• 반도체디스플레이기술학회지
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• 제21권2호
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• pp.32-37
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• 2022

As semiconductors become finer, equipment must perform precise and accurate processes to achieve the desired wafer fabrication requirement. Radio frequency power delivery system in plasma system plays a critical role to generate the plasma, and the role of impedance matching unit is critical to terminate the reflected radio frequency power by modifying the impedance of the matching network in the plasma equipment. Impedance matching unit contains one fixed inductor and two variable vacuum capacitors whose positions are controlled two step motors. Controlling the amount of vacuum variable capacitor should be made as soon as possible when the mismatched impedance is detected. In this paper, we present the impedance matching algorithm using the phase sensor.

• Journal of the Korean Data and Information Science Society
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• 제15권4호
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• pp.935-943
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• 2004

Most of the accelerated life tests deal with tests that use only one accelerating variable and no other explanatory variables. Frequently, however, there is a test to use more than one accelerating or other experimental variables, such as, for examples, a test of capacitors at higher than usual conditions of temperature and voltage, a test of circuit boards at higher than usual conditions of temperature, humidity and voltage. A accelerated life test is extended to M-level stress accelerated life test with k-stress variables. The optimal design for Weibull distribution is studied with k-stress variables.

• Bulletin of the Korean Chemical Society
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• 제20권11호
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• pp.1340-1344
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• 1999

The electrochemical behavior of oxide layers on aluminium was studied using electrochemical impedance spectroscopy. Impedance spectra were taken at a compact and a porous oxide layer of Al. The anodic films on Al have a variable stoichiometry with gradual reduction of oxygen deficiency towards the oxide-electrolyte interface. Thus, the interpretation of impedance spectra for oxide layers is complicated, with the impedance of surface layers differing from those of ideal capacitors. This layer behavior with conductance gradients was caused by an inhomogeneous dielectric. The frequency response cannot be described by a single RC element. The oxide layers of Al are properly described by the Young model of dielectric constant with a vertical decay of conductivity.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 B
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• pp.485-487
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• 1995

This paper proposes a GAs-applied method for power system planning using series capacitors in order to control the flow of power as desired and utilize the existing transmission facilities to its transfer capacity limits. The control strategy problem is formulated as optimization problem. Also, in employing genetic algorithms to solve the optimization problems, real variable-based genetic algorithm is presented to save the coding processing time and obtain more accurate value of the variable. An application to IEEE 57-bus test system proves that the proposed method is effective for improvement of power system transfer capacity.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권1호
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권5호
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• pp.579-587
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• 2014

This paper presents a variable gain amplifier (VGA) for an analog front-end (AFE) of ultrasound medical imaging. This VGA has a closed-loop topology and shows a 37-dB-linear characteristic with a single-stage amplifier. It consists of an op-amp, a non-binary-weighted capacitor array, and a gain-control block. This non-binary-weighted capacitor array reduces the required number of capacitors and the complexity of the gain-control block. The VGA has been fabricated in a 0.35-mm CMOS process. This work gives the largest gain range of 37 dB per stage, the largest P1 dB of 9.5 dBm at the 3.3-V among the recent VGA circuits available in the literature. The voltage gain is controlled in the range of [-10, 27] dB in a linear-in-dB scale with 16 steps by a 4-bit digital code. The VGA has a bandpass characteristic with a passband of [20 kHz, 8 MHz].

• Journal of Power Electronics
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• 제17권2호
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• pp.570-578
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• 2017

This paper proposes a method to stabilize the output voltage of the secondary side of an Inductive Power Transfer (IPT) system through tuning/detuning via a serial tuned DC Voltage-controlled Variable Capacitor (DVVC). The equivalent capacitance of the DVVC changes with the conduction period of a diode in the DVVC controlled by DC voltage. The output voltage of an IPT system can be made constant when this DVVC is used as a variable resonant capacitor combined with a PI controller generating DC control voltage according to the fluctuations of the output voltage. Since a passive diode instead of an active switch is used in the DVVC, there are no active switch driving problems such as a separate voltage source or gate drivers, which makes the DVVC especially advantageous when used at the secondary side of an IPT system. Moreover, since the equivalent capacitance of the DVVC can be controlled smoothly with a DC voltage and the passive diode generates less EMI than active switches, the DVVC has the potential to be used at much higher frequencies than traditional switch mode capacitors.

• 전자공학회논문지SC
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• 제40권4호
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• pp.275-281
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• 2003

0.5㎛ 2중 폴리 CMOS 공정을 이용하여 새로운 뉴럴 오실레이터를 설계, 제작하였다. 제안하는 뉴럴 오실레이터는 트랜스콘덕터 및 캐패시터와 비선형 가변 부성저항으로 이루어진다. 뉴럴 오실레이터의 입력단으로 사용되는 비선형 가변 부성저항은 정귀환의 트랜스콘덕터와 가우시안 분포의 전류전압 특성을 지니는 범프 회로를 이용하여 구현하였다. 또한 SPICE 모의실험을 통하여 제안한 오실레이터의 특성분석 후 집적회로 설계를 실시하였다. 한편 흥분성 및 억제성 시냅스로 연결된 4개의 뉴럴 오실레이터로 간단한 신경회로망을 구성하여 그 특성을 확인하였다. 집적회로로 제작된 뉴럴 오실레이터에 대하여 ± 2.5 V 전원 조건하에서 측정된 결과를 분석하고 모의실험 결과와 비교한다.

• 전력전자학회논문지
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• 제18권1호
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• pp.72-83
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• 2013

The paper proposes a new multilevel variable output voltage AC/DC Converter for power supply of power amplifiers used in underwater acoustic sensors. The proposed multilevel variable output voltage AC/DC Converter is composed of two parts. One as the input section is the high efficiency phase-shifted PWM full bridge DC-DC converter to get multiport power sources. The other as the output section is composed of two flying-capacitor 3-level DC-DC converters and a diode bridge circuit to get fast-response and multilevel variable output voltage for an envelope amplifier. Also the paper suggests the detailed circuit topology and design guideline of multilevel variable output voltage AC/DC converter. It also proposes the power balanced control method between 3-level converters and the voltage balanced algorithm for flying capacitors. Its characteristics should be verified by the detailed simulation results. It is anticipated that the proposed converter will be used very well for power amplifiers used in underwater acoustic sensors.

• Journal of Power Electronics
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• 제18권2호
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• pp.445-455
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• 2018

A novel algorithm is proposed to regulate the neutral point potential in neutral point clamped three-level inverters. Oscillations of the neutral point potential and an unbalanced dc-link voltage cause distortions of the output voltage. Large capacitors, which make the application costly and bulky, are needed to eliminate oscillations. Thus, the algorithm proposed in this paper utilizes the finite-control-set model predictive control and the multistage medium vector to solve these issues. The proposed strategy consists of a two-step prediction and a cost function to evaluate the selected multistage medium vector. Unlike the virtual vector method, the multistage medium vector is a mixture of the virtual vector and the original vector. In addition, its amplitude is variable. The neutral point current generated by it can be used to adjust the neutral point potential. When compared with the virtual vector method, the multistage medium vector contributes to decreasing the regulation time when the modulation index is high. The vectors are rearranged to cope with the variable switching frequency of the model predictive control. Simulation and experimental results verify the validity of the proposed strategy.