• 제목/요약/키워드: Zn metal target

검색결과 51건 처리시간 0.026초

막 두께에 따른 ZnO:Al 투명 전도막의 전기적, 광학적 특성 (A Study on the Electrical and Optical Properties of Transparent Conductive ZnO:Al Films on Variation of Film Thickness)

  • 양진석;박원효;김용진;성하윤;금민종;손인환;신성권;김경환
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.171-173
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    • 2001
  • ZnO:Al transparent conductive thin films were prepared by facing targets sputtering system with a DC power supply using ZnO target containing 2wt% of $Al_2O_3$ and Zn metal target. Sputtering was carried out at substrate temperature of R.T. and $200^{\circ}C$ with a DC current of 0.6A, $O_2$ flow rate of $0.1{\sim}0.5$ and thickness $300{\sim}900nm$. ZnO:Al films showed a resistivity as low as $10^{-4}{\Omega}-cm$ and a transmittance above 85 % at wavelength 300 and 800nm.

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Crystallographic snapshots of active site metal shift in E. coli fructose 1,6-bisphosphate aldolase

  • Tran, Huyen-Thi;Lee, Seon-Hwa;Ho, Thien-Hoang;Hong, Seung-Hye;Huynh, Kim-Hung;Ahn, Yeh-Jin;Oh, Deok-Kun;Kang, Lin-Woo
    • BMB Reports
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    • 제49권12호
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    • pp.681-686
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    • 2016
  • Fructose 1,6-bisphosphate aldolase (FBA) is important for both glycolysis and gluconeogenesis in life. Class II (zinc dependent) FBA is an attractive target for the development of antibiotics against protozoa, bacteria, and fungi, and is also widely used to produce various high-value stereoisomers in the chemical and pharmaceutical industry. In this study, the crystal structures of class II Escherichia coli FBA (EcFBA) were determined from four different crystals, with resolutions between $1.8{\AA}$ and $2.0{\AA}$. Native EcFBA structures showed two separate sites of Zn1 (interior position) and Zn2 (active site surface position) for $Zn^{2+}$ ion. Citrate and TRIS bound EcFBA structures showed $Zn^{2+}$ position exclusively at Zn2. Crystallographic snapshots of EcFBA structures with and without ligand binding proposed the rationale of metal shift at the active site, which might be a hidden mechanism to keep the trace metal cofactor $Zn^{2+}$ within EcFBA without losing it.

PLD-Furnace로 증착시킨 금촉매를 이용한 ZnO 나노와이어 합성 (ZnO Nanowires Fabricated by Pulsed Laser Deposition using Gold Catalyst)

  • 손효정;전경아;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.5-6
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    • 2005
  • ZnO nanowlres (NWs) were fabricated using Au as catalyst for a method combining laser ablation cluster formation and vapor-liquid-solid (VLS) growth. The target used in synthesis was pure ZnO ceramics. Two different substrates were used; (0001)-oriented sapphires and Au-coated sapphires. The Au thin film was deposited by thermal evaporation and the thickness was about 50 ${\AA}$. ZnO NWs were only formed in case of that used catalyst metal. Field effect scanning electron microscopic (FESEM) investigation showed that the average diameter of ZnO NWs was about 70 nm and the typical lengths varied from $3{\sim}4{\mu}m$.

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ZnO 스퍼터링에서 기판전압의 변화에 의한 성장 조절 (Control of ZnO Sputtering Growth by Changing Substrate Bias Voltage)

  • ;최재원;전원진;조중열
    • 반도체디스플레이기술학회지
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    • 제16권2호
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    • pp.94-97
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    • 2017
  • Amorphous Si has been used for data processing circuits in flat panel displays. However, low mobility of the amorphous Si is a limiting factor for the data transmission speed. Metal oxides such as ZnO have been studied to replace the amorphous Si. ZnO is a wide bandgap (3.3 eV) semiconductor with high mobility and good optical transparency. When ZnO is grown by sputtering with $O_2$ as an oxidizer, there can be many ion species arising from $O_2$ decomposition. $O^+$, $O_2{^+}$, and $O^-$ ions are expected to be the most abundant species, and it is not clear which one contributes to the ZnO growth. We applied alternating substrate voltage (0 V and -70 V) during sputtering growth. We studied changes in transistor characteristics induced by the voltage switching. We also compared ZnO grown by dc and rf sputtering. ZnO film was grown at $450^{\circ}C$ substrate temperature. ZnO thin-film transistor grown with these methods showed $7.5cm^2/Vsec$ mobility, $10^6$ on-off ratio, and -2 V threshold voltage.

