sensor level and system level flexure error analysis. These equations show that RLG based INS attitude error caused by flexure is directly proportional to time, amount of input acceleration and the dynamic frequency of the vehicle.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.343-346
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• 2003

In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error. It also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 10 nm resolution step command. The velocity variation of feeding system is less than 5%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.10
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• pp.1003-1010
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• 2008

In this paper, we propose the new method to decrease the navigation error by measurement time synchronization error in RLG Trapping signal processing. There are two methods to eliminate the dither motion in RLG. One is the stripping signal processing method. Another is the trapping signal processing method. This two methods have various error sources in measurement output. We perform the error modelling and analysis for the measurement time synchronization error between angular rate from RLG and acceleration from accelerometer in the trapping signal processing method. And we verify the navigation performance through simulation and experiment. Results of simulation and experiment show that the proposed method is very effective in decreasing the navigation error.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.6
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• pp.148-159
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• 1999

A numerical method is presented for the dynamic analysis of spur gears rotating with very high angular speeds. For an efficient computation each gear is assumed to consist of a rotating rigid disk and an elastic tooth having mass, and finite element formulations are used for the equations of motion of the tooth. The geometric constraint is imposed between the rigid disk and the elastic tooth to fix them, and contact condition is imposed between the meshing teeth of the gears. At each iteration of each time step the Lagrange multiplier and contact force are revised by using the constraint error vector, and then the whole equations of motion are time integrated with the given Lagrange multiplier and contact force. For the accurate solution the velocity and acceleration constraints as well as the displacement constraint are satisfied by the monotone reductions of the constraint error vectors. Computing procedures associated with the iterative schemes are explained and numerical simulations are conducted with the spur gears.

• The Journal of the Acoustical Society of Korea
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• v.16 no.5
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• pp.26-35
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• 1997

This paper deals with establishing correspondent points of feature pints and sampling period when we estimate object motion parameters from image information of freely moving objects in space of gravity-free state. Replacing the inertial coordinate system with the camera coordinate system which is equipped within a space robot, it is investigated to be able to analyze a problem of correspond points from image information, and to obtain sequence of angular velocity $\omega$ which determine a motion of object by means of computer simulation. And if a sampling period ${\Delta}t$ is shortened, the relative errors of angular velocity are increased because the relative errors against moving distance of feature points are increased by quantization. In reverse, if a sampling period ${\Delta}t$ is lengthened too much, the relative error are likewise increased because a sampling period is long for angular velocity to be approximated, and we confirmed the precision that grows according to ascending of resolution.