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RF Impedance Matching Algorithm Using Phase Detector  

Kim, Hwanggyu (Department of Electronics Engineering, Myongji University)
Yang, Jinwoo (Department of Electronics Engineering, Myongji University)
Kang, Sukho (Department of Information and Communication Engineering, Myongji University)
Choi, Daeho (Department of Electronics Engineering, Myongji University)
Hong, Sang Jeen (Department of Electronics Engineering, Myongji University)
Publication Information
Journal of the Semiconductor & Display Technology / v.21, no.2, 2022 , pp. 32-37 More about this Journal
Abstract
As semiconductors become finer, equipment must perform precise and accurate processes to achieve the desired wafer fabrication requirement. Radio frequency power delivery system in plasma system plays a critical role to generate the plasma, and the role of impedance matching unit is critical to terminate the reflected radio frequency power by modifying the impedance of the matching network in the plasma equipment. Impedance matching unit contains one fixed inductor and two variable vacuum capacitors whose positions are controlled two step motors. Controlling the amount of vacuum variable capacitor should be made as soon as possible when the mismatched impedance is detected. In this paper, we present the impedance matching algorithm using the phase sensor.
Keywords
Impedance matching unit; Phase sensor; Matching algorithm; Vacuum Variable Capacitor;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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