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V2O5 기반의 금속 산화물 투명 광전소자 (V2O5 Embedded All Transparent Metal Oxide Photoelectric Device)

  • 김상윤;최유림;이경남;김준동
    • 전기학회논문지
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    • 제67권6호
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    • pp.789-793
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    • 2018
  • All transparent metal oxide photoelectric device based on $V_2O_5$ was fabricated with structure of $V_2O_5/ZnO/ITO$ by magnetron sputtering system. $V_2O_5$ was deposited by reactive sputtering system with 4 inch vanadium target (purity 99.99%). In order to achieve p-n junction, p-type $V_2O_5$ was deposited onto the n-type ZnO layer. The ITO (indium tin oxide) was applied as the electron transporting layer for effective collection of the photo-induced electrons. Electrical and optical properties were analyzed. The Mott-Schottky analysis was applied to investigate the energy band diagram through the metal oxide layers. The $V_2O_5/ZnO/ITO$ photoelectric device has a rectifying ratio of 99.25 and photoresponse ratios of 1.6, 4.88 and 2.68 under different wavelength light illumination of 455 nm, 560 nm and 740 nm. Superior optical properties were realized with the high transmittance of average 70 % for visible light range. Transparent $V_2O_5$ layer absorbs the short wavelength light efficiently while passing the visible light. This research may provide a route for all-transparent photoelectric devices based on the adoption of the emerging p-type $V_2O_5$ metal oxide layer.

이종타겟을 이용한 GZO 박막의 제작

  • 정유섭;김상모;손인환;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.120-120
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    • 2009
  • Ga doped ZnO (GZO) transparent conductive films were deposited on the glass substrates at room temperature by facing target sputtering (FTS) method. The sputtering targets were 100 mm diameter disks of GZO($Ga_2O_3$ 3.w.t%) and Zn metal. The GZO thin films were deposited as a various $PO_2$ (oxygen gas content). Base pressure was $2{\times}10^{-6}torr$, and a working pressure was 1mTorr. The properties of thin films on the electrical and optical properties of the deposited films were investigated by using a four-point probe (Chang-min), a Hall Effect measurement (Ecopia) and an UV/VIS spectrometer (HP). The minimum resistivity of film was $6.5{\times}10^{-4}[{\Omega}-cm]$ and the average transmittance of over 80% was seen in the visible range

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Comparison of Optical Properties of Ga-doped and Ag-doped ZnO Nanowire Measured at Low Temperature

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • 제15권5호
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    • pp.262-264
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    • 2014
  • Pristine ZnO, 3 wt.% Ga-doped (3GZO) and 3 wt.% Ag-doped (3SZO) ZnO nanowires (NWs) were grown using the hot-walled pulse laser deposition (HW-PLD) technique. The doping of Ga and Ag in ZnO NWs was observed by analyzing the optical and chemical properties. We optimized the synthesis conditions, including processing temperature, time, gas flow, and distance between target and substrate for the growth of pristine and doped ZnO NWs. The diameter and length of pristine and doped ZnO NWs were controlled under 200 nm and several ${\mu}m$, respectively. Low temperature photoluminescence (PL) was performed to observe the optical property of doped NWs. We clearly observed the shift of the near band edge (NBE) emission by using low temperature PL. In the case of 3GZO and 3SZO NWs, the center photon energy of the NBE emissions shifted to low energy direction using the Burstein Moss effect. A strong donor-bound exciton peak was found in 3 GZO NWs, while an acceptor-bound exciton peak was found in 3SZO NWs. X-ray photoelectron spectroscopy (XPS) also indicated that the shift of binding energy was mainly attributed to the interaction between the metal ion and ZnO NWs.

