• 제목/요약/키워드: amorphous silicon TFT

검색결과 167건 처리시간 0.032초

New High Stability Excimer Laser for LTPS Manufacturing

  • Herbst, Ludolf;Paetzel, Rainer;Simon, Frank;Fechner, Burkhard
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.540-543
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    • 2006
  • LTPS TFT backplanes for AM OLED displays have advantages in regard to reliability and performance compared to TFT backplanes based on amorphous silicon. However, the requirements for homogeneous laser crystallization during LTPS process are much higher than for LCD backplanes. Most important is the energy stability of the laser source. In this paper we describe a new excimer laser which meets the requirements of LTPS manufacturing process with high homogeneity.

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Development of a Low Temperature Doping Technique for Application in Poly-Si TFT on Plastic Substrates

  • Hong, Wan-Shick;Kim, Jong-Man
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.1131-1134
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    • 2003
  • A low temperature doping technique has been studied for application in poly-Si TFT's on plastic substrates. Heavily-doped amorphous silicon layers were deposited on poly-Si and the dopant atoms were driven in by subsequent excimer laser annealing. The entire process was carried out under a substrate temperature of $120^{\circ}C$, and a sheet resistance as low as $300 {\Omega}/sq$. was obtained.

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이차원 소자 시뮬레이터를 이용한 역 스태거형 비정질 실리콘 박막 트랜지스터의 구조 최적화 (Structure Optimization of Inverted-Staggered a-Si TFT Using a Two-Dimensional Device Simulator)

  • 곽지훈;최종선
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 C
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    • pp.1349-1351
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    • 1997
  • TFT2DS was utilized to provide the usefulness as an analytic and design tool. In this paper, the general effects of channel length of an inverted staggered amorphous silicon thin film transistor on its characteristics were investigated. The results obtained from these experiments would be adopted to the optimized device designs and advanced simulations of their electrical properties.

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이차원 소자 시뮬레이터를 이용한 비정질 실리콘 에너지대에 관한 연구 (A Study on the Energy Band of Amorphous Silicon using a Two-Dimensional Device Simulator(TFT2DS))

  • 곽지훈;이영삼;최종선
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.325-327
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    • 1997
  • TFT2DS was developed to provide the usability as an analytic and design tool. The static characteristics of a-Si TFTs demonstrated a good agreement between simulated and measured data. This paper shows that WDS can optimize the physical parameters of a-Si through sensitivity simulations and compute the static characteristics of a-Si TFTs.

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혼합시뮬레이터를 사용한 액정 표시기용 비정질 실리콘 박막 트랜지스터의 특성 시뮬레이션 (Simulation of Characteristics of Amorphous-Silicon Thin Film Transistor for Liquid Crystal Display Using the Mixed Simulator)

  • 이상훈;김경호
    • 전자공학회논문지A
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    • 제32A권12호
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    • pp.122-129
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    • 1995
  • The most important feature of a-Si TFT is dense localized states such as dangling bonds which exist in tis bandgap. Electrons trapped by localized states dominate the potential distribution in the active a-Si region ,and influence the performance of a-Si TFT. In this paper, we describe the electrical characteristics of a-Si TFT with respect to trap distribution within bandgap, electron mobility and interface states using 2-Dimensional device simulator and compare the result of simulation with measurements. Using the mixed-mode simulator, we can predict the potential variation of pixel which causes residual image problem during the turn-off of a-Si TFT driving circuit. Therefore it is possible to consider trade-off between potential variation of pixel and turn-on current of a-Si TFT for the optimized driving circuit.

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비정질 셀레늄층과 비정질 실리콘TFT배열을 사용하는 디지털 X-선 검출기의 영상특성 평가 (Image Quality Evaluation of Digital X-Ray Detector Using Amorphous Selenium Layer and Amorphous Silicon TFT Array)

  • 김창원;윤정기;김종효
    • 한국의학물리학회지:의학물리
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    • 제19권4호
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    • pp.219-226
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    • 2008
  • 이 연구에서는 저자들이 개발한 비정질 셀레늄층과 비정질 실리콘TFT배열을 사용하는 직접방식 디지털 X-선 영상 검출기에 대해 IEC (international electrotechnical commission)와 같은 국제표준으로 권고된 측정방법에 따라 특성을 평가하였다. 영상 성능 묘사에 사용되는 측정은 응답특성(response characteristic), 변조전달함수(MTF, modulation transfer function), 잡음전력스펙트럼(NPS, noise power spectrum), 양자검출효율(DQE, detective quantum efficiency), 양자제한 성능을 포함하고 있다. 영상특성평가 결과, 개발된 검출기의 DQE 값은 최저주파수와 최고주파수에서 각각 40%와 25%이었다. 해외 타사의 제품과 비교해서도 우월한 값을 나타내었다. 또한 MTF는 간접방식 DR, CR과 비교하면 매우 우월한 성능을 보이고 있다. 또한 양자 제한된 특성을 평가한 결과, 0.023 mR 이하에서만 제한된 특성을 보여 일반촬영용도로서 적합성을 확인할 수 있었다.

