Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2003.06a
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- Pages.343-346
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- 2003
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- 2005-8446(pISSN)
Development of a Hydrostatic Guideway Driven by the Linear Motor
리니어모터를 이용한 초정밀 유정압안내면 개발
Abstract
In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08