Abstract
In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${\mu}{\textrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${\mu}{\textrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.