해저열수광상 기술.경제성평가 모델 개발 (Development of Technical and Economic Evaluation Model for Seafloor Massive Sulfide Deposits)

  • 박세헌;박성욱;권석재
    • Ocean and Polar Research
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    • 제28권2호
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    • pp.187-199
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    • 2006
  • The Kuroko-type seafloor massive sulfide deposits found in the western Pacific have been considered to have potentials for economic recovery of Au, Ag, Cu, Zn, and Pb. In this study, a preliminary model was developed for the technical and economic evaluation of them. The FRSC site on Lau Basin in the Tonga EEZ was selected as a target. In this study, no construction In for the metallurgical processing subsystem was accounted for. Instead, it was assumed to sell the Cu, Zn, and Pb concentrates to the existing sulfide customer smelter. The low total investment costs for the development make the venture very attractive. However, the result of the economic feasibility evaluation is still less attractive with the mean metal yield of the Kuroko on land. It is considered that commercial mining may be plausible if the richer metal yields are applied to the development. Quantitative information for metal yield is necessary for a more accurate evaluation. However, the important resource potential information regarding the amount of ore body, the inside structure, and the metal yields have not yet been clarified sufficiently. h addition, the flotation of ore body using seawater has not been tested yet. It is necessary to solve these problems through the experimental R&D and a survey.

Selective transport of Cadmium by PVC/Aliquat 336 polymer inclusion membranes (PIMs): the role of membrane composition and solution chemistry

  • Adelung, Sandra;Lohrengel, Burkhard;Nghiem, Long Duc
    • Membrane and Water Treatment
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    • 제3권2호
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    • pp.123-131
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    • 2012
  • This study investigated the extraction and stripping performance of PIMs consisting of PVC and Aliquat 336. Extraction and stripping of three representative heavy metals - namely $Cd^{2+}$, $Cu^{2+}$, and $Zn^{2+}$ - by the synthesized membranes were evaluated as a function of sodium chloride concentration and under different stripping solutions (0.01 M $HNO_3$, Milli-Q water, 0.01 M HCl and 0.01 M NaOH), respectively. Results reported here indicate that the formation of negatively charged metal chloride complex species was responsible for the extraction of the target metal to PIMs. Experimental results and thermodynamic modeling of the speciation of chloro metal complexes further confirm that the extraction selectivity between $Cd^{2+}$, $Cu^{2+}$ and $Zn^{2+}$ can be controlled by regulating the chloride concentration of the feed solution. An acidic solution without any chloride was the most effective stripping solution, followed by Milli-Q water, and a diluted hydrochloric acid solution. On the other hand, the stripping of metals from PIMs did not occur when a basic stripping solution was used.

단일 이온원을 사용하는 이온빔 스퍼터링법에 의한 Mn-Zn 페라이트 박막의 증착 기구 (Characteristics in the Deposition of Mn-Zn Ferrite Thin Films by Ion Beam Sputtering Using a Single Ion Source)

  • 조해석;하상기;이대형;홍석경;양기덕;김형준;김경용;유병두
    • 한국재료학회지
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    • 제5권2호
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    • pp.239-245
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    • 1995
  • 단일 이온원을 사용하는 이온빔 스퍼터링법을 이용하여 Mn-Zn페라이트 박막을 증착하였다. 기판은 1000$\AA$의 산화막이 입혀진 실리콘 웨이퍼를 사용하고 타깃은 (110)Mn-Zn 페라이트 단결정위에 Fe 금속선을 부착한 모자이크 타깃을 사용하엿다. 산소의 유입없이 성장된 박막은 금속선으로부터 스퍼터링된 금속이온들에 의해 상대적인 산소결핍을 나타내어 Wustite 구조를 가졌으며, 이를 해결하기 위해 기판주위로 산소를 유입시켜 증착시킨 결과(111) 우선배향성을 가지는 스피넬 페라이트 상의 박막을 얻을 수 있었다.박막의 성장속도는 이온빔 인출전압, 이온빔 입사각이 증가할수록 감소하였고, 기판과 타깃과의 거리가 멀어질수록 감소하였다. 낮은 이온빔 인출전압에서는 인출전압의 증가에 따라서 박막의 결정화가 향상되었지만, 매우 높은 인출전압에서는 이차이온의 에너지가 너무 높아 박막에 손상을 가하게 되므로 인출전압이 증가할수록 박막의 결정화는 오히려 저하되었다. 스피넬 구조를 가지는 페라이트 박막들은 페리자성을 나타내었으며 박막면에 평행한 방향으로 자화용이축을 가졌다.

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