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Flexible 디스플레이로의 응용을 위한 플라스틱 기판 위의 박막트랜지스터의 제조 (Fabrication of thin Film Transistor on Plastic Substrate for Application to Flexible Display)

  • 배성찬;오순택;최시영
    • 대한전자공학회논문지SD
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    • 제40권7호
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    • pp.481-485
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    • 2003
  • 25㎛ 두께의 폴리이미드 박핀 기판을 glass 기판에 부착하여 최대 온도 150℃에서 비정질 실리콘 TFT를 제작하였다. 본 논문은 plastic 기판 위에 TFT가 제작되는 공정 절차를 요약하고 glass 위에 제작된 TFT와 ON/OFF 전달특성과 전계효과 이동도를 서로 비교해 보았다. a-SiN:H 코팅층은 plastic 기판의 표면 거칠기를 감소시키는 중요한 역할을 하여 TFT의 누설전류를 감소시키고 전계효과 이동도를 증가시켰다. 따라서 a-SiN:H 코팅층을 이용하여 plastic 기판에 양철의 TFT를 제작하였다.

a-Si:H Image Sensor for PC Scanner

  • Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • 제5권2호
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    • pp.116-120
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    • 2007
  • In this paper, the image sensor using the a-Si:H TFT is proposed. The optimum amorphous silicon thin film is deposited using plasma enhanced chemical vapor deposition (PECVD). TFT and photodiode both with the thin film are fabricated and form image sensor. The photodiode shows that $I_{dark}\;is\;{\sim}10^{-13}\;A,\;I_{photo}\;is\;{\sim}10^{-9}\;A\;and\;I_{photo}/I_{dark}\;is\;{\sim}10^4$, respectively. In the case of a-Si:H TFT, it indicates that $I_{on}/I_{off}\;is\;10^6$, the drain current is a few ${\mu}A\;and\;V_{th}\;is\;2{\sim}4$ volts. For the analysis on the fabricated image sensor, the reverse bias of -5 volts in ITO of photodiode and $70 {\mu}sec$ pulse in the gate of TFT are applied. The image sensor with good property was conformed through the measured photo/dark current.

Printed Polymer and a-Si TFT Backplanes for Flexible Displays

  • Street, R.A.;Wong, W.S.;Ready, S.E.;Chabinyc, M.L.;Arias, A.C.;Daniel, J.H.;Apte, R.B.;Salleo, A.;Lujan, R.;Ong, Beng;Wu, Yiliang
    • Journal of Information Display
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    • 제6권3호
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    • pp.12-17
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    • 2005
  • The need for low cost, flexible, thin film transistor (TFT) display backplanes has focused attention on new processing techniques and materials. We report the development of TFT backplane technology based entirely on jet-printing, using a combination of additive and subtractive processing, to print active materials or etch masks. The technique eliminates the use of photolithography and has the potential to reduce the array manufacturing cost. The printing technique is demonstrated with both amorphous silicon and polymer semiconductor TFT arrays, and we show results of small prototype displays.

Design of Integrated a-Si:H Gate Driver Circuit with Low Noise for Mobile TFT-LCD

  • Lee, Yong-Hui;Park, Yong-Ju;Kwag, Jin-Oh;Kim, Hyung-Guel;Yi, Jun-Sin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.822-824
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    • 2007
  • This paper investigated a gate driver circuit with amorphous silicon for mobile TFT-LCD. In the conventional circuit, the fluctuation of the off-state voltage causes the fluctuation of gate line voltages in the panel and then image quality becomes worse. Newly designed gate driver circuit with dynamic switching inverter and carry out signal reduce the fluctuation of the off-state voltage because dynamic switching inverter is holding the off-state voltage and the delay of carry signal is reduced. The simulation results show that the proposed a-Si:H gate driver has low noise and high stability compared with the conventional one.

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